Dielectric film, electronic component, thin film capacitor, and electronic circuit board
A technology of film capacitors and dielectric films, applied in the fields of film capacitors and electronic circuit substrates, dielectric films, and electronic components, can solve the problems of inability to have both withstand voltage characteristics and DC bias characteristics
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[0128] Next, the present invention will be described in more detail using examples and comparative examples. However, the present invention is not limited to the following examples.
[0129] (Example, comparative example)
[0130] First, a target for sputtering necessary for forming a dielectric film is produced by a solid phase method as follows.
[0131] Barium carbonate, strontium carbonate, calcium carbonate, titanium oxide, bismuth oxide, sodium carbonate, potassium carbonate, lanthanum hydroxide, cerium oxide, praseodymium oxide, neodymium oxide, samarium oxide, europium oxide, oxide Powder of gadolinium, terbium oxide, dysprosium oxide, holmium oxide, ytterbium oxide, yttrium oxide. For the first embodiment, these powders were weighed so that the atomic number of each metal became the composition shown in Table 1 and Table 2, and for the second embodiment, the atomic number of each metal became the composition shown in Table 3 and Table 4. These powders were weighed ...
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