A kind of preparation method of n-type back junction solar cell
A solar cell, N-type technology, applied in the field of solar cells, can solve the problems of affecting the efficiency, the influence of the life of the minority carrier of the silicon wafer, and the complex preparation process of the cell, and achieves the effects of low cost, improved photoelectric conversion efficiency, and suitable for popularization and application.
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[0030] see figure 1 Shown, a kind of preparation method of N-type back junction solar cell comprises the steps:
[0031] (1) Cleaning; double-sided polishing of the back surface and front surface of the N-type silicon wafer; polishing can be carried out in pure tetramethylammonium hydroxide solution;
[0032] (2) Carrying out boron diffusion to the above-mentioned N-type silicon wafer;
[0033] The boron diffusion adopts the boron tribromide liquid source diffusion method, and the boron diffusion uses boron tribromide as the source high-temperature diffusion in a tube furnace, which can be inserted into a single piece or double pieces;
[0034] First deposit boron tribromide with oxygen at 950°C for 30 minutes, then advance without power supply for 30 minutes under an oxygen atmosphere, then cool down to 850°C and oxidize for 40 minutes, and grow an oxide layer on the front and back surfaces of the silicon wafer; The thickness of the oxide layer is at least 20 nanometers;
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