Self-supporting through-hole alumina film preparation method

Abstract

The invention relates to a method for preparing a self-supporting through-hole alumina film by cathode electrolysis process in the neutral aqueous solution, which belongs to the physical material field. An electropolished metallic aluminum sheet is oxidated by an anodic oxidation method to form an alumina film on the surface thereof, a barrier layer separates the porous alumina film from a metallic aluminum substrate, the thickness thereof meets the linear relation of 1.4nm / V to the constant-pressure corrosion condition; the barrier layer is thinned by adopting a current reversion method, as the thickness of the barrier layer is proportional to the anode oxidation voltage, reducing the oxidation voltage gradually can effectively lower the thickness of the barrier layer, the alumina film can be peeled off by lower cathode electrolysis voltage; at last a cathode electrolysis method is adopted to electrolyze the peeled film and through holes in neutral potassium chloride aqueous solution, the self-supporting through-hole alumina film can be fully peeled off from the aluminum substrate to obtain a product. The method has the advantages of simple operation, low energy consumption, no environment pollution and so on. The product has broad prospects in the aspects of nanometer material synthesis and nanometer device application.

Description

Technical field: [0001] The invention relates to a process method for preparing an aluminum oxide film in the field of physical materials, in particular to a method for preparing a self-supporting through-hole aluminum oxide film by adopting a cathodic electrolysis process in a neutral aqueous solution. Background technique: [0002] Anodic aluminum oxide membrane (Anodic Alumina Membrane, AAM) is a nanostructure with ordered pores that grows self-organized during the anodic oxidation process. It has high aspect ratio, high order, adjustable nanopore size, and high temperature resistance. , Good insulation and other characteristics are favored by people. The use of template assembly technology to obtain nano-ordered arrays is of great significance for the development of large-scale functional devices, such as field emission devices, sensors, storage devices, and optoelectronic devices. Commonly used template synthesis methods based on porous alumina films, such as electroch...

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Problems solved by technology

Since this technique often uses HgCl 2 , CuCl 2 or SnCl 4 If the sample is immersed in the corrosive solution for a long time, metal impurity ions will be introduced into the aluminum oxide film, which will easily pollute the environment and even cause personal injury; the strong pulse electrochemical stripping method is often used in HClO 4 Although the peeling time is short, a higher voltage (generally 5-10V higher than the film forming voltage) is required to use the gas pressure generated by the reduction reaction to peel the aluminum oxide film from the aluminum substrate; reverse electric peeling Although the method is easy to operate, the peeling time is long (more than 12 hours), and the aluminum oxide film after peeling still retains the barrier layer, no through-hole structure is formed, and chemical etching is still required to remove the barrier layer; using argon ion bombardment technology, Sputtering along the tangential direction of the bottom of the closed hole can remove the barrier layer, but this method still needs to be pre-treated with HgCl 2 Erosion of aluminum substrate by saturated solution

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