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Method for preparing antifriction wear-resistant TiAlN/TiAlCN multilayer composite film

A multi-layer composite and thin film technology, which is applied in coating, metal material coating process, vacuum evaporation plating, etc., can solve the problems of coating controllable performance limitation, low internal stress, low carbon content, etc., to improve the application Performance and promotion, the effect of improving the bonding strength of the film base and reducing the interfacial stress

Pending Publication Date: 2022-07-01
TAIYUAN UNIV OF TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

In the Chinese invention patent "a TiAlN / TiAlCN multilayer film coating on the surface of a substrate and its preparation method" (CN201010594825.2), the TiAlN / TiAlCN nanometer multilayer film is alternately deposited by high-power pulsed magnetron sputtering technology, although the coating The layer has high hardness, low internal stress and high toughness, but the carbon content that can be incorporated into the coating is low (0.1% to 5%), and it does not have obvious nanocrystalline-amorphous multiphase composite structure characteristics. The coating can be Regulatory performance is significantly limited
In the Chinese invention patent "a wear-resistant and friction-reducing carbon-doped TiAlN nano-multilayer hard film and its preparation method" (CN201910764978.8), by depositing a TiAl bottom layer and a TiAlN transition layer on the surface of the substrate, and then depositing TiAlN / TiAlCN nano Multi-layer coating and TiAlCN surface coating layer, it is expected to prepare a multi-layer coating with suitable modulation period and modulation ratio to improve the high temperature resistance, wear resistance and tribological properties of the material surface, but the coating contains the underlying , transition layer, functional layer and coating layer, the structure is complex, the preparation process is cumbersome, it is difficult to accurately obtain the optimized modulation period and modulation ratio
In addition, some researchers used DC and high-power pulsed magnetron sputtering to deposit TiAlN and TiAlCN multilayer coatings on the target (Surface & Coatings Technology, Vol 406, 2021, 126664), although this method can prepare modulation period controllable Multi-layer coating, but target poisoning is prone to occur when preparing TiAlN thin films by DC magnetron sputtering, which affects the control of coating modulation ratio

Method used

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  • Method for preparing antifriction wear-resistant TiAlN/TiAlCN multilayer composite film

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Experimental program
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Effect test

Embodiment 1

[0051] (1) Substrate pretreatment: First, the single crystal silicon substrate and the single-sided polished 304 stainless steel substrate were washed with soapy water and rinsed with deionized water, and then placed in acetone solution and anhydrous ethanol solution for ultrasonic cleaning for 15 min respectively. Surface contaminants were then placed in a 5000-mesh diamond micropowder suspension for ultrasonic cleaning for 0.5 min to improve the bonding strength of the film substrate, and then the substrate was rinsed and dried for use.

[0052] (2) The pretreated substrate was fixed on the rotating sample stage of the multi-excitation source vacuum coating device, the high-purity silicon target and the aluminum target were respectively installed on the targets of RF and DC pulsed magnetron sputtering, and the high-purity titanium and The graphite target was installed on the evaporation cathode of DC magnetic filtration and pulsed cathode arc, and the distances between the su...

Embodiment 2

[0059] (1) Substrate pretreatment: First, the single crystal silicon and single-sided polished 304 stainless steel substrates were washed with soapy water and rinsed with deionized water, and then placed in acetone solution and absolute ethanol solution for ultrasonic cleaning for 15 min respectively to remove the surface. Contaminants, then placed in 8000-mesh diamond powder suspension for ultrasonic cleaning for 2 min to improve the bonding strength of the film substrate, and then the substrate was rinsed and dried for use.

[0060] (2) The pretreated substrate was fixed on the rotating sample stage of the multi-excitation source vacuum coating device, the high-purity silicon target and the aluminum target were respectively installed on the targets of RF and DC pulsed magnetron sputtering, and the high-purity titanium and The graphite target was installed on the evaporation cathode of DC magnetic filtration and pulsed cathodic arc, and the distances between the substrate and ...

Embodiment 3

[0067] (1) Substrate pretreatment: First, the single crystal silicon and single-sided polished 304 stainless steel substrates were washed with soapy water and rinsed with deionized water, and then placed in acetone solution and absolute ethanol solution for ultrasonic cleaning for 15 min respectively to remove the surface. Contaminants, then placed in a 10000 mesh diamond powder suspension for ultrasonic cleaning for 5 min to improve the bonding strength of the film substrate, and then the substrate was rinsed and dried for use.

[0068] (2) The pretreated substrate was fixed on the rotating sample stage of the multi-excitation source vacuum coating device, and the high-purity silicon target and the aluminum target were respectively installed on the targets of RF and DC pulsed magnetron sputtering. The graphite target was installed on the evaporation cathode of DC magnetic filtration and pulsed cathodic arc, and the distances between the substrate and the sputtering target and ...

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Abstract

The invention discloses a method for preparing an antifriction wear-resistant TiAlN / TiAlCN multilayer composite film, which comprises the following steps of: drying a pretreated substrate, and placing the substrate on a rotary sample table of a magnetron sputtering and filtered cathode arc composite multi-excitation source plasma coating device; vacuumizing the vacuum chamber, introducing argon, and carrying out sputtering cleaning on the surface of the substrate by adopting an ion source; the TiAlN / TiAlCN multi-layer composite film is prepared by respectively taking high-purity metal silicon and aluminum as sputtering target materials of radio frequency and direct current pulse magnetron sputtering, taking high-purity titanium and a graphite sheet as evaporation target materials of direct current magnetic filtration and pulse cathode arc, and adjusting the sputtering power of the metal target, the pulse frequency of the graphite target and the pulse number. The TiAlN / TiAlCN multi-layer composite film prepared by the preparation method disclosed by the invention is adjustable in element content, easy to control in modulation period, high in hardness, high in bonding strength, low in friction coefficient and good in wear resistance.

Description

technical field [0001] The invention relates to a method for preparing a friction-reducing and wear-resistant TiAlN / TiAlCN multilayer composite film, and belongs to the technical field of material surface modification. Background technique [0002] TiAlN film has excellent properties such as high hardness, high oxidation resistance, low friction coefficient and good wear resistance, and can be widely used in the protective layer of friction and wear parts such as mechanical parts and tools (molds). However, the TiAlN coating is often cracked due to high internal stress and film-based thermal stress during use, and the film is peeled off during service, which seriously affects its service life and efficiency. The toughness of the coating becomes the main factor affecting its performance. factor. The existence of strong carbon compounds makes the carbon doping of the multilayer composite film easy to form a transitional solid solution at the interface, which improves the inte...

Claims

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Application Information

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IPC IPC(8): C23C14/35C23C14/32C23C14/02C23C14/06C23C14/54
CPCC23C14/0036C23C14/0021C23C14/022C23C14/54C23C14/0641C23C14/0664
Inventor 周兵王一名刘竹波李俊峰马永王永胜于盛旺
Owner TAIYUAN UNIV OF TECH