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Nano-silicon dioxide and nano-silicon nitride composite material and preparation method thereof

A kind of technology of nano silicon dioxide and nano silicon nitride

Active Publication Date: 2015-06-03
SHENZHEN INST OF ADVANCED TECH CHINESE ACAD OF SCI
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0004] Although nano-silicon nitride and nano-silicon dioxide have their own advantages, their limitation is that they cannot meet the high-performance requirements of modern electronic packaging.

Method used

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  • Nano-silicon dioxide and nano-silicon nitride composite material and preparation method thereof
  • Nano-silicon dioxide and nano-silicon nitride composite material and preparation method thereof
  • Nano-silicon dioxide and nano-silicon nitride composite material and preparation method thereof

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preparation example Construction

[0029] see figure 1 , the preparation method of the nano-silica-nano-silicon nitride composite material of an embodiment, comprises the steps:

[0030] Step S110: adding the dispersant and nano-silicon nitride into the solvent under stirring condition to obtain a mixture, and adding an acid solution dropwise to the mixture to obtain a nano-silicon nitride dispersion.

[0031] The dispersant is used to uniformly disperse the nano-silicon nitride to obtain a stable nano-silicon nitride dispersion.

[0032] The dispersant is preferably at least one selected from silane coupling agent KH-560 and silane coupling agent KH-550.

[0033] Nano-silicon nitride is preferably nano-silicon nitride with a particle size of 15 nm to 80 nm.

[0034] The solvent is at least one selected from ethanol, acetone and butanone.

[0035] In order to improve the dispersion effect of nano-silicon nitride, the process of preparing nano-silicon nitride dispersion liquid is to add dispersant and nano-si...

Embodiment 1

[0057] Preparation of Nano-SiO2-Nano-Silicon Nitride Composite Material

[0058] (1) Under the action of stirring and ultrasonic waves, weigh 0.1g of silane coupling agent KH550, 5g of nano-silicon nitride and add it into 10mL of acetone to prepare a mixture, and then slowly add dropwise an oxalic acid solution with a pH of 4 to it to obtain Nano-silicon nitride dispersion with better dispersibility;

[0059] (2) Place the nano-silicon nitride dispersion at 1000rpm and stir for 10 minutes, then add ammonia water dropwise to adjust the pH of the nano-silicon nitride dispersion to 9, and then slowly add the dissolved amount of ethyl orthosilicate that has been ultrasonically mixed uniformly 15 g of a solution containing ethyl orthosilicate was reacted at room temperature for 64 hours to obtain a white suspension, which was filtered to obtain a precipitate;

[0060] (3) The above precipitate was ultrasonically washed with acetone, and then centrifuged. The washing and centrifuga...

Embodiment 2

[0064] Preparation of Nano-SiO2-Nano-Silicon Nitride Composite Material

[0065] (1) Under the action of stirring and ultrasonic waves, weigh 0.2g of silane coupling agent KH550 and 10g of nano-silicon nitride into 20mL of ethanol to prepare a mixture, and then slowly dropwise add an oxalic acid solution with a pH of 5 to it to obtain Nano-silicon nitride dispersion with better dispersibility;

[0066] (2) Place the nano-silicon nitride dispersion at 1300rpm and stir for 15 minutes, then add ammonia water dropwise to adjust the pH of the nano-silicon nitride dispersion to 10, and then slowly add the dissolved amount of ethyl orthosilicate that has been ultrasonically mixed uniformly 30 g of a solution containing ethyl orthosilicate, reacted at room temperature for 50 h to obtain a white suspension, and filtered the suspension to obtain a precipitate;

[0067] (3) Ultrasonic wash the above precipitate with ethanol, then centrifuge, wash and centrifuge for 5 times to obtain a p...

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Abstract

The invention provides a nano-silicon dioxide and nano-silicon nitride composite material. The nano-silicon dioxide and nano-silicon nitride composite material comprises a plurality of microparticles formed by coating nano-silicon dioxide on the surface of nano-silicon nitride, wherein the mass ratio of the nano-silicon dioxide to the nano-silicon nitride is (1:10)-(10:1). The nano-silicon nitride and the nano-silicon dioxide are compounded according to the mass ratio of (1:10)-(10:1), so that the composite material is favorable in stability and lower in dielectric constant and can be widely applied to the fields of package of super-large-scale integrated circuits and electronics and the like. The invention further provides a manufacturing method of the nano-silicon dioxide and nano-silicon nitride composite material.

Description

technical field [0001] The invention relates to the technical field of preparation of nanometer materials, in particular to a nanometer silicon dioxide-coated nanometer silicon nitride composite material and a preparation method thereof. Background technique [0002] Nano-silicon nitride is an important structural material. It is a superhard substance with lubricity and wear resistance; it does not react with other inorganic acids except hydrofluoric acid, and has strong corrosion resistance. anti-oxidation. Moreover, it can also resist cold and heat shocks, and it will not shatter when heated to above 1000°C in the air, cooled rapidly and heated again sharply. In terms of physical properties, silicon nitride materials have high hardness, wear resistance, large elastic modulus, high strength, high temperature resistance, small thermal expansion coefficient, large thermal conductivity, good thermal shock resistance, low density, and small surface friction coefficient. , Goo...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): H01L23/29
Inventor 张国平秦静孙蓉郭慧子
Owner SHENZHEN INST OF ADVANCED TECH CHINESE ACAD OF SCI
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