Lead salt film structure for infrared photoelectricity and preparation method thereof
A lead-salt and thin-film technology, used in circuits, electrical components, final product manufacturing, etc., to improve the specific detection rate, reduce low-frequency noise, and achieve high uniformity
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Embodiment 1
[0045] Embodiment 1 composite structure lead salt film structure
[0046] refer to figure 1 and figure 2 , the present invention provides a kind of compound structure lead salt thin film, 1 is substrate, 2 is the lead salt grain layer of loose structure prepared by physical vapor deposition method, 3 is the small grain lead salt of chemical method growth;
[0047] Wherein, the lead salt grain layer is covered on the substrate, and there are gaps between the lead salt grains;
[0048] Wherein, the small grain lead salt is embedded in the gap between the lead salt grains of the lead salt grain layer;
[0049] Wherein, the lead salt is lead sulfide or lead selenide;
[0050] Wherein, the substrate is a quartz substrate or a sapphire substrate or a silicon wafer containing an oxide layer.
[0051] refer to image 3 , 4 is the passivation layer, after annealing the lead salt thin film of the composite structure, a passivation layer is added, and the passivation layer is bonde...
Embodiment 2
[0052] The preparation of embodiment 2 composite structure lead selenide film
[0053] (1) physical vapor deposition
[0054] The quartz substrate is cut into a regular size (such as 4*2.5cm2), cleaned, and multiple pieces of quartz are placed in a fixture and placed in a vapor deposition furnace;
[0055] Add polycrystalline lead selenide into the crucible, close the furnace hall, and evacuate to 10-4Pa level;
[0056] Heating the crucible to melt the lead selenide to volatilize it;
[0057] According to the thickness parameters of the film thickness meter, the thickness of the lead selenide film is 0.9-1.1um;
[0058] Turn off the heating power supply, fill with nitrogen gas to normal pressure, open the furnace, and take out the quartz plate with lead selenide film.
[0059] (2) Chemical water bath
[0060] Adopt 99.99% pure selenium powder (5g) and 99% pure sodium sulfite (7.98g) and high-purity water 600mL to configure sodium selenosulfate solution, stir for 24 hours, ...
Embodiment 3
[0072] Embodiment 3 product test
[0073] The chip formed through the step-by-step processing of the embodiment 2 can be used for spot welding packaging to form a lead selenide detector with excellent performance.
[0074] Noise test and photoelectric response test were carried out on the lead selenide detector. The noise test results are as follows: Figure 4 As shown; and using a 500K black body light source, the photoelectric response test results are as follows Figure 5 shown.
[0075] The result shows that the noise of the device is extremely low. Compared with existing market products, the noise of the lead-salt detector of the present invention is 1-2 orders of magnitude lower, and the specific detection rate reaches 5.5*10 10 Jones, compared with similar foreign products Laser Components lead selenide detector (1.8*10 10 Jones) is about 200% higher than that of Sorebo's similar lead selenide products (2.5*10 9 Jones) more than 10 times higher. In particular, the ...
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