A kind of treatment method of boron trifluoride tail gas

A treatment method, a technology of boron trifluoride, applied in gas treatment, chemical instruments and methods, separation methods, etc., can solve the problems of high cost, poisonous and harmful, and high pressure on environmental protection, and achieve low treatment costs, cost savings, and reduced The effect of consumption
CN112169562BActive Publication Date: 2022-07-22SUZHOU JINHONG GAS CO LTD
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Patent Information

Authority / Receiving Office
CN Β· China
Patent Type
Patents(China)
Current Assignee / Owner
SUZHOU JINHONG GAS CO LTD
Publication Date
2022-07-22

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Abstract

The invention discloses a method for treating boron trifluoride tail gas, comprising the following steps: (1) absorbing the boron trifluoride tail gas with excess sodium hydroxide solution to generate a mixed solution containing sodium fluoride and sodium metaborate (2) mixed solution and calcium hydroxide emulsion are mixed and react, generate calcium fluoride precipitation, obtain the first mother liquor containing calcium fluoride; (3) first mother liquor is centrifuged to obtain the first pair of The product calcium fluoride and the first clear liquid; (4) the first clear liquid is heated to 40~65 ℃, reacts while stirring, generates calcium metaborate precipitation, obtains the second mother liquor containing calcium metaborate; (5) will The second mother liquor is centrifuged to obtain the second by-product calcium metaborate. In the present invention, NaOH solution is used for lye absorption first, and then Ca(OH) 2 Staged treatment is carried out to obtain by-products calcium fluoride and calcium metaborate. While efficiently treating boron trifluoride in the tail gas, no fluorine-containing wastewater is produced.
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Description

technical field

[0001] The invention belongs to the field of treatment of boron trifluoride tail gas, in particular to a treatment method of boron trifluoride tail gas. Background technique

[0002] Boron trifluoride, with the molecular formula BF3, is a colorless gas at room temperature and fumes in humid air. Boron trifluoride is an extremely important chemical raw material and is widely used in many organic synthesis, elemental boron production, boron fiber processing and preparation of organic boron compounds; high-purity boron trifluoride can also be used in ultra-large-scale circuit semiconductors In device fabrication, as a P-type dopant source for silicon and germanium epitaxy, diffusion and ion implantation processes.

[0003] In the prior art, it is unavoidable in the use of boron trifluoride: the treatment of boron trifluoride-containing tail gas. The commonly used method is mainly to use lime water or sodium hydroxide solution for absorption. For lime water, d...

Claims

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