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Superfine abrasive biomacromolecule flexible polishing film and preparing method thereof

A biopolymer, flexible polishing technology, applied in the direction of grinding/polishing equipment, abrasives, chemical instruments and methods, etc., to achieve the effect of solving agglomeration, good flexibility, and avoiding scratches

Active Publication Date: 2014-08-27
HUAQIAO UNIVERSITY
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0005] The purpose of the present invention is to propose a kind of ultra-fine abrasive polishing film product based on degradable biopolymer materials for the problems existing in the existing ultra-precision grinding and polishing tools

Method used

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Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0025] Add diamond with a particle size of 500nm to the aqueous solution of KH-550 silane coupling agent (the concentration of coupling agent is 0.005%, the amount of diamond added is 1%) and sonicate for 30 minutes. Treated diamond powder (after surface treatment, the functional groups formed by the hydrolysis of the coupling agent are adsorbed on the diamond and filtered to obtain diamond powder), SiO2 with a particle size of 30nm, SDS, sucrose, carrageenan and starch are mixed in deionized water by mechanical stirring Uniform, their mass percent concentrations are 1%, 3%, 0.1%, 3%, 6%, 4% respectively. The sol is evenly coated on the surface of the non-woven fabric through a coating machine, and the atomized sodium ion solution is sprayed to form a gel. After being dried at a constant temperature, it adheres to the back glue to make the polishing film of the present invention. Paste the polishing film on the polishing disc of the AUTOPOL-1000S automatic grinding and polish...

Embodiment 2

[0027] At room temperature, alumina with a particle size of 10 μm was added to TTS titanate coupling agent (the amounts of alumina and TTS were 2% and 0.02%, respectively) and sonicated for 10 minutes. The treated alumina, CaCO3 with a particle size of 20nm, NaCl grains, glycerol, chitosan and sodium alginate were mixed uniformly in deionized water by mechanical stirring, and the mass percentage concentrations were 2%, 1%, 0.2%, respectively. %, 3%, 3.5%, 5%. Coating the sol onto a circular HASL universal board, soaking it in a calcium ion solution to form a gel film. After infrared drying, the film is gently torn off from the universal plate, and the smooth surface of the film is pasted on the round adhesive, so that the polishing film of the present invention can be produced. Paste this polishing film on the polishing disc of AUTOPOL-1000S automatic grinding and polishing machine, the grinding disc speed is set to 90rpm, the sample loading disc speed is set to 80rpm, and th...

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Abstract

The invention relates to a superfine abrasive biomacromolecule flexible polishing film and a preparing method of the polishing film and belongs to the field of combination between biomacromolecule material and super-precision machining. The polishing film is characterized in that a substrate of the polishing film is made of degradable biomacromolecule material, the mechanical performance of the polishing film is enhanced through selected filling agents, water carrying agents, pore forming agents and other drying control chemical additives, and superfine abrasives can be evenly dispersed and effectively held in the polishing film with a coupling agent surface chemical modification method. Compared with a traditional chemical and mechanical polishing mode, the problems that free abrasives are seriously wasted, and the environment is polluted by a corrosive polishing solution are avoided. Compared with a commercial polishing film product, the biomacromolecule substrate has certain flexibility, abrasive particles can be soaked in the biomacromolecule substrate, scratches and mechanical damage are avoided, and super-precision undamaged machining can be achieved. The degradable superfine abrasive biomacromolecule flexible polishing film has the advantages of being simple in preparing technology, good in polishing effect, high in machining efficiency, capable of making a workpiece convenient to wash, environmentally friendly and the like.

Description

technical field [0001] The invention relates to an ultra-precision grinding and polishing tool, which is a biopolymer flexible polishing film containing ultra-fine abrasives, and has the characteristics of no pollution in the processing process, green environmental protection and degradable. Background technique [0002] In recent years, with the rapid development of information technology and optoelectronic technology, higher and higher requirements have been put forward for the processing of ceramic substrates, semiconductor wafers, optical crystals, decorative and engineering stones. In particular, the processing of semiconductor wafers not only requires the surface to be ultra-smooth and ultra-flat, but also free from residual stress, surface and subsurface damage. [0003] The ultra-precision polishing methods for such materials mainly include free abrasive polishing, fixed abrasive polishing and special processing. In the process of polishing with free abrasives, the ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): B24D11/00C09C1/44C09C1/40C09C3/12C09C3/08
CPCB24B19/22B24D3/00B24B37/22B24B37/245B24D11/001B24D18/0009B24D11/00C09K3/14
Inventor 陆静徐西鹏黄辉宋运运
Owner HUAQIAO UNIVERSITY
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