The present application provides a kind of heterogeneous
linear motor direct-drive static pressure air floatation and flexible hinge
stroke scaling type two-dimensional
macro-micro compound
positioning system, it relates to precision mechatronics field.The
system includes
macro motion platform and
micro motion platform.
Macro motion platform adopts the heterogeneous combination of X-axis U-shaped flat plate
linear motor driven static pressure air floatation guide rail and tube type
linear motor driven precision linear guide rail, realizes large
stroke, high-speed coarse positioning.
Micro motion platform is integrated on the
macro motion platform, adopts piezoelectric
ceramic actuator to drive symmetric two-stage lever flexible hinge mechanism, the mechanism will
actuator input displacement be reduced by ≥7:1 ratio and be converted into nanometer level displacement output, the positioning error of macro motion platform is dynamically compensated.The present application solves the problem that large
stroke, high speed and nanometer level positioning accuracy are difficult to consider through two-stage cooperation of macro motion coarse positioning and
micro motion fine compensation, and the comprehensive performance is excellent, applicable to high-precision field such as
semiconductor manufacturing, ultra-precision
machining.