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Miniature thermoelectric device and preparation method thereof

A thermoelectric device, thermoelectric technology, applied in the manufacture/processing of thermoelectric devices, thermoelectric device parts, etc., can solve the problems of low automation, stability and refrigeration performance, achieve good dimensional consistency, avoid wear and tear Pollution, high precision effect

Pending Publication Date: 2021-02-05
INST OF METAL RESEARCH - CHINESE ACAD OF SCI
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

The degree of automation of production is low, and the stability and refrigeration performance need to be greatly improved

Method used

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  • Miniature thermoelectric device and preparation method thereof
  • Miniature thermoelectric device and preparation method thereof
  • Miniature thermoelectric device and preparation method thereof

Examples

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Embodiment 1

[0064]Such asFigure 1-Figure 4As shown, the structure design drawing of the device manufactured in this embodiment, and the manufacturing method refer to the foregoing implementation process. For the Transistor Out-line (TO) package Distributed Feedback Laser (DFB) laser used in the optical fiber communication network, the device structure and performance were simulated using finite element simulation software, and a micro thermoelectric device was designed. The bottom substrate of the micro thermoelectric device is a Plane, solder paste is used as the interface layer, and it is attached to the TO package base. The laser chip is also attached to the upper surface of the micro thermoelectric device through solder paste. The electrode wires of the micro thermoelectric device are connected to the electrode pins on the TO package base through solder, etc., which can realize energization and cooling. A thermistor is attached to the side of the laser or the cold end of the TEC for real-ti...

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Abstract

The invention relates to the field of semiconductor devices, in particular to a miniature thermoelectric device and a preparation method thereof. The thermoelectric device comprises a bottom substrate, a top substrate and thermoelectric units; wherein the top substrate is oppositely arranged above the bottom substrate, transition layers are arranged at the two ends, corresponding to the bottom substrate and the top substrate, of each thermoelectric unit respectively; the bottom substrate is connected with the transition layers at the lower ends of the thermoelectric units through functional layers on the bottom substrate; and the top substrate is connected with the transition layer at the upper end of the thermoelectric unit through the functional layer on the top substrate. The patternedfunctional layers are formed on the bottom substrate and the top substrate by using a mask technology, and the N-type thermoelectric particles and P-type thermoelectric particles are successively transferred to the bottom substrate according to a designed arrangement rule by using a vacuum array adsorption transfer and image recognition technology to be in contact with the welding coating; finally, the top substrate with the plating layer is covered, bonding and electric connection of the thermoelectric device are achieved through pressurization and heating methods; therefore, efficient manufacturing of the high-integration-density miniature thermoelectric device can be achieved.

Description

Technical field[0001]The invention relates to the field of semiconductor devices, in particular to a miniature thermoelectric device and a preparation method thereof.Background technique[0002]Among many new energy technologies, thermoelectric conversion technology has attracted much attention because it can utilize various waste heat in daily life and production to generate electricity. At the same time, the new generation of smart flexible micro-nano electronic systems represented by wearable and implantable urgently needs to develop microwatt-milliwatt self-powered technology, and combine it with primary and secondary battery technology to improve device operation Stability and service life. Thermoelectric materials can use the temperature difference between the human body temperature and the surrounding environment to generate electricity, and become an effective solution for the self-powered technology of portable intelligent flexible electronic devices. However, distributed hea...

Claims

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Application Information

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IPC IPC(8): H01L35/04H01L35/14H01L35/16H01L35/18H01L35/22H01L35/32H01L35/34
CPCH10N10/81H10N10/851H10N10/852H10N10/853H10N10/855H10N19/101H10N10/01
Inventor 邰凯平赵洋乔吉祥孙东明
Owner INST OF METAL RESEARCH - CHINESE ACAD OF SCI
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