Single-mode micro laser based on single echo wall mode optical microcavity and implementation method
A technology of whispering gallery mode and optical microcavity, applied in the structure of optical resonator, laser, laser parts, etc., can solve the complex preparation process, increase the pumping threshold and laser line width of the microlaser, and reduce the quality factor of the microcavity and other problems to achieve the effect of high quality factor
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Embodiment 1
[0034] 1) The optical fiber taper is coupled with the erbium-doped lithium niobate thin film optical microcavity, such as Figure 4 As shown, taking the wafer of lithium niobate thin film 8 doped with 1mol% erbium ions as an example, a layer of chromium film with a thickness of 700nm is plated on it as a mask, and an optical microcavity of the required size is etched by a femtosecond laser. About 30 microns in diameter, it sits on a 2 µm-thick silicon dioxide layer pillar 9, supported by an underlying lithium niobate substrate 10, and has a free spectral range of about 13 nm around a wavelength of 1550 nm, which is about the gain of erbium ions Half of the bandwidth (1535~1560 nm). The microcavity after femtosecond laser etching, combined with chemical mechanical polishing technology (R. Wu, et al., Opt. Lett., Vol. 43, P 4116-4118, 2018) to obtain smooth edges doped with erbium ions Whispering gallery mode optical microcavity 1, the silicon dioxide ball is used as a 60nm pol...
Embodiment 2
[0042] The optical waveguide is coupled with the quantum dot optical microcavity, such as Figure 5 shown
[0043] 1) Use a femtosecond laser to etch an optical microcavity containing quantum dots of the required size. After the femtosecond laser etches the microcavity, the free spectral range of the optical microcavity is at least 1 / 2 of the spectral width of the material containing quantum dots , combined with chemical mechanical polishing technology (R. Wu, et al., Opt. Lett., Vol. 43, P 4116-4118, 2018) to obtain an optical microcavity with smooth edges. Before polishing, carefully clean the gold velvet polishing pad to prevent the small particles inside from scratching the optical microcavity. Ultrasonic methods can be used for deep cleaning. The polished microcavity removes organic matter and particles on the surface by ultrasonic and cotton swab scrubbing, making the surface of the optical microcavity cleaner and reducing loss.
[0044] 2) Use photolithography or dry ...
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