A kind of oled device containing oxide thin film transistor
An oxide film and transistor technology, applied in the field of OLED devices, can solve problems such as low carrier mobility, and achieve the effects of high carrier mobility, good constant current characteristics, and improved aperture ratio.
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Embodiment 1-1
[0054] The preparation method of zinc tin oxide thin film described in the present embodiment, comprises the steps:
[0055] (1) Preparation of precursor solution
[0056] Dissolve the precursor material containing zinc ions-zinc acetate, the precursor material containing tin ions-2-ethyl stannous hexanoate and the cosolvent-diethanolamine in ethylene glycol monomethyl ether, fully dissolve to obtain the precursor Solution, stand for subsequent use, the mol ratio that zinc acetate and 2-ethylhexanoate and ethanolamine add is 1:1:3, wherein the total molar concentration of zinc acetate and 2-ethylhexanoate is 0.3 mol / L;
[0057] (2) Preparation of zinc tin oxide film
[0058] In a dust-free atmosphere, the precursor solution prepared in step (1) is coated into a thin film on the surface to be coated. The surface to be coated according to the present invention is a semiconductor layer. After the spin coating is completed, place it under heating Dry on the table, and start to ...
Embodiment 1-2
[0062] The preparation method of the zinc-tin oxide thin film described in this example is the same as that of Example 1-1, the only difference being that in the heat treatment step, the temperature is raised to 350°C at a heating rate of 30°C / min and then subjected to constant temperature treatment for at least After 20 minutes, it was naturally cooled to room temperature to obtain a zinc-tin oxide film.
Embodiment 1-3
[0064] The preparation method of the zinc-tin oxide thin film described in this example is the same as that of Example 1-1, the only difference being that in the heat treatment step, the temperature is raised to 550°C at a heating rate of 30°C / min and then subjected to constant temperature treatment for at least After 20 minutes, it was naturally cooled to room temperature to obtain a zinc-tin oxide film.
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Abstract
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