Method for preparing porous silicon-based one-dimensional nanowire gas sensitive element

A tungsten oxide nanowire and porous silicon-based technology, applied in the field of gas sensor, can solve the problem of high working temperature, achieve high response value, mature manufacturing process, and low price
CN103245696AInactive Publication Date: 2013-08-14TIANJIN UNIV
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Patent Information

Authority / Receiving Office
CN · China
Current Assignee / Owner
TIANJIN UNIV
Publication Date
2013-08-14
Estimated Expiration
Not applicable · inactive patent

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Abstract

The invention discloses a method for a preparing porous silicon-based one-dimensional nanowire gas sensitive element, wherein a silicon-based porous silicon composite one-dimensional tungsten oxide nano-structure which has the bore diameter in the range from 1 to 2 microns and also has highly orderly arranged ducts is taken as a gas sensitive element for the first time; due to huge specific surface area and high surface activity, lots of gas absorption positions and gas dispersion channels can be provided so that the gas sensitive element is easy to react with gas. The gas sensitive sensor element provided by the invention has high response value and good sensitivity and selectivity for low-concentration oxynitride gas at a low temperature (100 DEG C), and further is small in size, simple in structure, mature in fabrication process, convenient to use and low in price; as a result, the gas sensitive sensor element is expected to be popularized and applied to the field of the gas sensitive sensor.
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Description

technical field

[0001] The invention relates to a gas sensor, in particular to a method for preparing a micron-sized porous silicon-based one-dimensional tungsten oxide nanostructure gas sensor that can work at a lower temperature and is suitable for detecting nitrogen oxide gas. Background technique

[0002] With the rapid development of industrial technology and the continuous improvement of people's living standards, various gas pollutants brought about in the process of production and life have increased significantly. Nitrogen oxides (NO x ) as a highly toxic gas is the main source of acid rain and photochemical smog, which has posed a serious threat to human health and safety. Therefore, the detection of nitrogen oxide gas has become a research hotspot in recent years. In recent years, with the continuous development of nanotechnology, nanostructured gas sensor devices have achieved considerable development. Especially in order to meet the urgent needs of industrial ...

Claims

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