Integrated composite treatment method for in-situ PVD film coating after alloy steel surface nitriding

A composite treatment, alloy steel technology, applied in the field of material surface processing, can solve problems such as failure, cracking, peeling, etc., and achieve the effect of activating the matrix, enhancing the adhesion performance, and improving the comprehensive performance.

Inactive Publication Date: 2017-02-15
SOUTH CHINA UNIV OF TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

During the service process, the coating is subjected to high load and severe fr

Method used

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  • Integrated composite treatment method for in-situ PVD film coating after alloy steel surface nitriding
  • Integrated composite treatment method for in-situ PVD film coating after alloy steel surface nitriding
  • Integrated composite treatment method for in-situ PVD film coating after alloy steel surface nitriding

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0035] Example 1: In-situ preparation of TiN hard coating on the surface of H13 hot work die steel after nitriding

[0036] 1. Substrate surface pretreatment: (1) Grinding and polishing: Roughly grind and finely grind H13 hot work die steel on sandpaper of 200 mesh, 400 mesh, 600 mesh, 800 mesh, and 1000 mesh respectively, and the time of coarse and fine grinding is controlled at After 10 minutes of fine grinding, the sample was ultrasonically cleaned, and the cleaning agent was absolute ethanol to remove the abrasive debris generated during the grinding process. The ultrasonic cleaning time was 5 minutes, and dried in an oven. After the sample is ground, it is polished with W2.5 diamond polishing powder for 15 minutes. After polishing, the surface roughness Ra value of the sample reaches 0.3 μm. (2) Ultrasonic cleaning: The polished substrate was ultrasonically cleaned with absolute ethanol for 15 minutes, and then dried.

[0037] 2. Ion cleaning and etching on the surface o...

Embodiment 2

[0044] Example 2: In-situ preparation of Al after surface nitriding of H13 die steel 55 Ti 45 N hard coat

[0045] 1. Substrate surface pretreatment: with embodiment 1

[0046] 2. Ion cleaning and etching on the substrate surface: same as in Example 1.

[0047] 3. Plasma-assisted nitriding on the surface of the substrate: After ion cleaning and etching on the surface of the substrate, high-purity N is continuously introduced into the reaction furnace 2 , high purity H 2 and high-purity Ar, target current, substrate bias, temperature and pressure in the furnace are the same as above, N 2 The flow rate is 25sccm, H 2 The flow rate is 50 sccm, the Ar flow rate is controlled by air pressure, and plasma-assisted nitriding treatment is performed for 120 min.

[0048] 4. Coating evaporation deposition: After plasma-assisted nitriding of the substrate surface, TiN hard coating is deposited in situ. The deposition method is carried out in two stages: (1) The first stage uses hig...

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Abstract

The invention discloses an integrated composite treatment method for in-situ PVD film coating after alloy steel surface nitriding. Firstly, a matrix is ground, polished and subjected to ultrasonic cleaning, and then the surface of the matrix is subjected to plasma cleaning and etching through an arc enhanced type glow discharge technology; then, ion nitriding treatment is performed, and a nitriding layer is obtained; and finally, under the conditions of similar temperature and pressure, advanced plasma auxiliary arc film coating treatment is performed in situ, negative bias voltage is applied to the matrix, and a hard film is obtained on the nitriding layer. According to the method, due to the fact that storage and programming summarizing are performed on the same device, under the conditions of similar temperature and pressure, a PN-PVD composite treatment process is integrally performed, high-density plasma performs cleaning and etching on the matrix in the nitriding process, the nitriding speed is increased, and an electronic heating effect is also generated on the early growth stage of a film layer; and by means of the composite treatment process, the adhesiveness between a coating and the matrix is remarkably improved, the abrasion-resistant performance of the coating is improved, and the comprehensive performance of coating tools, molds and mechanical parts is effectively improved.

Description

technical field [0001] The invention relates to the field of material surface processing, in particular to an integrated composite treatment method for in-situ PVD coating on the surface of alloy steel after nitriding, which is suitable for surface strengthening of cutting tools, molds and key mechanical parts. Background technique [0002] With the advancement of processing and manufacturing technology, machining continues to develop in the direction of high precision and high speed, which puts forward higher requirements for various tools in terms of hardness, wear resistance, oxidation resistance and cutting performance. Today, coating technology has become the three key technologies of cutting tools together with tool materials, tool design and manufacturing. Based on the pursuit of high precision, high efficiency, low cost, and environmental protection, the design combination of "high toughness and high strength matrix + high hardness and high wear resistance blade" is ...

Claims

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Application Information

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IPC IPC(8): C23C14/02C23C14/22C23C8/38C23C14/54
CPCC23C14/022C23C8/38C23C14/22C23C14/54
Inventor 匡同春邓阳王毅陈灵雷淑梅黎毓灵周克崧曾德长
Owner SOUTH CHINA UNIV OF TECH
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