166 results about "Gas dispersion" patented technology

A thin-film formation apparatus possesses a reaction chamber to be evacuated, a placing portion on which a substrate is placed inside the reaction chamber, a gas-dispersion guide installed over the placing portion for supplying a gas onto a substrate surface, a gas-supply port for introducing the gas into the gas-dispersion guide, a gas-dispersion plate disposed on the side of the substrate of the gas-dispersion guide and having multiple gas-discharge pores, a first exhaust port for exhausting, downstream of the gas-dispersion plate, the gas supplied onto the substrate surface from the gas-dispersion plate, and a second exhaust port for exhausting, upstream of the gas-dispersion plate, a gas inside the gas-dispersion guide via a space between the gas-dispersion guide and the gas-dispersion plate.

An atomic layer deposition (ALD) apparatus is, suitable for thermal ALD and plasma-enhanced ALD of conductive and non-conductive films. The ALD apparatus can maintain electrical insulation of a gas dispersion structure, such as a showerhead assembly, which acts as an RF electrode to generate plasma inside a reaction chamber while depositing electrically conductive films in the reaction chamber. Fine tubules of micro-feeding tube assembly prevents plasma generation in them and reactive gases each have separate flow paths through the micro-feeding tube assembly. Process gases out of the micro-feeding tube assembly enter narrow grooves of a helical flow inducing plate and form helical flows which mix well each other. Symmetrically mounted pads on showerhead assembly and flow guiding plate maintain a symmetrical gap through which an inert gas flows continuously to keep reactive gases outside the gap and unwanted film deposition in the gap. Longer operating time before maintenance (cleaning) and thus higher productivity can be achieved.

It is an object of the present invention to provide a plasma CVD device in which it is possible to inhibit the formation of particles resulting from the adhesion of reaction by-products of poor adhesive strength around the upper electrode. The plasma CVD device has a vacuum container 200, an upper electrode 210 and a lower electrode 220. The edge of the gas dispersion plate 213 of the upper electrode 210 is formed in the shape of an upturned bowl, the edge of which extends below the upper surface of the treatment substrate W mounted on the substrate-mounting surface 221 of the lower electrode 220.

Provided are apparatuses and methods for vaporizing a liquid chemical to form a vapor phase product. One exemplary apparatus includes: a vaporization chamber, which includes a first annular wall having a plurality of openings and enclosing a vaporization space and a second annular wall disposed within the first annular wall, the first and second annular walls forming an annular space therebetween; a first conduit connected to the vaporization chamber for introducing thereto a liquid chemical to be vaporized; a second conduit connected to the vaporization chamber for introducing a carrier gas to the annular space, wherein the carrier gas flows from the annular space through the first annular wall to the vaporization space; and a third conduit connected to the vaporization chamber for supplying the vapor phase product to a point of use. Other exemplary features of the vaporization apparatuses include a gas dispersion jet for forming liquid chemical droplets in the vaporization chamber, a separation chamber for removing particulates in the vaporized chemical, and a solvent cleaning system for cleaning the vaporization apparatus. The apparatuses and methods allow for vaporization without decomposition, liquid re-condensation, chemical channel blockage or impurity contamination, while being easy to control for a desired flow rate, temperature and pressure to provide a precursor vapor excellent in quality. The apparatuses and methods have particular applicability to the semiconductor manufacturing industry for supplying chemicals to semiconductor processing tools, for example, to chemical vapor deposition (CVD) tools.

In an apparatus provided with a plate type heat exchanger as a heater and/or a cooler and operated to treat a gas containing an easily blocking substance, a method for preventing the plate type heat exchanger from being blocked is disclosed which is characterized by i) setting the width of a flow path on a plate of the plate type heat exchanger in the apparatus in a range of 6-25 mm and ii) setting the average flow rate of the gas passing the plate type heat exchanger in the apparatus per unit cross-sectional area of the flow path on the plate in the range of 3-15 m/s. In the exchange of heat of an easily blocking substance by the use of a plate type heat exchanger, a method for preventing the plate type heat exchanger from blockage is disclosed which has the plate type heat exchanger provided in the port for introducing a gas containing an easily blocking substance with a gas dispersion plate. This invention, in the heat exchange of an effluent gas emanating from a process for the production of (meth)acrylic acid or an ester thereof or the disposal of the gas, significantly allays blockage of the interior of the plate type heat exchanger.

The invention discloses an air positive electrode constructed by conductive gel particles and a lithium air battery. The air positive electrode is characterized by being of a full-solid structure and comprising particles with arbitrary shapes, wherein the particles are prepared from conductive gel, gaps are formed among the particles, electrons and ions can be simultaneously conducted by conductive gel, and the size range of the particle sizes of the particles is 10-500 microns; the particles are stacked to form a laminated structure, and the thickness of the laminated structure is 50 microns to 5 millimeters. A battery cell of the lithium air battery is of a multi-layer winding type structure or a multi-layer laminating type structure and is formed by winding and laminating a plurality of repetitive units, and each repetitive unit comprises the air positive electrode. A rapid gas dispersion channel is formed in the air positive electrode and can be prepared to be relatively thick, so that the problem that oxygen is difficult to diffuse is effectively solved, and the air positive electrode can be truly input into actual application.

