Oily grinding liquid and preparation method thereof

An abrasive liquid and oil-based technology, which is applied in chemical instruments and methods, polishing compositions containing abrasives, and other chemical processes, can solve the problems of high temperature, poor dispersion, and large TTV of the abrasive disc, and achieve a stable disc temperature. control, high grinding rate and small TTV

Active Publication Date: 2018-02-16
BEIJING GRISH HITECH
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  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0006] The first object of the present invention is to provide a kind of oil-based abrasive liquid specially used for ultra-precision grinding and polishing of sapphire substrates, which has the outstanding characteristics of good dispersibility, high grinding rate, controllable temperature of the grinding disc, and small TTV. During the ultra-precision grinding process of the sapphire substrate, the temperature of the grinding disc changes relatively smoothly, and there will be no problem of excessive temperature, which overcomes the defects of high temperature and large TTV of the grinding disc in the traditional oily grinding liquid in the prior art, and overcomes the The defects of poor dispersion and low grinding rate in the water-based grinding liquid in the prior art will greatly improve the processing yield of the sapphire substrate, improve the grinding processing efficiency, reduce the processing cost, and have little taste, easy cleaning, and environmental protection

Method used

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  • Oily grinding liquid and preparation method thereof
  • Oily grinding liquid and preparation method thereof
  • Oily grinding liquid and preparation method thereof

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1-6

[0048] The formula of concrete oily diamond grinding liquid is as shown in table 1 below (parts are mass parts):

[0049] Table 1 Proportion Table of Oily Grinding Fluid

[0050]

[0051]

[0052] The concrete preparation method of above-mentioned embodiment is:

[0053] Under the conditions of a stirring speed of 300rpm and a reaction temperature of 30°C, the diamond powder with a median particle size of 6μm, a surfactant, and a base oil were mixed, stirred ultrasonically for 5-10 minutes, and then modified on the surface, and then added For wet dispersant and suspending agent, continue ultrasonic stirring for 5-10 minutes to ensure that the diamond powder is fully and evenly dispersed in the mixed solution, add lubricant and anti-wear agent to the above mixed solution in proportion, and ultrasonically stir for 5-10 minutes. The tester tests the mixture obtained above, and according to the actual viscosity of the test, add a proper amount of viscosity modifier (viscosi...

Embodiment 7-12

[0055] The formula of concrete oily diamond grinding liquid is as shown in table 2 below (parts are mass parts):

[0056] Table 2 Proportion Table of Oily Grinding Fluid

[0057]

[0058] The concrete preparation method of above-mentioned embodiment is:

[0059] Under the conditions of a stirring speed of 100rpm and a reaction temperature of 20°C, mix diamond micropowder with a median particle size of 6μm, a surfactant, and base oil, and ultrasonically stir for 5-10 minutes to carry out surface modification; then add a wetting and dispersing agent, suspending agent, ultrasonically stirred for 5-10 minutes to ensure that the diamond powder is fully and evenly dispersed in the mixed solution, and the lubricant and anti-wear agent are added to the above mixed solution in proportion, and ultrasonically dispersed for 5-10 minutes while stirring. The tester tests the mixture obtained above, and according to the actual viscosity of the test, add an appropriate amount of viscosity...

Embodiment 13

[0061] The specific formula is the same as in Example 1, except that the viscosity reducer is increased from 0.3 parts to 2 parts. The specific preparation method is: mixing diamond micropowder, surfactant, and base oil with a median particle size of 6 μm at 200 rpm, stirring at 25 ° C for 5- 10min, carry out surface modification; then add wetting and dispersing agent, suspending agent 200rpm, 25°C and stir for 5-10min to ensure that the diamond powder is fully and evenly dispersed in the mixture, and add lubricant and antiwear agent to the above mixture in proportion In the solution, 200rpm, 25 ℃ while stirring and ultrasonic dispersion for 5-10min, use the viscosity tester to test the above-mentioned mixed solution, and according to the actual viscosity of the test, add a proper amount of viscosity modifier (viscosity reducer, thickener or no addition ), 100rpm, 25°C stirring and ultrasonic dispersion for 3-5min, so that the final viscosity of the mixed solution is controlled...

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Abstract

The invention provides oily grinding liquid and a preparation method thereof. The oilness grinding liquid is mainly prepared from the following components: diamond micropowder, matrix oil, a surfactant, a wetting dispersant, a suspension concentrate, a lubricant, an antiwear additive and a viscosity modifier. The preparation method comprises the following steps: after performing ultrasonic stirring on the diamond micropowder, the surfactant and the matrix oil for 5-10min, adding the wetting dispersant and the suspension concentrate, and performing ultrasonic stirring for 5-10min; and then adding the lubricant and the antiwear additive, performing ultrasonic stirring for 5-10min, determining viscosity, and stirring for a period of time after adding a viscosity reducer or a thickener according to the actual viscosity to obtain the oily grinding liquid. When being applied to sapphire substrate precision machining, the oily grinding liquid provided by the invention has the outstanding features of high grinding rate, controllable grinding disc temperature and small TTV, can improve the grinding processing efficiency, lowers the processing cost, is small in smell and liable to clean andis green and environmentally friendly.

Description

technical field [0001] The invention relates to the field of abrasive liquids applied to ultra-precision grinding and polishing, in particular to an oily abrasive liquid applied to ultra-precision grinding and polishing of sapphire substrates and a preparation method thereof. Background technique [0002] Gallium nitride (GaN), as the third-generation semiconductor material after silicon (Si) and gallium arsenide (GaAs), has many substrate materials, including sapphire, silicon carbide, silicon, magnesium oxide, zinc oxide, etc. , sapphire is one of the most commonly used substrate materials. At present, high-quality GaN materials have been epitaxially grown on sapphire to make GaN-based blue light-emitting diodes and laser diodes. Due to its high hardness and high brittleness, sapphire is difficult to machine, and the processing technology threshold is quite high. As a substrate material, the flatness of its surface processing greatly affects the quality of the device, and ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C09G1/02C09K3/14C08J5/14
CPCC08J5/00C09G1/02C09K3/1454
Inventor 吴月英张亮张斌
Owner BEIJING GRISH HITECH
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