Nano composite coating and deposition method thereof

A nano-composite coating and coating technology, which is applied in the coating, metal material coating process, vacuum evaporation plating, etc., can solve the problems of coating shedding, affecting the service life of the coating, and difficult control of metal stress. Extended service life, high hardness, and long service life

Inactive Publication Date: 2015-07-22
CHONGQING UNIV OF ARTS & SCI
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Although the currently developed multi-layer coating improves the overall performance of the single-layer coating, the stress betw

Method used

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  • Nano composite coating and deposition method thereof

Examples

Experimental program
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Effect test

Embodiment 1

[0025] A kind of preparation of composite coating, according to the following steps:

[0026] Prepare metal-ceramic tools (TiCN) for sandblasting, then ultrasonically clean them in demineralized water, acetone, and absolute ethanol for 5 minutes, and put them into a vacuum chamber after drying. Evacuate the air pressure of the vacuum chamber of the equipment to 3.0×10 -3 After Pa, argon gas was introduced for scrubbing. After 30 minutes, the gas pressure in the vacuum chamber was adjusted to 4Pa, and the target baffle was kept closed; a pulse voltage of 800V (40KHz) was applied to the workpiece for plasma etching and cleaning for 30 minutes. After completion, adjust the gas pressure to 3×10 -1 Pa, open the target baffle, and perform pre-sputtering on the Ti target, TiAlY target and Si target respectively to remove the pollutants on the target surface. After cleaning, keep the gas pressure 3×10 -1 Pa, use a DC sputtering power supply, adjust the power supply current to 0.4A...

Embodiment 2

[0028] A kind of preparation of composite coating, according to the following steps:

[0029] Prepare the high-speed steel tool for sandblasting, then ultrasonically clean it in demineralized water, acetone, and absolute ethanol for 10 minutes, and put it into a vacuum chamber after drying. Evacuate the air pressure of the vacuum chamber of the equipment to 3.0×10 -3 Below Pa, argon gas is passed through for scrubbing. After 30 minutes, the gas pressure in the vacuum chamber was adjusted to 4Pa, and the target baffle was kept closed; a pulse voltage of 800V (40KHz) was applied to the workpiece, and plasma etching was performed for 30 minutes. After completion, adjust the gas pressure to 3×10 -1 Pa, open the target baffle, and perform pre-sputtering on the Cr target, TiAlY target and Si target respectively to remove the pollutants on the target surface. After cleaning, keep the gas pressure 3×10 -1 Pa, using a DC sputtering power supply, adjusting the power supply current t...

Embodiment 3

[0031] A kind of preparation of composite coating is carried out as follows:

[0032] (1) Pretreatment: Sandblast the finely ground hard alloy tool, then ultrasonically clean it in absolute ethanol and demineralized water, and put it into the vacuum chamber of the coating equipment after drying.

[0033] (2) Gas washing: pump the vacuum chamber pressure of the coating equipment to 5.0×10 -3 After Pa, nitrogen and argon are passed into the vacuum chamber to perform gas washing; the flow of the nitrogen is 30 sccm (standard milliliters / minute), and the flow of the argon is 60 sccm; while the vacuum chamber temperature is heated to 400 ℃ Coating operating temperature.

[0034] (3) Etching and cleaning: After heating, adjust the argon pressure in the vacuum chamber of the coating equipment to about 4.0Pa, apply a pulse bias voltage of 800V on the sample stage for 30 minutes; perform plasma etching and cleaning on the cutting tool to be plated.

[0035] (4) film layer preparation...

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Abstract

The invention relates to a nano composite coating which sequentially consists of coatings A, B and C from bottom to top, wherein the coating A is metal Cr, metal Ti or titanium-chromium alloy; the coating B is TiAlN, CrAlN, TiAlSiN or ZrN and doped with one or more of rare earth elements La, Ce and Y; the coating C is Si3N4. By depositing the composite coating provided by the invention to a cutting tool, the wear resistance and the corrosion resistance of the cutting tool are greatly enhanced and the cutting tool has relatively high hardness and using temperature. The composite coating is stable in structure, good in binding force and long in service life, and the service life of the tool is further prolonged. The binding strength of the composite coating and a substrate is tested by using a scratch method and the result shows that the coating-substrate adhesion is improved by 30% or above. Compared with the TiAlN coated cutting tools sold on the market, the service life of the coated cutting tool provided by the invention is prolonged by 70% or above.

Description

technical field [0001] The invention relates to the technical field of hard coating deposition on the surface of a cutting tool, in particular to a nanometer multilayer composite coating on the surface of a cutting tool and a deposition method. Background technique [0002] With the continuous emergence of high-hardness, brittle and heat-resistant materials, higher requirements are put forward for tool materials. In addition to good mechanical properties at room temperature, such as strength, toughness, and hardness, chip cutting tools should also have excellent thermodynamic properties, such as chemical stability and thermal shock performance, for processing characteristics such as high speed, high temperature, difficult machining, and hard cutting. , high temperature mechanical properties, etc. [0003] Coated tools are obtained by depositing refractory metal or non-metallic compound coatings on the surface of cemented carbide, high-speed steel (HSS) ceramics and other to...

Claims

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Application Information

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IPC IPC(8): C23C14/34C23C14/06
Inventor 苏永要王锦标田亮亮
Owner CHONGQING UNIV OF ARTS & SCI
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