A FTRPSA separation and purification method for deep defluorination and drying of HCl gas containing high concentration of HF
A high-concentration, gas-based technology, applied in separation methods, specific gas purification/separation, chemical instruments and methods, etc., can solve the problems of high investment and high energy consumption
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Embodiment 1
[0046] Such as figure 1 Shown, a kind of FTrPSA separation and purification method of deep defluorination and drying of HCl gas containing high concentration HF, the specific implementation steps include,
[0047] (1) Prepare the raw material gas: from the hydrogen chloride (HCl) industrial gas containing high concentration hydrogen fluoride (HF), the rest contain the main impurity components as 25% HF, 1% water (H 2 O), and trace or trace amounts of fluorosilanes (acids), chlorosilanes / other chlorides, carbon dioxide (CO 2), water-soluble metal (Me+) ions, and fine solid or colloidal (SS) particles, among which Me+ is mainly water-soluble sodium (Na), magnesium (Mg), calcium (Ca), and arsenic (As) ions. The concentration is at the ppm level of traces, the fine particles (SS) with a diameter greater than 1 micron (μm) are greater than 100 (pieces) units / milliliter (Ea / ml), normal temperature and pressure;
[0048] (2) Raw material gas pretreatment: The raw material gas is pr...
Embodiment 2
[0056] Such as figure 2 As shown, on the basis of Example 1, the medium-temperature pressure swing adsorption concentration process is composed of two-stage pressure swing adsorption. Enter, the non-adsorbed phase gas flowing out from the top of the adsorption tower of the first stage of pressure swing adsorption in the adsorption step is refined HCl gas. After precision filtration and condensation, the formed refined HCl liquid enters the membrane separation process, and the first non-adsorbed gas formed by condensation The condensate gas enters the tail gas absorption process for treatment. The desorbed gas flowing out from the bottom of the adsorption tower of the first stage of pressure swing adsorption in the desorption step of reverse discharge and vacuum pumping is pressurized and then discharged from the adsorption tower of the second stage of pressure swing adsorption. The bottom enters, and the non-adsorbed phase gas flowing out from the top of the adsorption tower ...
Embodiment 3
[0058] Such as image 3 As shown, on the basis of Example 1, the medium-temperature pressure swing adsorption concentration process is composed of two-stage pressure swing adsorption. The crude HCl gas from the cooling and condensation process is converted from the first stage to The non-adsorbed phase gas flowing out from the top of the adsorption tower of the first stage of pressure swing adsorption in the adsorption step is the intermediate gas, which directly enters from the bottom of the adsorption tower of the second stage of pressure swing adsorption. In the second stage of pressure swing adsorption, the non-adsorbed phase gas flowing out of the top of the adsorption tower is refined HCl gas. After precision filtration and condensation, the formed refined HCl liquid enters the membrane separation process, and the first non-condensable gas formed by condensation enters the tail gas absorption. The process is processed, and the desorption gas from the adsorption phase flo...
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