Method for plating stainless steel protective cover on NdFeB magnet surface with magnetic controlled electrical arc ion
An arc ion plating, stainless steel technology, applied in the direction of ion implantation plating, coating, sputtering plating, etc., to overcome the effects of poor diffraction, good corrosion resistance, and high deposition rate
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Embodiment 1
[0019] The method of magnetically controlled arc ion plating stainless steel protective layer on the surface of NdFeB magnet is realized according to the following steps:
[0020] The first step is to polish the NdFeB magnet and install it in the furnace, and then vacuumize it to about 3×10 -1 Pa, through argon to 30Pa;
[0021] The second step is to turn on the DC power supply, apply a 400-volt negative bias between the NdFeB magnet and the vacuum chamber shell, and purify and activate the surface of the porous magnet through glow ion bombardment to remove the oil film on the surface of the magnet , oxide film, time 5min;
[0022] The third step is to turn on the arc power supply, arc discharge is generated between the arc hook and the chromium-type stainless steel target, the working current of a single target is 40A, and the target particles evaporated by the magnetron arc are deposited on the surface of the magnet to form a uniform coating. Protective layer, time 120min;...
Embodiment 2
[0025] The method of magnetically controlled arc ion plating stainless steel protective layer on the surface of NdFeB magnet, the method steps are the same as above, and the specific parameters are:
[0026] After polishing the NdFeB permanent magnet, install it in the furnace and vacuumize it to about 6×10 -1 Pa, through argon gas to 20Pa; connect the DC power supply, apply a 500-volt negative bias between the NdFeB magnet and the vacuum chamber shell, and purify and activate the surface of the porous magnet by glow ion bombardment, and remove The oil film and oxide film on the surface of the magnet, the time is 5min; then the arc power is turned on, the arc discharge is generated between the arc hook and the nickel-chromium stainless steel target, the single target operating current is 60A, and the target particles evaporated by the magnetron arc are deposited. On the surface of the magnet, a uniformly coated protective layer is formed for 90 minutes; the arc power supply is...
Embodiment 3
[0028] The method of magnetically controlled arc ion plating stainless steel protective layer on the surface of NdFeB magnet, the method steps are the same as above, and the specific parameters are:
[0029] Polish the NdFeB permanent magnet and install it in the furnace, vacuumize it to about 1Pa, pass the argon gas to 30Pa, connect the DC power supply, apply a 600V negative bias voltage between the NdFeB magnet and the vacuum chamber shell, and pass the glow Purify and activate the surface of the porous magnet by photoion bombardment, remove the oil film and oxide film on the surface of the magnet for 4 minutes; The working current is 80A, and the time is 60min; the arc power supply is turned off, the DC power supply is turned off, the temperature is lowered under the protection of argon gas, and the polishing treatment is carried out after being out of the furnace.
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