Method for manufacturing high-precision micro-channel network
A manufacturing method and micro-channel technology, applied in the field of electronics, can solve the problems of easy rupture of material molds, complex process flow, poor flexibility, etc., and achieve the effects of smooth surface, simple and controllable process flow, and good repeatability
Pending Publication Date: 2020-04-07
INST OF MICROELECTRONICS CHINESE ACAD OF SCI
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Problems solved by technology
[0005] The embodiment of the present invention provides a high-precision microfluidic channel network manufacturing method to solve the problems that the traditional preparation method has a complicated process flow, and the prepared material is easy to break and has poor flexibility as a mold, and realizes that the direct use of silicon can be avoided. Such as high-precision graphics transfer materials used as molds are easy to break, poor toughness and other problems
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Embodiment 1
[0063] The embodiment of the present invention provides a method for fabricating a high-precision microchannel network, please refer to figure 1 , the method includes:
[0064] Step 110: obtaining a substrate 2;
[0065] Specifically, as Figure 8 As shown, the substrate 2 is selected according to the requirements, and the substrate material includes silicon wafer, silicon dioxide, silicon nitride, glass, polydimethylsiloxane (PDMS), polymethyl methacrylate, polytetrafluoroethylene Vinyl fluoride and paper base, etc.
[0066] Step 120: After cleaning and surface-treating the substrate, use photolithography to pattern the designed micro-channel network pattern structure onto the surface of the substrate;
[0067] Specifically, after cleaning and surface treatment of the substrate, the designed microfluidic channel network pattern structure is patterned onto the substrate surface by photolithography.
[0068] The selected photolithography type and glue coating thickness can ...
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The invention discloses a method for manufacturing a high-precision micro-channel network. The method adopts the procedures of photoetching, etching, electroforming, electroplating, injection molding,bonding, bonding and the like to prepare a plurality of sets of micro-channel network high-precision molds by methods of micro-nano processing, electrochemistry and the like, and breaks through the technical difficulties of preparation of metal molds with high-quality graphic structures and long service life. Micro-nano machining and high-precision machining technologies are fused, a micro-fluidic sensing chip cross-scale preparation technology is integrated, and a fine structure micro-channel network with a large depth-to-width ratio, a steep side wall and a smooth surface is prepared. A high-throughput, miniaturized and high-performance micro-channel network chip suitable for various tiny samples can be constructed, and the micro-channel network chip can be suitable for various terminalapplications and can be widely applied to the scientific research and engineering fields of biology, chemistry, medical analysis and the like.
Description
technical field [0001] The invention relates to the field of electronic technology, in particular to a method for manufacturing a high-precision microchannel network. Background technique [0002] As a key carrier part of microfluidic technology, the microchannel network has now been developed to use micropipes on the order of microns to process or manipulate tiny fluids with volumes ranging from nanoliters to attoliters. Because of its small size, low sample consumption, and rapid detection with multi-functional integration, it has great application potential in the direction of portable clinical detection and diagnosis. At the same time, the microchannel network is very suitable for off-line reactions and the construction of in vitro models of tissues and organs, and has become an indispensable and important step in the research of systems biology. [0003] However, in the process of implementing the technical solutions in the embodiments of the present invention, the inv...
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IPC IPC(8): B81C1/00B81C3/00
CPCB81C1/00119B81C1/00523B81C3/001
Inventor 解婧邢建鹏李超波
Owner INST OF MICROELECTRONICS CHINESE ACAD OF SCI