Capillary pump cooler with micro-groove wing structure and its manufacturing method
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Applications(China)
- Current Assignee / Owner
- SOUTH CHINA UNIV OF TECH
- Publication Date
- 2006-07-12
- Estimated Expiration
- Not applicable · inactive patent
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Abstract
Description
technical field
[0001] The invention relates to a cooling technology, especially a cooling technology for electronic chips. Specifically, it adopts the principle of phase change for heat transfer, and is mainly used for heat dissipation of microelectronic chips to solve the problem of thermal diffusion of microelectronic chips under the condition of high heat flux density. A capillary pump cooling device with a micro-groove fin structure and a manufacturing method thereof. Background technique
[0002] With the rapid development of microelectronics technology, electronic products tend to develop in the direction of high performance, portability and miniaturization. The improvement of main frequency and integration of microprocessor chips has led to the problem of high heat flux, which has become the primary problem restricting the development of high-integration chip technology. For chips with high heat flux density, if the generated heat cannot be exported in time, the hea...