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Microfine piezoelectric ceramics array structure composite material and preparation thereof

A technology of piezoelectric ceramics and array structure, which is applied in the field of functional ceramic materials and its preparation, can solve problems such as corrosion, and achieve the effects of low annealing temperature, short annealing time, and low requirements

Active Publication Date: 2009-06-24
TSINGHUA UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0006] However, the exposure process only copies the planar pattern on the photoresist. In order to obtain the actual pattern structure, a certain film or silicon itself must be etched under the mask of the photoresist.

Method used

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  • Microfine piezoelectric ceramics array structure composite material and preparation thereof
  • Microfine piezoelectric ceramics array structure composite material and preparation thereof
  • Microfine piezoelectric ceramics array structure composite material and preparation thereof

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0035] React K and Na respectively with absolute ethanol to obtain ethanol salt solution, mix and dissolve appropriate amount of potassium ethoxide and sodium ethoxide solution in the ethylene glycol monomethyl ether solvent according to the metal ion ratio of 1:1, add 2mL glacial acetic acid and 2mL Acetylacetone was used as a stabilizer and a chelating agent respectively, and then refluxed and chelated for 4 hours at 120°C in a sol reflux machine, and then pressed K 0.5 Na 0.5 NbO 3 Add niobium ethanol according to the stoichiometric ratio, add 2-3mL ethylene glycol monomethyl ether, glacial acetic acid, acetylacetone, add 1mL formamide, continue to reflux at 120°C for 45min, and finally distill under reduced pressure to reduce the liquid volume to 10mL to obtain 0.3M KNN sol, after cooling, pour it into a weighing bottle and seal it for storage.

[0036] A silicon wafer with a photoresist mask is obtained by photolithography, and the silicon wafer is etched by a deep sili...

Embodiment 2

[0038] As in Example 1, the metal alkoxide reflux method was used to obtain 0.4M KNN sol, which was filled into a silicon template with a pore length, a pore width of 20 μm, a pore depth of 30 μm, and a pore spacing of 42 μm under reduced pressure. After the solution treatment, the annealing treatment was carried out at 830° C., and finally the silicon around the microcolumn was removed by RIE method to obtain the KNN microcolumn array. Use the scanning probe system (SPI4000) to test its displacement-voltage curve, which proves the piezoelectricity of the KNN microcolumn, d 33 24pC / N as Figure 5 . The epoxy resin is filled into the microcolumn gap of the array to obtain the piezoelectric ceramic array structure composite material, and its surface morphology is as follows: Figure 6 shown.

Embodiment 3

[0040] As in Example 1, the same KNN sol and a silicon template with a pore length, a pore width of 10 μm, a pore depth of 30 μm, and a pore spacing of 30 μm were used. Under the condition of mechanical pump vacuuming, use the sol to repeatedly fill the silicon template and pyrolyze it at 400°C for three times. After annealing at 830°C, the silicon around the KNN microcolumn is etched to remove the column length, width 7 μm, height 20 μm, A KNN microcolumn array with a row spacing of 30 μm, such as Figure 7 .

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Abstract

The invention discloses a hyperfine piezoelectric ceramic array structure composite material and a preparation method, belonging to the field of functional ceramics material and the preparation technology thereof. The preparation technique comprises: a metal alkoxide reflux method is adopted to prepare sol precursor, silicon micromachining technology is used for preparing a silicon template; then, piezoelectric ceramic microcolumn array which has the length and the width being 5-100 microns, the hole height being 1-500 microns and the spacing being 10-200 microns is prepared by sol padding template technique and the subsequent pyrogenation and annealing processing process; finally, the microcolumn array is compounded with polymer to obtain 1-3 type piezoelectric ceramic / polymer composite material. Compared with the traditional mechanical cutting technique, the invention can prepare the ceramic microcolumn with smaller size and better array period, and the minimum column width can reach 7mum, thereby being suitable for a micro electrical / mechanic system (MEMS); compared with the array preparation techniques such as heat pressing, laser cutting and the like, the invention has simple equipment condition and is easy to realize.

Description

technical field [0001] The invention discloses a functional ceramic material and its preparation technical field, a piezoelectric ceramic microcolumn array structure composite material and a preparation method thereof. Background technique [0002] Piezoelectric ceramic material is a kind of ceramic material with piezoelectric effect, such as barium titanate (BaTiO 3 ) ceramics, lead titanate (PbTiO 3 ) Ceramics, etc., have been widely used in recent years. For example, speakers, microphones, pickups, etc. used in electroacoustic devices; underwater acoustic transducers used in underwater communication and detection; ceramic surface wave devices used in radar; Piezoelectric accelerometers and piezoelectric gyroscopes, etc.; ceramic filters used in communication equipment, etc.; ceramic pressure gauges used in precision measurement, etc.; ceramic infrared pyroelectric detectors used in infrared technology; Cleaning, etc.; ceramic transformers for high voltage power supplie...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C08L63/00C04B35/495C04B35/622C08J5/00
Inventor 李敬锋徐莹
Owner TSINGHUA UNIV
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