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Device based on high-conductivity two-dimensional bismuth film, preparation method and application

A high-conductivity, thin-film device technology, which is applied in the manufacture/processing of thermoelectric devices, chemical instruments and methods, and thermoelectric device junction lead-out materials, etc., can solve the problems of low thermoelectric figure of merit and lack of thermoelectric performance, and achieve improved Efficiency, low requirements for experimental equipment, and simple process

Pending Publication Date: 2021-10-22
SOUTHEAST UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

Existing conductive films are still deficient in thermoelectric properties, such as low thermoelectric figure of merit

Method used

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  • Device based on high-conductivity two-dimensional bismuth film, preparation method and application
  • Device based on high-conductivity two-dimensional bismuth film, preparation method and application
  • Device based on high-conductivity two-dimensional bismuth film, preparation method and application

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0039] A method for preparing a device based on a two-dimensional bismuth film with high conductivity, the method is as follows figure 1 As shown, it specifically includes the following steps:

[0040] (1) Take a pure silicon wafer with a thickness of 0.5 mm as the substrate, soak it in acetone, isopropanol, and deionized water in sequence, then ultrasonically clean it, and then dry it with a nitrogen gun;

[0041] (2) Evaporate a bismuth film with an electron beam, the thickness of the bismuth film is 20nm, then soak the pure silicon wafer with the bismuth film deposited with acetone and perform ultrasonic cleaning. , repeated 10 times, then the sample was rinsed with acetone, isopropanol, and deionized water in sequence, and finally dried with a nitrogen gun to obtain a pure silicon wafer with a clean two-dimensional bismuth film on the surface;

[0042] (3) Place the pure silicon wafer with a clean two-dimensional bismuth film on the surface of the coating machine, and use...

Embodiment 2

[0049] A method for preparing a device based on a two-dimensional bismuth film with high conductivity, the method is as follows figure 1 As shown, it specifically includes the following steps:

[0050] (1) Take a pure silicon wafer with a thickness of 0.5 mm as the substrate, soak it in acetone, isopropanol, and deionized water in sequence, then ultrasonically clean it, and then dry it with a nitrogen gun;

[0051] (2) Evaporate a bismuth film with an electron beam, the thickness of the bismuth film is 30nm, then soak the pure silicon wafer with the bismuth film deposited with acetone and perform ultrasonic cleaning. , repeated 10 times, then the sample was rinsed with acetone, isopropanol, and deionized water in sequence, and finally dried with a nitrogen gun to obtain a pure silicon wafer with a clean two-dimensional bismuth film on the surface;

[0052](3) Place the pure silicon wafer with a clean two-dimensional bismuth film on the surface of the coating machine, and use ...

Embodiment 3

[0058] A method for preparing a device based on a two-dimensional bismuth film with high conductivity, the method is as follows figure 1 As shown, it specifically includes the following steps:

[0059] (1) Get a silicon chip with an oxide layer with a thickness of 0.5mm as the substrate, soak it in acetone, isopropanol, and deionized water successively, then ultrasonically clean it, and dry it with a nitrogen gun;

[0060] (2) Pre-treat the silicon substrate by immersing it in a diluted hydrofluoric acid solution to remove oxides on its surface, and place it in a high-vacuum system within 20 minutes after treatment to limit its re-oxidation. Using molecular beam epitaxy to grow two-dimensional bismuth on silicon with the surface oxide layer removed, the growth direction is the (111) plane of silicon, and the growth rate is at room temperature The thickness of the grown two-dimensional bismuth is 30nm.

[0061] (3) Place the pure silicon wafer with a clean two-dimensional bi...

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Abstract

The invention discloses a device based on a two-dimensional bismuth film with excellent electrical properties and a preparation method of the device. The device comprises a substrate and an electrode. A two-dimensional bismuth film with high conductivity is prepared on a pure silicon wafer substrate for the first time by utilizing an electron beam evaporation process, and an electrode with a specific shape is manufactured on the two-dimensional bismuth film through photoetching and electron beam evaporation processes. The method is controllable in process, wherein a two-dimensional bismuth device with high conductivity can be prepared on a large scale, and the two-dimensional bismuth conductive film and the substrate material are compounded in a layered / layered form, so that the two-dimensional bismuth film has the characteristics of long average free path, high carrier mobility and high thermoelectric conversion efficiency. The device has the advantages of being high in surface flatness, adjustable in material thickness, stable in chemical property, long in service life, good in material durability and the like.

Description

technical field [0001] The invention relates to the field of thermoelectricity, in particular to a transistor device based on a two-dimensional bismuth thin film with high conductivity, a preparation method and an application. Background technique [0002] The thermoelectric effect, which converts heat into electricity, is a new and clean way of energy harvesting. Thermoelectric materials are widely used in thermoelectric power generation, thermoelectric refrigeration and other fields by utilizing the thermoelectric effect. By absorbing the waste heat and waste heat generated by traditional power generation methods, the energy conversion efficiency is improved by using the form of thermoelectric power generation. [0003] Bismuth is a late transition metal with a high carrier. Due to the small effective mass of electrons, low thermal conductivity, long phonon and mean free path of electrons, and high carrier mobility, bismuth and its two-dimensional bismuth conductive thin...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H01L35/18H01L35/34C23C14/16C23C14/18C23C14/30C23C14/58C30B23/02C30B29/02H10N10/853H10N10/01
CPCC23C14/16C23C14/18C23C14/5873C23C14/30C30B23/02C30B29/02H10N10/853H10N10/01
Inventor 陶立赵成栋何平仲雯朱正瑞张斯鑫刘安晗康定轩
Owner SOUTHEAST UNIV