Preparation process for physics vapour phase deposition of ultrathin self-suporting polyimide filter film

Abstract

The invention provides a method of preparation ultrathin self-supporting polyimide light sieving film. Using completely PVD method, successively depositing doffing pellicle twain anhydride and diamine on the polishing glass substrate in the high vacuum environment, and then processing heat treatment in proper surrounding temperature., make sure twain anhydride and diamine form polymeric amic acid, and more ring-imidization. Sticking the orbicular copper frame on the surface of polyimide thin film, followed by removing the film in the deionized water, finally form the ultrathin self-supporting polyimide light filter film. The thin film could be applied as the light filter component of shortwave optics.

Description

technical field [0001] The invention relates to a physical vapor deposition preparation method of ultra-thin self-supporting polyimide filter film in the fields of thin film physics, material science, short-wavelength optics, astronomy, remote sensing, molecular biomedical engineering, and microelectronics. Background technique [0002] Similar to the traditional visible light band, the development of short-wavelength optics requires corresponding optical components, and filter films are one of the important optical components. High-resolution short-wavelength cameras, X-ray imaging spectrometers, and soft X-ray laser imaging experiments and applications in space exploration all require devices that can pass a certain proportion of short-wavelength X-rays and filter out stray light outside the passband. Filter film. In these applications, the optical filter is required to be flat and smooth, uniform in thickness, good in environmental stability, and excellent in filtering s...

AI Technical Summary

Problems solved by technology

[0013] The disadvantages of the LB method are: due to external pressure and molecular repulsion, there are relatively many defects; the molecular structure must be an amphiphilic molecule, and the application range is narrow; physical adsorption has low stability; a special film stretching machine is required, and the cost high

However, so far, the polyimide film prepared by physical vapor deposition method is attached to the substrate, and the substrate is not peeled off to become a self-supporting film.

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