Laser scribing and scanning material preparation method for dot matrix surface texture
A laser scribing and surface texturing technology, applied in nanotechnology, laser welding equipment, manufacturing tools, etc. for materials and surface science, which can solve the problem of low ion etching efficiency, only applicable to electrolytic machining, and poor material universality. and other problems, to achieve high process controllability and repeatability, controllable size and spacing, and good lattice structure period.
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Embodiment 1
[0037] Preparation of surface lattice texture on glass.
[0038] (1) Soak the sample in alcohol and ultrasonically clean it for 10 minutes, dry it with compressed air with an air pressure of 2 bar, and then fix it on the mobile platform;
[0039](2) The laser used is a picosecond laser with a pulse width of 10ps, a wavelength of 355nm, and a frequency of 200kHz. The spot size after focusing is about 20μm. The laser parameters are set according to the damage threshold and the effective penetration depth of the incident light. The average power 0.1W, the laser is focused on the sample surface. First use a single pulse to process the texture unit on the glass surface, and measure its long axis to be 18.2 μm, and its short axis to be 13 μm;
[0040] (3) The size of the required texture is 8×8mm, and the texture units are tangent, so the scanning speed of the galvanometer is set to 3640mm / s through calculation, the distance between adjacent line segments is 13μm, and the length of...
Embodiment 2
[0043] Preparation of surface lattice texture on glass.
[0044] (1) Soak in alcohol and ultrasonically clean for 10 minutes, dry it with compressed air with a pressure of 2 bar, and then fix it on the mobile platform;
[0045] (2) The laser used is a picosecond laser with a pulse width of 10ps, a wavelength of 355nm, and a frequency of 200kHz. The spot size after focusing is about 20μm. The laser parameters are set according to the damage threshold and the effective penetration depth of the incident light. The average power 0.9W, the laser is focused on the sample surface. First use a single pulse to process the texture unit on the glass surface, and the measured long axis is 13.5 μm, and the short axis is 6.8 μm;
[0046] (3) The size of the required texture is 8×8mm, and the texture units are tangent, so the scanning speed of the galvanometer is set to 2700mm / s through calculation, the distance between adjacent line segments is 6.8μm, and the length of each line segment is...
Embodiment 3
[0049] Surface lattice texture was prepared on AlN ceramic substrate.
[0050] (1) Soak in alcohol and ultrasonically clean for 10 minutes, dry it with compressed air with a pressure of 2 bar, and then fix it on the mobile platform;
[0051] (2) The laser used is a picosecond laser with a pulse width of 10ps, a wavelength of 355nm, and a frequency of 200kHz. The spot size after focusing is about 20μm. The laser parameters are set according to the damage threshold and the effective penetration depth of the incident light. The average power 24.0W, the laser is focused on the sample surface. First use a single pulse to process the texture unit on the glass surface, and the measured circle diameter is 60 μm;
[0052] (3) The size of the required texture is 30×30mm, and the texture units are tangent, so the scanning speed of the galvanometer is set to 12000mm / s through calculation, the distance between adjacent line segments is 60μm, and the length of each line segment is 30mm. 5...
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