Flexible integrated ultrasonic transducer and preparation method thereof

An ultrasonic transducer and flexible technology, applied in the directions of sound-producing equipment, semiconductor/solid-state device manufacturing, instruments, etc., can solve the problems of low gain and low signal-to-noise ratio, and achieve the effect of improving sensitivity, reducing manufacturing cost and expanding the scope of application
CN101894855AInactive Publication Date: 2010-11-24SOUTH CHINA UNIV OF TECH
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Patent Information

Authority / Receiving Office
CN · China
Current Assignee / Owner
SOUTH CHINA UNIV OF TECH
Publication Date
2010-11-24
Estimated Expiration
Not applicable · inactive patent

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Abstract

The invention discloses a flexible integrated ultrasonic transducer, which is integrated by an organic thin-film transistor and a piezoelectric sensor. The flexible integrated ultrasonic transducer consists of a substrate, a moisture-proof isolation layer, a source drain electrode, a semiconductor thin-film layer, a gate dielectric layer, a gate electrode layer, an electrical signal coupling layer, a piezoelectric film layer, an electrode layer and an ultrasonic coupling layer in turn. In order to conveniently prepare a two-dimensional flexible ultrasonic transducer array, a layer of silicon dioxide thin film is deposited on a PET substrate and is used for isolating moisture. The piezoelectric material serving a PVDF thin film of an ultrasonic transducer has the advantages of good piezoelectric performance, low acoustic impedance, and good acoustic impedance matching with water and organisms. Therefore, the sensitivity is improved and the frequency band is widened. High flexibility ofthe PVDF thin film provides good technical basis for integrating the piezoelectric sensor. By adopting the organic thin-film transistor as a built-in signal amplifier, the gain and signal-to-noise ratio are increased, and the anti-jamming capability is improved.
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Description

technical field

[0001] The invention relates to the technical field of non-destructive testing. Specifically, it is a flexible integrated ultrasonic transducer and a preparation method thereof. Background technique

[0002] The ultrasonic transducer is a component that realizes the mutual conversion of sound energy and electrical energy. It can not only convert ultrasonic waves into electrical signals, but also convert electrical signals into ultrasonic waves. Ultrasonic transducers are key components in ultrasonic technology and are widely used in medical diagnosis, underwater communication and detection, non-destructive testing of defects, ranging and positioning, remote sensing and remote control and other fields.

[0003] Piezoelectric ultrasonic transducers are the mainstream of ultrasonic transducers, especially piezoelectric thin-film ultrasonic transducers are obtained because of their miniaturization, good impulse response, and the ability to effectively improve th...

Claims

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