Low-dielectric constant insulating media monox thin-film and preparing method thereof
A technology of low dielectric constant and insulating medium, which is used in the manufacture of circuits, electrical components, semiconductor/solid-state devices, etc., can solve the problems of unadjustable mechanical strength, decreased mechanical properties of thin films, and difficult to control the pore size of thin films. The effect of stable electrical properties and increased interconnect delay
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Embodiment 1
[0022] Embodiment 1: The low dielectric constant insulating dielectric silicon oxide film prepared by the present invention is made of materials with the following general formula:
[0023] SiO x R y
[0024] Wherein: x=1.1, y=1.8; R is a methyl group; the chemical bonds in the film are Si-O bonds, Si-C bonds and C-H bonds; the film contains nano-micropores with a diameter of 50 nanometers. The volume ratio is 20%; the thickness of the film is 200 nanometers; Si atom content (weight) 37% in the film, C atom content (weight) 33%, hydrogen atom content (weight) 7%, O atom content (weight) 23% .
[0025] The preparation method of above-mentioned film is:
[0026] 1. Add allyl polyethylene glycol ether (molecular weight 900) and trimethoxysilyl hydrogen under the catalysis of chloroplatinic acid to obtain single-terminal silsesquioxane polyethylene glycol ether with molecular weight of 1000 , as a porogenic template.
[0027] 2. Using the above-mentione...
Embodiment 2
[0028] Embodiment 2: The low dielectric constant insulating dielectric silicon oxide film prepared by the present invention is made of materials with the following general formula:
[0029] SiO x R y
[0030] Wherein: x=1.5, y=1; R is an ethyl group; the chemical bonds in the film are Si-O bonds, Si-C bonds and C-H bonds; the film contains nano-micropores with a diameter of 20 nanometers. The volume ratio is 50%; the thickness of the film is 300 nanometers; Si atom content (weight) 35% in the film, C atom content (weight) 30%, hydrogen atom content (weight) 5%, O atom content (weight) 30% .
[0031] The preparation method of the above-mentioned film is as follows: the single-terminal silsesquioxane polypropylene oxide ether with a molecular weight of 650, diethyldiethoxysilane and ethyl orthosilicate are used as raw materials. Wherein the ratio of diethyldiethoxysilane to tetraethylorthosilicate is 1:1, hydrolyzed under weak base catalysis in dimethylf...
Embodiment 3
[0033] The low dielectric constant insulating dielectric silicon oxide film prepared by the present invention is made of materials with the following general formula:
[0034] SiO x R y
[0035] Wherein: x=1.9, y=0.2; R is a phenyl group; the chemical bonds in the film are Si-O bonds, Si-C bonds and C-H bonds; the film contains nano-micropores with a diameter of 80 nanometers, and the micropores and film The volume ratio is 80%; the thickness of the film is 400 nanometers; in the film, the Si atom content (weight) is 38%, the C atom content (weight) is 20%, the hydrogen atom content (weight) is 1%, and the O atom content (weight) is 41%. .
[0036] The preparation method of the above-mentioned film is as follows: the single-terminal silsesquioxane polytetrahydrofuran ether with a molecular weight of 650, diphenyldimethoxysilane and methyl orthosilicate are used as raw materials. Wherein the ratio of diphenyldimethoxysilane to methyl orthosilicate is 1:...
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