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Method for bonding two solid plane by surface atom transition free radical aggregation

A technology of atom transfer and free radicals, which is applied in the direction of pattern surface photolithography, precision positioning equipment, microstructure technology, etc., can solve problems such as analysis interference, analysis system pollution, and unsuitability for mass production of chips.

Inactive Publication Date: 2006-02-22
CHANGCHUN INST OF APPLIED CHEMISTRY - CHINESE ACAD OF SCI
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Low-temperature bonding technology can prevent the adhesive from diffusing into the microchannel to change the properties of the channel or block the channel, which meets the needs of various researches and makes the chip function more perfect and comprehensive. The disadvantage is that the use of the adhesive makes the surface properties of the microchannel inconsistent. , and the adhesive may interact with the analyte to interfere with the analysis, pollute the analysis system, or have high requirements for the surrounding environment, so it is not suitable for mass production of chips

Method used

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  • Method for bonding two solid plane by surface atom transition free radical aggregation
  • Method for bonding two solid plane by surface atom transition free radical aggregation
  • Method for bonding two solid plane by surface atom transition free radical aggregation

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0040] Example 1: Glycidyl methacrylate (GMA) is used to carry out atom transfer radical polymerization to assemble a membrane base and an aminated base for bonding.

[0041] The first step: cleaning and hydroxylation of film base

[0042] [American Chemical Society, Langmuir, 1996, 12, 4621-4624; Joong Ho Moon, Ji Won Shin, Formaion of Uniform Aminosilane Thin Layers: An Imine Formaion To Measure Relative Surface Density of the AmineGroup., Langmuir 1996, 12, 4621 -4624】

[0043] The glass, quartz or silicon substrate whose surface layer is pre-oxidized to silicon oxide is first washed with deionized water in an ultrasonic instrument for 5 minutes, then ultrasonically washed in an ethanol (95%) solution at 30°C for 5 minutes, and then washed with dichloro After sonicating with methane for 5 min, wash with NH 3 (25%): H 2 o 2 (30%): H 2 The mixed solution of O=1:1:5 (V / V / V) was ultrasonically washed at 70°C for 30 minutes, washed with a large amount of deionized water unt...

Embodiment 2

[0052] Example 2: Glycidyl acrylate is used to carry out atom transfer radical polymerization to assemble a membrane base and aminated base for bonding.

[0053] The first step: cleaning and hydroxylation of film base and

[0054] Second step: the amination of the hydroxylated film base is the same as in Example 1;

[0055] The third step: assembling an initiator for atom transfer radical polymerization on the surface of the aminated sheet;

[0056] Put the aminated base into a 25cm long thin tube, bake the bottle three times, add 40ml of dichloromethane after cooling, slowly add 1ml of 2-bromo-2-methylpropionyl bromide under the condition of stirring at room temperature and nitrogen protection , then add 1ml of pyridine dropwise, react at room temperature for 10 hours, take out the film base, wash it ultrasonically for 3 times with dichloromethane, then pump it to dryness under reduced pressure, store it under nitrogen, and use it for the next reaction;

[0057] The fourth ...

Embodiment 3

[0061] Example 3: Glycidyl methacrylate (GMA) body was used to carry out atom transfer radical polymerization to assemble the membrane base and the aminated base for bonding.

[0062] The first step: cleaning and hydroxylation of film base and

[0063] Second step: the amination of the hydroxylated film base is the same as in Example 1;

[0064] The third step: assembling an initiator for atom transfer radical polymerization on the surface of the aminated sheet;

[0065] Put the aminated base into a 25cm long thin tube, bake the bottle three times, add 40ml of dichloromethane after cooling, slowly add 1ml of 2-bromo-2-methylpropionyl bromide under the condition of stirring at room temperature and nitrogen protection , then add 1ml of pyridine dropwise, react at room temperature for 8 hours, take out the film base, wash it ultrasonically for 3 times with dichloromethane, then pump it to dryness under reduced pressure, store it under nitrogen, and use it for the next reaction; ...

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Abstract

This invention relates to one method to transfer free group polymer two fixing bodies key through surface atom, which comprises the following steps: a, cleaning the silicon slice, quartz or glass for hydroxide; b, processing amination of hydroxyl group surface. The invention is characterized by the following: a, making atom transferring polymer trigger agent of amination slice surface; b, polymer the glycidyl acrylate to form super film on the group surface; c, making the slice with epoxy radicals film and amination tightly contact to form conjugated linkage under certain pressure and in vacuum.

Description

technical field [0001] The invention belongs to the technical field of bonding of biochips or microelectromechanical devices. Background technique [0002] Facing many challenges in the development of science and technology in the 21st century, analytical instruments and analytical science are also undergoing profound changes. One of the increasingly obvious development trends is the miniaturization, integration and portability of chemical analysis equipment. At present, mainly in order to meet the needs of the development of life sciences, the development of instrumental analysis is undergoing a revolutionary and important turning period characterized by miniaturization. The micro total analysis system (μ-TAS) based on micro-electromechanical systems (MEMS) appeared in the 1990s [Manz A, Graber N, Widmer H M.Sens. Actuators.B.1990, B1: 244] It is expected that in the next 10 years it will also play a major role in the development of analytical science and even the entire s...

Claims

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Application Information

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IPC IPC(8): G01N33/00B81C3/00
Inventor 赵剑英高连勋邱雪鹏卞证
Owner CHANGCHUN INST OF APPLIED CHEMISTRY - CHINESE ACAD OF SCI
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