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Alpha-alumina film with gold-based mosaic structure and preparation method and application thereof

A mosaic structure, aluminum oxide technology, applied in metal material coating process, ion implantation plating, laser, etc., can solve the problems of increased transmission loss of waveguide, low efficiency of sputtering gold plating, etching of electrode surface, etc., to achieve waveguide Small reflection loss, low surface roughness, good thermal stability

Pending Publication Date: 2021-11-23
SOUTH CHINA UNIV OF TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0003] Copper has high thermal conductivity and high electrical conductivity, making it a good choice for RF lath CO 2 Traditional electrode materials in lasers, but copper electrodes are used in RF CO 2 It is easy to oxidize and darken in the plasma, resulting in CO in the resonant cavity 2 The content of the copper electrode is reduced, and the etching of the surface of the copper electrode by the radio frequency plasma will also lead to a decrease in its performance, resulting in a significant increase in waveguide transmission loss and a decrease in output power
Gold plating on the surface of the copper electrode can make the CO in the resonant cavity 2 The content remains stable, but there is still the problem of electrode surface etching, and sputtering gold plating has problems such as low efficiency and high cost
Pasting gold foil on the surface of copper electrodes can effectively reduce costs, but it also cannot solve the problem of surface etching

Method used

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  • Alpha-alumina film with gold-based mosaic structure and preparation method and application thereof
  • Alpha-alumina film with gold-based mosaic structure and preparation method and application thereof
  • Alpha-alumina film with gold-based mosaic structure and preparation method and application thereof

Examples

Experimental program
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Effect test

Embodiment 1

[0027] A kind of copper electrode, its preparation method comprises the following steps:

[0028] 1) Polish one side of the oxygen-free copper substrate with a size of 20mm×20mm×4mm, and then evenly apply a layer of HR-8812 copper oxide high-temperature glue (manufacturer: Dongguan Huirui Rubber Industry Co., Ltd.), and then paste the size 20mm×20mm gold foil, flatten and remove air bubbles, bake at 80°C for 120min;

[0029] 2) Nano α-Al with a particle size of 150nm to 180nm 2 o 3 Put the powder into a muffle furnace, burn at 1100°C for 60 minutes, and air cool;

[0030] 3) Put the oxygen-free copper substrate pasted with gold foil into a flat-bottomed beaker with an inner diameter of 42 mm and a volume of 50 mL, with the side pasted with gold foil facing up, and then 267 μg of nano-α-Al 2 o 3 Powder, 1.6mL of propyl ether and 38.4mL of absolute ethanol are pre-mixed evenly and poured into a flat-bottomed beaker, ultrasonically treated for 20 minutes, left to stand for 60...

Embodiment 2

[0040] A kind of copper electrode, its preparation method comprises the following steps:

[0041] 1) Polish one side of the oxygen-free copper substrate with a size of 20mm×20mm×4mm, and then evenly apply a layer of HR-8812 copper oxide high-temperature glue (manufacturer: Dongguan Huirui Rubber Industry Co., Ltd.), and then paste the size 20mm×20mm gold foil, flatten and remove air bubbles, bake at 80°C for 120min;

[0042] 2) Nano α-Al with a particle size of 150nm to 180nm 2 o 3 Put the powder into a muffle furnace, burn at 1100°C for 60 minutes, and air cool;

[0043] 3) Put the oxygen-free copper substrate pasted with gold foil into a flat-bottomed beaker with an inner diameter of 42 mm and a volume of 50 mL, with the side pasted with gold foil facing up, and then 178 μg of nano-α-Al 2 o 3 Powder, 1.6mL of propyl ether and 38.4mL of absolute ethanol are pre-mixed evenly and poured into a flat-bottomed beaker, ultrasonically treated for 20 minutes, left to stand for 60...

Embodiment 3

[0050] A kind of copper electrode, its preparation method comprises the following steps:

[0051] 1) Polish one side of the oxygen-free copper substrate with a size of 20mm×20mm×4mm, and then evenly apply a layer of HR-8812 copper oxide high-temperature glue (manufacturer: Dongguan Huirui Rubber Industry Co., Ltd.), and then paste the size 20mm×20mm gold foil, flatten and remove air bubbles, bake at 80°C for 120min;

[0052] 2) Nano α-Al with a particle size of 150nm to 180nm 2 o 3 Put the powder into a muffle furnace, burn at 1100°C for 60 minutes, and air cool;

[0053] 3) Put the oxygen-free copper substrate pasted with gold foil into a flat-bottomed beaker with an inner diameter of 42 mm and a volume of 50 mL, with the side pasted with gold foil facing up, and then 356 μg of nano-α-Al 2 o 3 Powder, 1.6mL of propyl ether and 38.4mL of absolute ethanol are pre-mixed evenly and poured into a flat-bottomed beaker, ultrasonically treated for 20 minutes, left to stand for 60...

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Abstract

The invention discloses an alpha-alumina film with a gold-based mosaic structure and a preparation method and application thereof. The alpha-alumina film with the gold-based mosaic structure is formed by laminating a gold foil and an alpha-alumina film, and the alpha-alumina film is partially embedded into the gold foil. According to the alpha-alumina film with the gold-based mosaic structure, the bonding strength between the gold foil and the alpha-alumina film is high, the deposition temperature of the alpha-alumina film is low, the surface roughness is low, the waveguide reflection loss of CO2 laser is small, etching of plasma of a radio frequency resonant cavity of a CO2 laser device and laser shock can be borne for a long time, and a copper electrode prepared by pasting the alpha-alumina film on a copper substrate is suitable for the CO2 laser device with high power, long service life, high light beam quality and good thermal stability.

Description

technical field [0001] The invention relates to the technical field of material surface strengthening, in particular to a gold-based mosaic-structured alpha-alumina film, a preparation method and application thereof. Background technique [0002] RF excitation diffusion cooling slab laser (abbreviated as RF slab CO 2 The laser) uses a planar optical waveguide electrode structure, which has the characteristics of large discharge area and high output power, and also adopts the design of the built-in cooling water channel of the electrode, which avoids the gas flow and pollutes the optical components of the resonator, so that the beam quality is good. It is currently all CO above the kilowatt level 2 The main working mode of the laser. RF Slat CO 2 The laser has the functions of radio frequency discharge, diffusion cooling and optical waveguide, and the surface of the electrode material is always subjected to CO 2 Oxidation, etching and laser shock damage of RF glow plasma,...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C23C14/35C23C14/08C23C14/02H01S3/038
CPCC23C14/081C23C14/024C23C14/0036H01S3/0388
Inventor 邱万奇李修贤焦东玲钟喜春刘仲武
Owner SOUTH CHINA UNIV OF TECH