Symmetric magnetron sputtering process and application of diamond-like carbon coating thereof

Abstract

The invention discloses a symmetric magnetron sputtering process and application of a diamond-like carbon coating thereof. Due to the electron gathering effect in the discharging process of symmetricmagnetron sputtering cathodes opposite in direction, the ionization rate of sputtered carbon particles is increased, the high-energy carbon particles overflow from a gap between the symmetric cathodesand is subjected to doping of metal atoms of a magnetron sputtering metal target so that the diamond-like carbon coating can be formed, and due to the symmetric magnetron sputtering process, the target material utilizing rate can be increased, and the ionization rate of sputtered particles is also greatly increased; and the diamond-like carbon coating is composed of a metal base layer, a gradientcomposite layer and a metal-doped diamond-like carbon coating, and in the deposition process of the diamond-like carbon coating, the diamond-like carbon coating in certain gradient and with stable doping proportion can be obtained by adjusting the power of the magnetron sputtering metal target. Due to the process, high energy ionized carbon ions can be obtained, and the compact and fine diamond-like carbon coating can be formed easily.

Description

technical field [0001] The invention belongs to the field of vacuum coating coating preparation, and relates to a symmetrical slit magnetron sputtering process and the application of the diamond-like coating. Background technique [0002] Friction and wear of solid materials generally exist in various fields of production and life, and friction and wear exist in all relative moving parts. Statistics at home and abroad show that the energy consumed by friction accounts for 1 / 3 of the world's primary energy, about 80% of mechanical parts eventually fail due to continuous wear and tear, and about 50% of mechanical equipment vicious accidents Occurs due to lubrication failure and excessive wear. The physical, chemical and mechanical properties of the material surface have an important impact on the tribological properties of the material. After the surface of the solid material is pretreated, it is then subjected to surface coating, surface modification or composite treatment ...

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Problems solved by technology

[0007] The existing carbon particle sources mainly include gaseous carbon particle source, magnetron sputtering source, multi-arc particle carbon coating particle source, laser carbon particle source, etc., wherein the gaseous carbon particle source is mainly through the ion source and other plasma devices. The hydrogen gas is ionized, the magnetron sputtering source refers to the magnetron sputtering graphite target, which provides carbon particles for deposition, and the multi-arc ion carbon plating particle source is arc discharge on the surface of the graphite target or metal carbide target; the gas carbon The particle source needs ionized gas, on the one hand, the ionization rate is low, on the other hand, during the ionization process, carbon particles will be deposited on the source, which will affect the stability of the discharge process and the continuity of production, requiring frequent manual cleaning; and The magnetron sputtering source has low deposition rate, low ionization rate, and the characteristics of graphite discharge of the multi-arc ion carbon plating particle source. The existence of large particles in the discharge process affects the application of the multi-arc ion carbon plating particle source.

[0008] When the existing magnetron sputtering source directly deposits diamond-like carbon, on the one hand, the sputtering rate of the inert gas in the glow discharge process is low, and on the other hand, the metal in the glow discharge is mainly in the atomic state, and the ionization rate is low. Diamond-like carbon coatings with high SP3 content cannot be obtained

In addition, the sputtered particles in the process of magnetron sputtering have low atomic energy, and neither the surface energy nor the diffusion energy can make the deposited particles migrate and diffuse on the surface, so the structure of the coating is loose and the microhardness is low.

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