Electrooptical sensor static bias point process correction method and electro-optical sensor

Abstract

The invention discloses an electro-optical sensor static bias point process correction method and an electro-optical sensor, and the electro-optical sensor static bias point process correction method comprises the following steps: measuring the deviation between the static bias point of the electro-optical sensor and pi / 2; and the effective refractive index of the optical waveguide is adjusted, so that the static bias point of the electro-optical sensor reaches pi / 2. External voltage is applied to the two sides of the transition metal oxide resistive material to adjust the dielectric constant of the transition metal oxide resistive material, so that the effective refractive index of the optical waveguide is changed, the static bias point reaches pi / 2, and difficult-to-avoid process errors in manufacturing of the electro-optical sensor are corrected; the external voltage can be removed after the adjustment is completed, and the dielectric constant of the transition metal oxide resistive material is not changed, so that the effective refractive index of the optical waveguide is not changed, and the technology is passive; the transition metal oxide resistive material has a continuous light adjusting function, and the dielectric constant is continuously changed under excitation of different voltages, so that different application requirements are met.

Description

technical field [0001] The invention belongs to the technical field of sensors, and in particular relates to a process correction method for a static bias point of an electro-optic sensor and the electro-optic sensor. Background technique [0002] The electro-optic sensor based on the linear electro-optic effect of lithium niobate material has become the most mature and widely used type of electric field sensor due to its advantages of large bandwidth, fast response, small interference to the original field, and anti-electromagnetic interference. [0003] Bulk lithium niobate is used to make optical waveguides by titanium diffusion or proton exchange process, and thin film lithium niobate is used to make optical waveguides by dry etching process. When the external electric field changes, the refractive index of the lithium niobate material will change linearly accordingly, causing the phase change of the light passing through the lithium niobate optical waveguide. Through t...

AI Technical Summary

Problems solved by technology

This method is costly, low yield, time-consuming and labor-intensive, and cannot achieve an accurate π / 2 static bias point, which affects the accuracy of electric field measurement

[0006] In addition, there are technologies to modulate the static bias point of the electro-optic sensor through active monitoring and feedback control methods. Not only is the electro-optic sensor system complex, but the introduction of active devices will cause power supply problems, which increases the impact of the electro-optic sensor on the original field. The interference of the electro-optic sensor reduces the anti-electromagnetic interference performance of the electro-optic sensor itself, and at the same time increases the possibility of the electro-optic sensor system being unstable.

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