Radiation-absorbing composite diamond heat-exchanging diaphragm and manufacture method thereof

A technology of composite diamond and heat exchange film, which is applied in the field of radiation absorbing composite diamond heat exchange film and its preparation, can solve the problems of falling off of different growth layers, insufficient thermal conductivity, unstable glow, etc. Short, strong thermal shock resistance, stable and unchanged absorption rate

Inactive Publication Date: 2008-08-27
CHANGCHUN INST OF OPTICS FINE MECHANICS & PHYSICS CHINESE ACAD OF SCI
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Therefore, the heat sink material on the absolute bolometer is preferably a high-purity diamond diaphragm, and the material used for light radiation absorption is a black diamond film containing high graphite phase carbon, but currently due to the chemical vapor deposition method used to grow The diamond film usually has only one property, that is, it can only be a high-purity diamond film or a black diamond film containing graphite phase carbon. The high-purity diamond film has high thermal conductivity but does not absorb radiation,

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  • Radiation-absorbing composite diamond heat-exchanging diaphragm and manufacture method thereof

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Experimental program
Comparison scheme
Effect test

Embodiment 1

[0022] The preparation method of the radiation absorbing composite diamond heat exchange diaphragm is as follows:

[0023] a. One-time chemical vapor deposition diamond heat sink.

[0024] The MW-PCVD microwave plasma chemical vapor deposition system is used to prepare the diamond heat sink. 2 And CH 4 It is used as a raw material medium and a metal molybdenum sheet as a substrate. It belongs to a non-polar discharge method, and can obtain high-quality, high-purity transparent diamond film under lower pressure. The substrate processing method is to grind with diamond paste for 15 minutes, and then ultrasonically treat with acetone and alcohol for 10 minutes. Both hydrogen and methane are controlled by mass flow meters, H 2 Flow rate is 200sccm, CH 4 The flow rate is 3sccm, the microwave power is 4.2KW, the deposition pressure is 11KPa, the substrate temperature is 850°C, and the growth rate is about 3μm / h. The thermal conductivity of the prepared diamond diaphragm is 15W / K·cm, and...

Embodiment 2

[0031] Prepare the radiation-absorbing composite diamond heat exchange membrane according to the same method as in Example 1, the difference is only:

[0032] (1) The deposition process conditions of a chemical vapor deposition diamond heat sink are: H 2 Flow rate is 200sccm, CH 4 The flow rate is 1sccm, the microwave power is 3.8KW, the deposition pressure is 17KPa, the substrate temperature is 950°C, and the growth rate is about 1μm / h. The thermal conductivity of the obtained diamond film is 18W / K·cm and the resistivity is 10 15 Ω·cm.

[0033] (2) The deposition process conditions of the secondary chemical vapor deposition of black diamond film are: the flow rates of hydrogen and methane are: H 2 = 160sccm, CH 4 =15sccm,; the temperature in the deposition chamber is 750°C; the air pressure in the deposition chamber is 135 Torr; the bias voltage is 750V, the current is 8.8A; the deposition time is 3 hours. The obtained black diamond film has a thermal conductivity of 8W / K·cm and ...

Embodiment 3

[0035] Prepare the radiation-absorbing composite diamond heat exchange membrane according to the same method as in Example 1, the difference is only:

[0036] (1) The deposition process conditions of a chemical vapor deposition diamond heat sink are: H 2 Flow rate is 200sccm, CH 4 The flow rate is 2sccm, the microwave power is 4KW, the deposition pressure is 13KPa, the substrate temperature is 750°C, and the growth rate is about 2μm / h. The prepared diamond sheet has a thermal conductivity of 17W / K·cm and a resistivity of 10 14 Ω·cm.

[0037] (2) The deposition process conditions of the secondary chemical vapor deposition of black diamond film are: the flow rates of hydrogen and methane are: H 2 = 160sccm, CH 4 =10sccm,; the temperature in the deposition chamber is 850°C; the air pressure in the deposition chamber is 125 Torr; and the deposition time is 2 hours. The obtained black diamond film has a thermal conductivity of 7W / K·cm and a resistivity of 10 11 Ω·cm, the roughness is 1...

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Abstract

The invention relates to a radiation absorption composite diamond heat exchange membrane and a preparing method for radiation measuring equipment. The composite diamond heat exchange membrane is combined by a black diamond membrane layer containing graphite phase and a pure diamond chip layer, wherein the pure diamond chip layer serves as heat sink material, and the black diamond membrane layer containing the graphite phase serves as optical radiation absorption material. The preparing method is as follows: preparing the heat sink diamond chip through a primary chemical vapor deposition, and then preparing the black diamond membrane layer containing the graphite phase on the diamond chip through a secondary chemical vapor deposition. The composite diamond heat exchange membrane has the advantages of high thermal-shock resistance, and stable and invariable absorption capacity of the radiation absorption material layer. The composite diamond heat exchange membrane improves the measuring accuracy and sensitivity of a radiometer with a higher radiation absorption capacity of 99- 99.2 percent.

Description

Technical field [0001] The invention relates to a radiation-absorbing composite diamond heat exchange membrane suitable for measuring radiation equipment and a preparation method thereof. Background technique [0002] In order to study the Earth's radiation budget and energy cycle and its impact on the global environment and climate change, accurate measurement and long-term monitoring of solar irradiance are required. The instrument used to observe the solar irradiance on the satellite is an absolute bolometer. Its measuring principle is to use photoelectric equivalence, that is, a pyroelectric detector that uses electric power to calibrate the optical power to illuminate the absolute bolometer. The thermal effect of the unknown radiation illuminance on the above is compared with the thermal effect of the known electric power (measure the heating current intensity and voltage), so that the heating electric power is equivalent to the received radiation power, and the radiation sc...

Claims

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Application Information

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IPC IPC(8): G01J5/02G01J5/12
Inventor 梁中翥梁静秋王维彪方伟
Owner CHANGCHUN INST OF OPTICS FINE MECHANICS & PHYSICS CHINESE ACAD OF SCI
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