Porous silicon carbide ceramic and preparation method thereof

Abstract

The present application relates to the field of silicon carbide ceramics, and specifically discloses a porous silicon carbide ceramic and a preparation method thereof. The porous silicon carbide ceramic includes the following components in parts by weight: 80-100 parts of silicon carbide micropowder, 2-10 parts of sintering aid, 1-5 parts of pore-forming agent, 1-5 parts of cross-linking agent, and 3-5 parts of dispersant. 6 parts, 45-55 parts of deionized water, and the pore-forming agent is straw micropowder with a particle size of 1-30 μm; the preparation method is: mixing silicon carbide micropowder, sintering aid, cross-linking agent, dispersant and deionized water and mixing Stirring, then adding a pore-forming agent and a catalyzing agent and stirring under vacuum conditions to obtain a silicon carbide ceramic slurry; vacuum filtration of the silicon carbide ceramic slurry, put it into a mold and bake to obtain a porous silicon carbide ceramic green body, The porous silicon carbide ceramic green body is sintered in an argon atmosphere to obtain the porous silicon carbide ceramic. The porous silicon carbide ceramic prepared in the present application has good environmental protection, low cost, large porosity and excellent performance.

Description

technical field [0001] The present application relates to the field of silicon carbide ceramics, and more particularly, to a porous silicon carbide ceramic and a preparation method thereof. Background technique [0002] Porous silicon carbide ceramics have the advantages of good chemical stability, high mechanical strength, acid and alkali resistance, and high temperature resistance, and are widely used in harsh environments such as the petrochemical industry. At the same time, porous silicon carbide ceramics have the characteristics of high thermal conductivity and low thermal expansion coefficient. After fine processing, ultra-high flatness can be obtained, and the flatness is not affected by temperature changes, so that porous silicon carbide ceramics can be used in integrated circuit manufacturing equipment. It has been well used in the adsorption of medium wafers, such as suction cups for lithography, suction cups for laser quenching, suction cups for laser scribing and...

AI Technical Summary

Problems solved by technology

[0005] In order to improve the problem of poor environmental protection during the production of existing porous silicon carbide ceramics, the application provides a porous silicon carbide ceramic and its preparation method

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