The invention discloses a method for forecasting and warning an accident consequence of a major hazard installation by combining with real-time meteorological information. The accident of the hazard installation is simulated by combining a high-spatial and temporal resolution atmospheric circulation numerical simulation and forecasting method with a gas dispersion simulation method, simultaneously adding an integrated forecasting method of a danger emission estimation method and a simulated data result post-processing method and combining with the real-time meteorological information and the real-time monitoring information of the hazard installation to obtain the quantitative three-dimensional spatial and temporal distribution result of hazardous gas after the accident occurs and the influence scope and the duration of the accident on an ambient environment; the hazard level and the like on a human body is analyzed and forecasted to obtain the three-dimensional spatial distribution condition of the poisonous and hazardous gas after the accident occurs and the quantitative pollutant concentration number of every target point. The invention provides a method which can be used for forecasting the accident consequence and an automatic evaluation method for hazard level of the accident. The method for forecasting and warning the accident consequence of the major hazard installation by combining with the real-time meteorological information has the characteristics that spatial and temporal spacing, such as the meteorological information, results and the like can be read in real time, the computing speed is high, the real-time performance is strong and the like.

An air bag device that includes an air bag cushion, a diffuser canister, and a gas generation inflator. The diffuser canister is attached to the air bag cushion and has walls configured to define an interior space therein. The walls of the diffuser canister have an interior surface, an exterior surface, and a wall thickness t. At least one of the walls has an aperture formed therethrough in communication with the interior of the air bag cushion. The gas generation inflator is configured to rapidly create a gas that exists the diffuser canister through the aperture so as to fill the air bag cushion. The aperture is defined by an edge extending between the interior and said exterior surfaces of the wall that is configured to diffuse the gas exiting the diffuser canister through the aperture. The edge of the aperture is configured such that the cross-sectional area of the aperture that is proximate to the exterior surface of the wall is larger than the cross-sectional area of the aperture proximate to the interior surface of wall. The edge includes an angled portion configured such that opposing sides of the aperture have an angle alpha therebetween in the range of about 20 degrees to about 145 degrees. The aperture has a diameter d1 proximate to the interior surface of the wall and is configured so that the diameter d1 and wall thickness t have a ratio d1 to t in the range of about 0.5 to about 4.

A gas dispersion nozzle for a gun silencer having a nozzle portion with a front end and a rear end and walls enclosing a hollow interior therein. The rear end of the nozzle portion is attached to the gun silencer and the nozzle portion extends into the interior of the gun silencer. The rear end also attaches to a firearm. The walls have channels which direct flow of propellant gases out of the hollow interior and into the interior of the gun silencer at an angle to a path along which the projectile passes when the firearm is discharged. The channels cause the flow of propellant gases to become turbulent or rotational or both and can cause the flow rate of said propellant gases to decrease. The gas dispersion nozzle reduces the report and/or flash produced by the discharge of a firearm.

Disclosed is a waste water disposal process in the biosolid method according to a line atomizing treatment in which a reactive gas containing oxygen or oxygen and ozone as hardly soluble gases is dissolved/stored in water as being converted into ultrafine bubbles. The characteristic feature is that, by forming a gas-dispersion liquid in which the reactive gas containing oxygen or oxygen and ozone is dispersed in the form of ultrafine bubbles in returned biosolid water or in clean water at outside of the vessels (pools) of the waste water treatment system and by introducing the aforementioned gas-dispersion liquid into a reaction vessel (aerobic or anaerobic), oxygen is supplied to the microorganisms. Alternatively, the aforementioned gas-dispersion liquid is introduced into a vessel in the step preceding the reaction vessel or succeeding the reaction vessel. Further, the kind, concentration and volume of the reactive gas, the vessel (pool) for returning and the duration of introduction are set in accordance with the proceeding conditions of the waste water treatment and unitarily controlled.

Disclosed is a manufacturing method for a fine powder exhibiting improved solubility, little impurity contamination, and a high recovery rate. Material to be ground and a grinding medium are suspended and stirred in a liquefied inert gas dispersion medium such as dried ice, and the material to be ground is made into a sub-micron or nano-sized fine powder. A uniform fine powder can be obtained when the material to be ground is a mixture having two or more components. Impurity contamination can be reduced by using granular dry ice as the grinding medium.

A fuel cell membrane electrode using polymer ultra-short fiber as water repellent and it's the preparation method, in which the catalyst layer is dopped with polymer ultra-short fiber. The preparation method is that: coat the catalyst pulp containing load-type catalyst, solid polymer electrolyte, polymer ultra short fiber and the solvent on to gas diffusion layer surface to get a gas diffusion layer electrode, hot press this electrode and the proton exchange membrane to prepare the membrane electrode; Or transfer solidified catalyst onto two sides of the proton exchange membrane to prepare the catalyst /membrane central assembly. Advantages : raised water discharge function comparing with grain-like polymer water repellent, having good reaction gas dispersion path, raised structure and catalyst size stability and simple preparation process of membrane electrode.

