Porous silicon carbide ceramic and preparation method thereof

Abstract

The invention relates to the field of silicon carbide ceramics, and particularly discloses a porous silicon carbide ceramic and a preparation method thereof. The porous silicon carbide ceramic comprises the following components in parts by weight: 80-100 parts of silicon carbide micro powder, 2-10 parts of a sintering aid, 1-5 parts of a pore-forming agent, 1-5 parts of a cross-linking agent, 3-6 parts of a dispersing agent and 45-55 parts of deionized water, wherein the pore-forming agent is straw micro powder with the particle size of 1-30 [mu]m. The preparation method comprises the steps: mixing and stirring the silicon carbide micro powder, the sintering aid, the cross-linking agent, the dispersing agent and the deionized water, then adding the pore-forming agent and a permeation accelerating agent, and stirring under a vacuum condition to obtain silicon carbide ceramic slurry; and performing vacuum suction filtration on the silicon carbide ceramic slurry, putting the silicon carbide ceramic slurry into a mold, baking to obtain a porous silicon carbide ceramic biscuit, and sintering the porous silicon carbide ceramic biscuit in an argon atmosphere to obtain the porous silicon carbide ceramic. The porous silicon carbide ceramic prepared by the preparation method is good in environmental protection property, low in cost, large in porosity and excellent in performance.

Description

technical field [0001] The present application relates to the field of silicon carbide ceramics, more specifically, it relates to a porous silicon carbide ceramic and a preparation method thereof. Background technique [0002] Porous silicon carbide ceramics have the advantages of good chemical stability, high mechanical strength, acid and alkali resistance, and high temperature resistance, and are widely used in harsh environments such as the petrochemical industry. At the same time, porous silicon carbide ceramics have high thermal conductivity and low thermal expansion coefficient. After fine processing, ultra-high flatness can be obtained, and the flatness is not affected by temperature changes, making porous silicon carbide ceramics in integrated circuit manufacturing equipment. It has been well applied in wafer carrying adsorption, such as sucker for lithography, sucker for laser quenching, sucker for laser scribing, etc. [0003] The preparation technology of porous ...

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Problems solved by technology

[0005] In order to improve the problem of poor environmental protection during the production of existing porous silicon carbide ceramics, the application provides a porous silicon carbide ceramic and its preparation method

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