Wafer-level noble metal monatomic layer catalyst as well as preparation and application thereof
A single atomic layer, noble metal technology, applied in the direction of electrodes, electrolysis process, electrolysis components, etc., can solve the problems of low load rate, poor hydrogen production efficiency, etc., and achieve the effect of increased load capacity, excellent catalytic activity, and low cost
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[0038] The preparation method of the wafer-level noble metal monoatomic layer catalyst comprises the following steps:
[0039] (1) On the growth substrate, the noble metal is deposited by thin film deposition technology to form a noble metal layer with a thickness of 0.5-3.0 nm.
[0040] Among them: the growth substrate refers to SiO 2 Any one of / Si, mica sheet, sapphire substrate, the size is 2 inches.
[0041] Thin film deposition techniques refer to electron beam evaporation or sputtering with a deposition rate of 0.1 Å / s.
[0042] (2) Put the chalcogen elemental source (sulfur powder or selenium powder) in the alumina boat, and place the growth substrate of the deposited precious metal in the tubular container along the direction of the airflow. The tubular container refers to the one with a heating device in the center Tube furnace. The carrier gas is introduced, and the carrier gas refers to argon gas with a flow rate of 20-50 sccm or hydrogen gas with a flow rate of...
Embodiment 1
[0046] Example 1 as figure 1 As shown, the preparation of wafer-scale noble metal monoatomic layer catalyst PtSe 1.26 Thin film: Deposit Pt thin film on the substrate first, then use CVD method to selenize, and finally obtain amorphous PtSe by low-temperature plasma etching 1.26 film. The specific process is as follows:
[0047] ⑴Using the electron beam evaporation method, at a rate of 0.1 Å / s on SiO with a size of 2 inches 2 / Si substrate deposited 0.6nmPt film.
[0048] (2) Put the selenium powder into the alumina boat and place it 25 cm upstream from the center of the tube furnace, and the SiO2 that has deposited the Pt film 2 The / Si substrate is placed in the center of the tube furnace, the carrier gas is argon, and the gas flow rate is 40 sccm. Before heating, vacuumize the tube furnace cavity to 50kPa with a mechanical pump. The temperature was raised to 200°C within 20 minutes and kept for 2 hours, then the temperature was raised to 550°C within 50 minutes and the ...
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