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Near infrared/visible spectrum broadband absorption metamaterial and preparation method thereof

A near-infrared and metamaterial technology, applied in the field of metamaterials, can solve the problems of high cost of large-scale samples, samples that cannot fully utilize sunlight, and cumbersome and complicated processes

Active Publication Date: 2020-10-30
UNIV OF SCI & TECH OF CHINA
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0004] The traditional top-down lithography technology can realize the preparation of periodic nanoarrays, but the cost of preparing large-scale samples is high, the process is cumbersome and complicated, and the microstructure of the samples is relatively large, generally on the order of microns, so the samples cannot make full use of the sun. Light

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  • Near infrared/visible spectrum broadband absorption metamaterial and preparation method thereof
  • Near infrared/visible spectrum broadband absorption metamaterial and preparation method thereof
  • Near infrared/visible spectrum broadband absorption metamaterial and preparation method thereof

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preparation example Construction

[0030] The invention provides a method for preparing a near-infrared-visible spectrum broadband absorption metamaterial, comprising: S1) depositing a light-absorbing layer on a substrate to obtain a substrate of a composite light-absorbing layer; S2) depositing on the substrate of the composite light-absorbing layer A silicon dioxide film is obtained to obtain a substrate compounded with a silicon dioxide film and a light-absorbing layer; S3) a single-layer microsphere template layer is obtained by self-assembly on the substrate compounded with a silicon dioxide film and a light-absorbing layer, and then an oxygen Plasma etching the single-layer microsphere template layer to obtain an etched template layer; S4) depositing a gold film on the etched template layer, and then removing the template layer to obtain a near-infrared-visible spectrum broadband absorbing metamaterial.

[0031] Among them, the present invention has no special limitation on the sources of all raw materials...

Embodiment 1

[0049] Example 1: Au / SiO 2 / Au-Ag 0.95 Cu 0.05 Fishnet Metamaterial

[0050] a) ITO glass surface impurity removal treatment: ultrasonically clean the ITO conductive glass with acetone, ethanol, and deionized water respectively, and dry it for later use;

[0051] b) Preparation of Au on the ITO surface: using a magnetron sputtering process, using the ITO glass treated in step a) as a substrate, using a magnetron sputtering device to deposit a 100nm Au film;

[0052] c) Preparation of SiO 2 Thin film: take the ITO / Au thin film treated in step b) as the substrate, and deposit SiO with a thickness of 20nm on it by physical vapor deposition process 2 film;

[0053] d) Preparation of single-layer polystyrene (PS) microsphere template: PS spheres (particle size 200nm) were dispersed by ultrasound, and self-assembled at the water-air interface to obtain a periodically arranged single-layer PS microsphere template; Transfer to the ITO / Au / SiO prepared by step c) 2 Substrate; the...

Embodiment 2

[0057] Example 2: Au / SiO 2 / Au-Ag 0.95 Cu 0.05 Fishnet Metamaterial

[0058] a) ITO glass surface impurity removal treatment: ultrasonically clean the ITO conductive glass with acetone, ethanol, and deionized water respectively, and dry it for later use;

[0059] b) Preparation of Au on the ITO surface: using a magnetron sputtering process, using the ITO glass treated in step a) as a substrate, using a magnetron sputtering device to deposit a 100nm Au film;

[0060] c) Preparation of SiO 2 Thin film: take the ITO / Au thin film treated in step b) as the substrate, and deposit SiO with a thickness of 20nm on it by physical vapor deposition process 2 film;

[0061] d) Preparation of single-layer polystyrene (PS) microsphere template: PS spheres (particle size 200nm) were dispersed by ultrasound, and self-assembled at the water-air interface to obtain a periodically arranged single-layer PS microsphere template; Transfer to the ITO / Au / SiO prepared by step c) 2 Substrate; the...

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Abstract

The invention provides a preparation method of a near-infrared / visible spectrum broadband absorption metamaterial. The preparation method comprises the following steps: depositing a light absorption layer on a substrate to obtain a substrate of a composite light absorption layer; depositing a silicon dioxide film on the substrate compounded with the light absorption layer to obtain a substrate compounded with the silicon dioxide film and the light absorption layer; carrying out self-assembling on the substrate compounded with the silicon dioxide film and the light absorption layer to obtain asingle-layer microsphere template layer, and then etching the single-layer microsphere template layer with oxygen plasma to obtain an etched template layer; and depositing a gold film on the etched template layer, and removing the template layer to obtain the near infrared / visible spectrum broadband absorption metamaterial. Compared with the prior art, the invention has the following advantages: light transmission is reduced through the light absorption layer; meanwhile, the fishing-net-shaped gold film is prepared by etching the template layer, so impedance matching with an incident medium isachieved, and reflection of light in the structure is effectively restrained; and therefore, broadband absorption of the metamaterial is achieved, sunlight can be efficiently absorbed, and the photocatalytic activity of the metamaterial is improved.

Description

technical field [0001] The invention belongs to the technical field of metamaterials, and in particular relates to a near-infrared-visible spectrum broadband absorption metamaterial and a preparation method thereof. Background technique [0002] In the past 50 years, humans have mainly relied on burning fossil fuels for energy, which has also led to excessive emissions of greenhouse gases, posing potential threats to the ecology. In order to realize the sustainable development of society, researchers use photocatalytic reduction of CO 2 The method will CO 2 into methane (CH 4 ) and other high-value clean fuels to achieve CO 2 recycling. In general, photocatalysis mainly includes three steps: photocatalyst absorbs light to generate photogenerated electron-hole pairs, charge transfer to the catalyst surface, and participates in oxidation (reduction) reactions. Semiconductor-based catalysts cannot efficiently utilize low-frequency sunlight due to their inherent bandgap. T...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): B01J23/89B01J23/52C01B32/40C07C1/12C07C9/04B82Y30/00B82Y40/00G01J5/00G01N31/10
CPCB01J23/8926B01J23/52C01B32/40C07C1/12B82Y30/00B82Y40/00G01J5/00G01N31/10B01J35/39C07C9/04
Inventor 熊宇杰王晓农邵天一高超
Owner UNIV OF SCI & TECH OF CHINA