Electrooptical sensor static bias point process correction method and electro-optical sensor
An electro-optic sensor and static bias technology, applied in the field of sensors, can solve the problems of reducing the anti-electromagnetic interference performance of electro-optic sensors, failing to realize the π/2 static bias point, increasing the interference of electro-optic sensors, etc., and achieving good size reduction characteristics and structure Simple, effective method
Pending Publication Date: 2022-05-10
TSINGHUA UNIV
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The invention discloses an electro-optical sensor static bias point process correction method and an electro-optical sensor, and the electro-optical sensor static bias point process correction method comprises the following steps: measuring the deviation between the static bias point of the electro-optical sensor and pi/2; and the effective refractive index of the optical waveguide is adjusted, so that the static bias point of the electro-optical sensor reaches pi/2. External voltage is applied to the two sides of the transition metal oxide resistive material to adjust the dielectric constant of the transition metal oxide resistive material, so that the effective refractive index of the optical waveguide is changed, the static bias point reaches pi/2, and difficult-to-avoid process errors in manufacturing of the electro-optical sensor are corrected; the external voltage can be removed after the adjustment is completed, and the dielectric constant of the transition metal oxide resistive material is not changed, so that the effective refractive index of the optical waveguide is not changed, and the technology is passive; the transition metal oxide resistive material has a continuous light adjusting function, and the dielectric constant is continuously changed under excitation of different voltages, so that different application requirements are met.
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