Metal nanowire detector and method for measuring vacuum ultraviolet intensity
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A technology of vacuum ultraviolet light and metal nanowires, which is applied in photometry and spectrum investigation using electric radiation detectors, can solve the problems of low signal-to-noise ratio and reduce the measurement signal strength, achieve signal stability and increase current signal Intensity, large amount of effect
Inactive Publication Date: 2015-07-08
BEIJING TECHNOLOGY AND BUSINESS UNIVERSITY
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The stacking process usually needs to be operated in a clean room, and the channels need to be aligned, otherwise the measurement signal strength will be reduced and the signal-to-noise ratio will be very low
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Embodiment 1
[0065] In this example, installed in I 0 The transmission standard detector at the position of the detector 3 is a Si photodiode detector calibrated by the US NIST (National Institute of Standards and Technology), the model is AXUV-100G, and the quantum efficiency is η S Indicates (calibration results see Figure 7 ). Ammeter 14 is preferably a 6517A Electrometer / Megger (Keithley, Instruments Inc., USA). Detector 5 is a calibrated Ni metal nanowire detector, wherein the porous anodized aluminum template of the metal nanowire detector is in the shape of a disc, the diameter of each nanohole is 40nm, the hole spacing is about 100nm, and the hole depth is 50μm ; By an electrochemical deposition method, the elemental metal Ni is deposited into the nanopore, and the elemental metal Ni nanowire is grown in the nanopore. The polarizer 4 is a molybdenum-silicon (Mo-Si) multilayer film polarizer.
[0066] Measurement steps:
[0067] 1. Under the control of the motor, move the moly...
Embodiment 2
[0077] In the method of the present embodiment, differ from embodiment 1 in that:
[0078] 1) Detector 5 is a calibrated cobalt (Co) metal nanowire detector. The diameter of the alumina template is 25mm, the diameter of each nanopore is 50nm, the spacing between the holes is about 110nm, and the hole depth is 40μm.
[0079] 2) In measurement step 2, apply a negative bias voltage of 1500V to the measurement circuit.
Embodiment 3
[0081] In the method of the present embodiment, differ from embodiment 1 in that:
[0082] 1) The detector 5 is a calibrated iron (Fe) metal nanowire detector; the diameter of the alumina template is 18mm, the diameter of each nanopore is 70nm, the distance between the holes is about 140nm, and the hole depth is 20μm.
[0083] 2) In measurement step 2, add a positive bias voltage of 2000V to the measurement circuit.
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Abstract
The invention discloses a metal nanowire detector and method for measuring vacuum ultraviolet intensity. By means of the metal nanowire detector and method for measuring the vacuum ultraviolet intensity, a vacuum ultraviolet spectral signal is absolutely measured. The detector is composed of a multihole anodised alumina template with nanometer holes, and single substance metal on which single substance metal nanowires can grow is deposited inside the nanometer holes of the multihole anodised alumina template. The detector is used for measuring the 30-250eV ultraviolet signal intensity under the vacuum environment. The measuring method comprises the steps that a copper ring sheet serves as a positive electrode, the metal nanowire detector serves as a negative electrode, an insulating washer is inserted between the copper ring sheet and the metal nanowire detector, the negative electrode is connected with a current meter in series, and a DC stabilized power supply which can provide positive voltage or back bias voltage for the positive electrode and the negative electrode is additionally arranged in a measuring loop; the metal nanowire detector is demarcated through a transmission standard detector; the demarcated detector is placed at a corresponding position in the light intensity signal measuring light path layout; a light path system is started to provide the positive voltage or the back bias voltage for the positive electrode and the negative electrode; the light intensity signal is measured based on the full electron yield method, measuring is efficient, and the signal is stable.
Description
technical field [0001] The invention relates to a detector for measuring the intensity of vacuum ultraviolet light and a method thereof. Background technique [0002] In the vacuum ultraviolet energy region (the range of 30-250eV in this application), since the refractive index (real part) of any substance is close to 1, the substance absorbs light strongly, and there is no transparent substance, so the experiment in the vacuum ultraviolet energy region must Done under vacuum. Limited by the volume of the vacuum chamber, the size of the detector must be as small as possible, and it must be uniform and efficient throughout the entire effective detection sensitive area. In the vacuum ultraviolet energy region, the available detectors mainly include gas ionization chambers, proportional counter tubes, scintillation counters + CCD cameras, semiconductor detectors (silicon photodiodes) and channel multiplier tubes. [0003] Gas ionization chambers and scintillation counters + C...
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