The invention discloses a catalyst for ethyne hydrochlorination for synthesis of chloroethylene and a preparation method thereof. The catalyst of the invention is prepared by impregnation of an active carbon carrier, metallic compound active components and a hydroxyl-containing water-soluble carboxylic acid competitive adsorbent. The active components contain at least one component selected from chloride, nitrate, sulfate or phosphate of cobalt, copper, manganese, zinc, bismuth, barium and potassium. The competitive adsorbent contains citric acid, malic acid, salicylic acid, oxalic acid, tartaric acid and lactic acid. The prepared catalyst has characteristics of high activity, good selectivity, simple production method and low cost. By adding the hydroxyl-containing water-soluble carboxylic acid competitive adsorbent, the active components are greatly fixed to the carrier, and high temperature transfer of the active components is reduced; by roasting decomposition of the competitive adsorbent, rich pore structures are generated, and gas dispersion in the reaction process is improved; and dispersity of the active components is improved, catalyst poisoning is alleviated, and life of the catalyst is prolonged.

The invention discloses a method for a preparing porous silicon-based one-dimensional nanowire gas sensitive element, wherein a silicon-based porous silicon composite one-dimensional tungsten oxide nano-structure which has the bore diameter in the range from 1 to 2 microns and also has highly orderly arranged ducts is taken as a gas sensitive element for the first time; due to huge specific surface area and high surface activity, lots of gas absorption positions and gas dispersion channels can be provided so that the gas sensitive element is easy to react with gas. The gas sensitive sensor element provided by the invention has high response value and good sensitivity and selectivity for low-concentration oxynitride gas at a low temperature (100 DEG C), and further is small in size, simple in structure, mature in fabrication process, convenient to use and low in price; as a result, the gas sensitive sensor element is expected to be popularized and applied to the field of the gas sensitive sensor.

The invention discloses a preparation method for an ozone catalytic oxidation catalyst and a device using the catalyst. The preparation method comprises the processes of adsorbing and precipitating an active component by active carbon and drying, washing and roasting; the active carbon adopts an adsorption-precipitation method on the active component; and saturated ferric chloride and manganous nitrate active components and a solution formed by compounding the saturated ferric chloride and manganous nitrate active components are adsorbed by pore channels inside the active carbon, and a proper amount of alkali is added to form hydroxide sediments. The method overcomes the defect of releasing a great quantity of nitric oxide pollutants into environment in the roasting process by a chloride or nitrate soaking method and prevents the condition that the active component is just deposited on the surface of the active carbon in the traditional one-step precipitating method; and an air chamber of the device using the catalyst separately carries out gas inlet and water discharge, and the invention follows the advantages of a reverse-flow type fixed bed, improves the utilization ratio of catalyst on the basis of ensuring gas-liquid-solid efficient mass transfer, has uniform gas dispersion and realizes the industrialized application of an ozone catalytic oxidation treatment technology.

The invention discloses an ordered membrane electrode. The ordered membrane electrode comprises an ordered array carrier and a catalyst nanoparticle layer which is microscopically attached to the surface of the ordered array carrier, wherein the ordered array carrier vertically grows on the surface of a gas dispersion layer in situ or vertically grows on the surface of a metal layer attached to the surface of an electrolyte membrane in situ; the ordered array carrier is constructed by a conductive high-molecular polymer, or is constructed by a mixture of a conductive high-molecular polymer and an ionic conductor; the ordered array carrier microscopically has a conical structure or a stick-shaped structure. An ordered electrode catalyst layer is prepared by the following steps: (1) preparing an ordered array carrier; (2) preparing a catalyst nanoparticle layer through a magnetron sputtering method. Compared with the prior art, the membrane electrode has the advantages that an ordered conductive array is prepared on the gas dispersion layer or an electrolyte membrane, thereby contributing to mass transfer of gas, protons and electrons; a nano-thickness catalyst layer formed by the magnetron sputtering method has a small carrying amount and a high catalyst utilization rate; the ordered membrane electrode is simple and controllable in a preparation process, is easy to amplify, and is suitable for batch production.

A fuel-cell gas dispersion layer configured from a porous carbon fiber substrate obtained by binding discontinuous carbon fibers using a carbide, and a porous layer containing at least carbonaceous particles, wherein: a porous layer (A) is disposed on one surface (A) of the porous carbon fiber substrate so as to have an average thickness (t1) of 10-55μm; a porous layer (J) is inserted into the interior of the porous carbon fiber substrate in a manner such that at least a portion thereof is present on the opposite surface (B); the proportion of the cross-sectional area in the thickness direction of openings in the interior of the porous carbon fiber substrate is 5-40%; the proportion of openings in the porous layer (A) and/or the porous layer (J) is 50-85%; the thickness of the porous carbon fiber substrate is 60-300μm; and the bulk density of the porous carbon fiber substrate is 0.20-0.45g/cm3.