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Thick ti/tialn multilayer coating with high toughness and high hardness and preparation method thereof

A multi-layer coating, high hardness technology, applied in coating, metal material coating process, vacuum evaporation plating, etc. Internal stress increases and other problems, to achieve good oxidation resistance, easy control of the total thickness, and reduce the effect of internal stress

Active Publication Date: 2021-03-12
HENAN INST OF SCI & TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, for hard ceramic coatings, as the thickness of the coating increases, the internal stress of the coating will increase. The higher internal stress and intrinsic brittleness in the coating make the bonding performance of the coating and the substrate decrease with the increase of the thickness. reduce
The peeling tendency of the single-layer nitride coating increases significantly when the thickness exceeds 6-7 μm, which seriously restricts the thickness of the hard coating and greatly limits its industrial application

Method used

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  • Thick ti/tialn multilayer coating with high toughness and high hardness and preparation method thereof
  • Thick ti/tialn multilayer coating with high toughness and high hardness and preparation method thereof
  • Thick ti/tialn multilayer coating with high toughness and high hardness and preparation method thereof

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0041] In this example, the cemented carbide (WC-6wt.% Co, mass fraction) is ground and polished with SiC sandpaper, put into a solution mixed with acetone and ethanol at a volume ratio of 1:1, and ultrasonically cleaned for 15 minutes to Remove surface oil, oxide film and other dirt, load the pretreated substrate on the sample holder, put it into the ion plating vacuum chamber, close the chamber door, and evacuate to a vacuum degree of 5.0×10 -3 After Pa, argon gas was introduced to maintain the vacuum at 0.4 Pa, the negative bias voltage value of the substrate was 1000V, and the duty cycle was 60%, and the substrate was cleaned by ion bombardment for 10 minutes.

[0042] After cleaning, cut off the argon gas, feed nitrogen gas, maintain the vacuum pressure at 1.5Pa, control the substrate pulse negative bias value at 600V, turn on the Ti target current, and deposit for 3 minutes to form a TiN transition layer. Then alternate deposition of TiAlN sub-layer and Ti sub-layer: fir...

Embodiment 2

[0046] The difference from Example 1 is:

[0047] When the TiAlN sub-layer is deposited, the nitrogen pressure is 1.6Pa, the substrate negative bias value is 520V, and the deposition time is 18min; when the Ti sub-layer is deposited, the argon working pressure is 0.35Pa, the substrate negative bias value is 120V, and the deposition time is controlled In 2.5 minutes; wherein, the thickness of the TiN transition layer is 0.1 μm, the thickness of each TiAlN sublayer is 1.7 μm, the thickness of each Ti sublayer is 0.2 μm, and the total number of layers is 16 layers. In the TiN transition layer, the atomic ratio Ti:N=1:1; in the TiAlN sublayer, the atomic ratio Ti:Al:N=1:1:2.

[0048] The Ti / TiAlN multilayer coating obtained in this example has a uniform distribution of the TiAlN sublayer and a dense structure, and the Ti / TiAlN multilayer coating is well bonded to the substrate through the transition layer. The hardness value of the Ti / TiAlN multilayer coating obtained in this exa...

Embodiment 3

[0050] The difference from Example 1 is:

[0051] When the TiAlN sub-layer is deposited, the nitrogen pressure is 1.7Pa, the substrate negative bias value is 500V, and the deposition time is 18min; when the Ti sub-layer is deposited, the argon working pressure is 0.4Pa, the substrate negative bias value is 150V, and the deposition time is controlled In 3.5 minutes; wherein, the thickness of the TiN transition layer is 0.1 μm, the thickness of each TiAlN sublayer is 1.7 μm, the thickness of each Ti sublayer is 0.3 μm, and the total number of layers is 16 layers. In the TiN transition layer, the atomic ratio Ti:N=1:1; in the TiAlN sublayer, the atomic ratio Ti:Al:N=1:1:2.

[0052] The Ti / TiAlN multilayer coating obtained in this example has a uniform distribution of the TiAlN sublayer and a dense structure, and the Ti / TiAlN multilayer coating is well bonded to the substrate through the transition layer. The hardness value of the Ti / TiAlN multilayer coating obtained in this exam...

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Abstract

The invention relates to hard protective coatings, in particular to a thick Ti or TiAlN multilayer coating with high toughness and hardness and a preparation method thereof. The Ti or TiAlN multilayercoating deposits on the surface of a hard alloy substrate by using general arc ion plating equipment and selecting a Ti target and a TiAl target as cathode targets; the Ti or TiAlN multilayer coatingis a layered structure and comprises a TiN transition layer, multiple TiAlN sublayers and Ti sublayers; the first layer depositing on the substrate is the TiN transition layer, the second layer is the TiAlN sublayers, and then the Ti sublayers; the TiAlN sublayers and the Ti sublayers deposit in an alternating superposition mode, and the outermost layer is the TiAlN sublayers; The Ti or TiAlN multilayer coating has the characteristics of high thickness, good coating-substrate bonding strength, high hardness, high toughness and good oxidation resistance and the like.

Description

Technical field: [0001] The invention relates to the field of hard protective coatings, in particular to a thick Ti / TiAlN multilayer coating with high toughness and high hardness and a preparation method thereof. Background technique: [0002] Cemented carbide cutting tools are the main force of modern high-efficiency cutting tools being developed in our country, and the demand is increasing at an average annual rate of more than 30%. With the development of modern manufacturing industry, cutting machine tools and cutting processing technology have been greatly improved, and higher requirements are placed on cutting tools. The increasingly harsh service conditions require cutting tools to have high hardness, high wear resistance, high toughness, sufficient strength and good oxidation resistance. Applying a hard coating on a cemented carbide tool can improve the comprehensive properties of the tool surface such as hardness, toughness and oxidation resistance. [0003] The r...

Claims

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Application Information

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IPC IPC(8): C23C14/32C23C14/02C23C14/06C23C14/18
CPCC23C14/022C23C14/0641C23C14/18C23C14/325
Inventor 张明明李勇峰赵红远吴婷婷张亚奇谢文龙郭昊苏建修
Owner HENAN INST OF SCI & TECH
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