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Diamond-like film preparation method

A diamond film and graphite technology, applied in metal material coating process, ion implantation plating, gaseous chemical plating, etc., to achieve the effect of improving ionization rate, increasing carbon ion density, and enhancing diffraction performance

Active Publication Date: 2008-12-10
庄严
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0004] The technical problem to be solved in the present invention is to overcome the respective defects of the existing physical vapor deposition method and chemical vapor deposition method, and provide a method that can increase the deposition rate of DLC films, increase the adhesion of the film, reduce the internal stress of the film, and improve the surface roughness. Diamond-like film preparation method

Method used

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Examples

Experimental program
Comparison scheme
Effect test

example 1

[0014] Example 1: After the metal workpiece is cleaned and dried by conventional ultrasonic, it is placed on the rotating support in the coating room in time, and then the vacuum degree in the coating room is pumped to 3×10 -3 Pa, then pass argon into the coating chamber, the pressure is 5×10 -1 Pa, start the rotating stent, and start the ion cleaning source, the voltage is 2000V, the glow discharge is generated, the current is 60mA, and a large amount of Ar is generated + The surface of the workpiece is bombarded, and after ion cleaning for 15 minutes, the pulse arc discharge with graphite as the cathode electrode is turned on, the voltage is 250V, the pulse frequency is 10Hz, methane gas is introduced into the coating chamber, the flow is 6sccm, and the carbon ions formed by pulse discharge The high-energy neutral atoms of carbon collide with methane gas molecules to generate new carbon ions flying to the surface of the workpiece to form a diamond-like carbon film.

example 2

[0015] Example 2: After the ceramic workpiece is cleaned and dried by conventional ultrasonic, it is placed on the rotating support in the coating room in time, and then the verticality of the coating room is pumped to 5×10 -1 Pa, and then argon gas is introduced into the chamber, the pressure is 7×10 -1 Pa, start the rotating bracket, and start the ion cleaning source, the voltage is 2500V, the glow discharge is generated, the current is 90mA, and a large amount of Ar is generated + The surface of the workpiece is bombarded, ion cleaning is carried out for 30 min, and the pulse arc discharge with graphite as the cathode electrode is turned on, the voltage is 400V, the pulse frequency is 35Hz, and the ethane gas is introduced into the coating chamber with a flow rate of 10sccm, and then forms on the surface of the workpiece. Diamond-like carbon film.

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PUM

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Abstract

The invention discloses a method for preparing diamond-like carbon film (DLC), belonging to the metal or non-metal surface modification treatment technical field. The method adopts pulsed arc discharge by using graphite as a cathode electrode and a physically and chemically combined vapor deposition method for the decomposition and ionization of hydrocarbons gas to produce DLC deposition on a surface of a workpiece. The invention comprises the main operation steps of ultrasonic cleaning, vacuumizing, ion cleaning and DLC deposition, wherein argon gas is passed through in the ion cleaning step; a pulse frequency of the arc discharge in the DLC deposition step is 5 and 35Hz with voltage of between 200 and 400V; methane, ethane or propane are preferred as the hydrocarbons gas. A high-speed and high-energy carbon plasma ion beam is formed to generate collide decomposition and ionization to the passed through hydrocarbons gas through specific pulsed arc discharge to increase increasing density of the carbon ion and diffraction performance, thereby improving deposition speed and adhesive force of DLC, reducing internal stress, and improving precision and performance of DLC.

Description

Technical field [0001] The invention relates to a vacuum coating method applied to metal or non-metal surface modification treatment, in particular to a method for preparing diamond-like carbon film formed on the surface of a workpiece. Background technique [0002] Diamond like carbon-DLC is an amorphous carbon film, when the diamond phase (carbon bonding form is SP 3 ) Than the graphite phase (the bonding form of carbon is SP 2 When there are more ), the film layer exhibits diamond-like characteristics, with a hardness of 75GPa and a wear resistance rate of 1.3×10 -7 cm 3 / Nm, so it is called diamond-like carbon film. The preparation of DLC film mainly includes physical vapor deposition (PVD) and chemical vapor deposition (CVD) methods, which respectively use evaporating and ionizing graphite targets and decomposing and ionizing hydrocarbon gases to obtain carbon ions with considerable energy to hit the surface of the substrate. Diamond structure film. Since Asisenberg and Chab...

Claims

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Application Information

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IPC IPC(8): C23C28/00C23C14/06C23C16/26
Inventor 庄严
Owner 庄严
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