Method for reducing oxygen component and carbon component in fluoride

A fluoride and fluoride technology, applied in chemical instruments and methods, fluoride preparation, rare earth metal fluoride, etc., can solve the problems of pollution and the impossibility of pure single crystal formation.

Inactive Publication Date: 2004-04-21
STELLA CHEMIFA CORP
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, since the scavenger is added as a second component, it itself contaminates, making the formation of pure single crystals impossible

Method used

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Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0027] By putting 300g of high-purity calcium fluoride into a 5L-PFA container, simultaneously with concentrations of 5%, 10%, 25% and 50% (fluorine / N 2 ) into a mixed flow of nitrogen and fluorine, and fully mix the powder and gas at room temperature for 5 minutes for purification. The treated product was then analyzed for oxygen and carbon using an oxygen analyzer and a carbon analyzer, respectively (Table 1).

[0028] Oxygen (ppm)

[0029] From the results described above, it can be seen that the reduction of oxygen and carbon can be achieved by secondary treatment, and the effect of the treatment is independent of the fluorine gas concentration (5%, 10%, 25% and 50%). In addition, this effect can be seen even at room temperature, and this finding has great industrial value.

Embodiment 2

[0031] In the same manner as in Example 1, by putting 300g of high-purity calcium fluoride into a 5L-PFA container, simultaneously with 5%, 10%, 25% and 50% concentration (fluorine / N 2 ) into a nitrogen-fluorine mixed gas flow, and fully mix the powder and gas at 100° C. for 5 minutes to carry out purification treatment. Oxygen and carbon analyzes were then performed separately (Table 2).

[0032] Oxygen (ppm)

[0033] From the results described above, it can be seen that the treatment at the concentration of fluorine gas of 5%, 10%, 25% and 50% achieved the reduction of oxygen and carbon. In addition, a reduction effect can be achieved when the processing temperature is increased.

Embodiment 3

[0035] The same experiment as shown in Example 1 was performed by using a rare earth element fluoride such as ytterbium fluoride or cerium fluoride as an optical fiber material or coating material, for example, ytterbium fluoride. By putting 300g of high-purity calcium fluoride into a 5L-PFA container, simultaneously with concentrations of 5%, 10%, 25% and 50% (fluorine / N 2 ) into a mixed flow of nitrogen and fluorine, and fully mix the powder and gas at room temperature for 5 minutes for purification.

[0036] The treated product was then analyzed for oxygen and carbon using an oxygen analyzer and a carbon analyzer, respectively (Table 3).

[0037] Oxygen (ppm)

[0038] As can be seen from the above results, as in Example 1, low oxygen and low carbon calcium fluoride are also obtained here. In addition, similarly, the effect of low oxygen and low carbon was obtained by increasing the treatment temperature of Example 2.

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Abstract

To provide a method for reducing oxygen and carbon components in high-purity fluoride such as calcium fluoride and barium fluoride (high-purity fluoride is not limited to calcium fluoride and barium fluoride), or in rare-earth fluoride such as ytterbium fluoride and cerium fluoride used for an optical fiber, a coating material, and so on. It is characterized in that the oxygen and carbon components contained in the high-purity fluoride are reduced by a fluorine gas treatment.

Description

technical field [0001] The present invention relates to a method for reducing the oxygen and carbon components in fluorides. Background technique [0002] In photolithography for semiconductor manufacturing, fluoride is used on optically useful materials such as raw materials for optical systems, which constitute stepper devices provided as exposure devices such as projection mirrors or illumination lenses, or applied On raw materials such as optical fiber materials or coating materials [0003] For example, for lens materials, ArF excimer laser (193nm), which is a short-wavelength exposure light source, and F2 excimer laser (157nm), which has a shorter wavelength, have been used for high integration. However, high-purity quartz glass, which is usually used to make lenses, cannot be used due to its insufficient transmission in this wavelength range. Fluorides, such as calcium fluoride and barium fluoride, are considered to be useful in the fabrication of such lenses due to...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G02B1/00C01B9/08C30B11/00C30B11/04C30B29/12C30B31/06C30B33/00C30B33/02
CPCC01F11/22C01F17/0062C30B33/02C30B31/06C30B29/12C01P2004/60C01P2006/80C01P2004/61C01F17/265Y10T436/19
Inventor 菊山裕久矢崎洋史里永知彦
Owner STELLA CHEMIFA CORP
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