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Organic thin-film transistor and method for manufacturing organic thin-film transistor

a technology of organic thin film transistors and organic semiconductor layers, applied in transistors, thermoelectric devices, solid-state devices, etc., can solve problems such as complicated constitution of semiconductor elements, and achieve the effect of increasing the mobility of the carrier layer and increasing the mobility of the organic semiconductor layer

Inactive Publication Date: 2006-03-23
KONICA MINOLTA INC
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Benefits of technology

[0055] It is necessary that in the organic thin-film transistor of the invention, a phase transition temperature (° C.) of at least one of the organic semiconducting materials used is not more than a glass transition point (° C.) of at least one of resins constituting a support described later in obtaining the effects of the invention that the organic thin-film transistor has a high carrier (electron or hole) mobility and can employ conventional plastic materials or transparent resins as materials for the support.
[0056] The term, “a phase transition temperature of organic semiconducting materials”, herein referred to implies a melting point, a softening point, a secondary transition temperature (fro example, a glass transition point), or a phase transition point to liquid crystal phase. The phase transition temperature (liquid phase transition point) of the organic semiconducting materials used in the invention is preferably from 100 to 240° C.
[0057] It is especially preferred that the melting point or liquid phase transition point of the organic semiconducting materials is not more than a glass transition point (° C.) of at least one of resins constituting the support.
[0058] The melting point can be measured through an automatic melting point apparatus available on the market, and the phase transition point can be measured through a differential scanning calorimeter (DSC) available on the market. The phase transition behavior can be observed through a polarization microscope (POM). The higher order structure; relationship between crystallinity or liquid crystallinity and the molecular structure can be analyzed through X-ray diffraction (XRD). <<Forming Method of Organic Semiconductor Layer (Organic Thin-Film)>>
[0059] The methods for forming the organic semiconductor layer include a vacuum deposition method, a molecular beam epitaxial growth method, an ion cluster beam method, a low energy ion beam method, an ion plating method, a CVD method, a sputtering method, a plasma polymerization method, an electrolytic polymerization method, a chemical polymerization method, a spray coating method, a spin coating method, a blade coating method, a dip coating method, a casting method, a roll coating method, an bar coating method, a die coating method, an ink-jet method, and an LB method. These methods may be used according to kinds of materials used.
[0060] However, of these, the spin coating method, blade coating method, dip coating method, roll coating method, bar coating method, die coating method and ink-jet method are preferred from the viewpoint of productive efficiency, which can simply and accurately form the layer employing a solution of organic semiconductor materials. Further, an organic semiconductor layer may be formed, jetting a solution or dispersion of the organic semiconductor by ink jet and drying.

Problems solved by technology

Further, this requires a process of forming an orientation film adjacent to the semiconductor layer, which complicates constitution of a semiconductor element.

Method used

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  • Organic thin-film transistor and method for manufacturing organic thin-film transistor
  • Organic thin-film transistor and method for manufacturing organic thin-film transistor
  • Organic thin-film transistor and method for manufacturing organic thin-film transistor

Examples

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Effect test

example 1

[0097] Organic thin-film transistor samples 1 through 11 were prepared as described below.

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[0098] The organic thin-film transistor sample 1 was prepared according to the following procedures.

[0099] A 300 nm thick and 300 μm wide aluminum layer as a gate electrode was formed on a 100 μm thick PES film (FS-1300, produced by Sumitomo Bakelite Co., Ltd.) as a support according to a sputtering method. The glass transition temperature of the PES film measured by means of DSC was 228° C.

[0100] The resulting film was subjected to anodizing treatment in an aqueous 30% by weight sulfuric acid solution in which direct electric current was supplied from a 30V low voltage power source for 2 minutes to form an anodization film with a thickness of 120 nm, subjected to vapor sealing treatment in a vapor saturated chamber at one atmosphere and at 100° C., and coated with a solution of polyimide 5221 (produced by Nissan Kagaku Co., Ltd.) employing an applicator to form a 50 nm thick polyimide laye...

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Abstract

Disclosed are an organic thin-film transistor and a manufacturing comprising thereof, the organic thin-film transistor comprising a support and provided thereon, a gate electrode, an insulation layer, a source electrode, a drain electrode, and an organic semiconductor layer, the support comprising at least one of resins, and the organic semiconductor layer containing at least one of organic semiconductor materials, wherein a phase transition temperature of one of the organic semiconducting materials is not more than a glass transition point of one of the resins.

Description

FIELD OF THE INVENTION [0001] The present invention relates to an organic thin-film transistor and a manufacturing method thereof. BACKGROUND OF THE INVENTION [0002] In recent years, an organic thin-film transistor employing an organic semiconducting compound as a semiconductor channel has been studied. The organic semiconducting compound is easy in processing and high affinity to a plastic sheet support, as compared with an inorganic semiconducting compound, and therefore, is preferred in its application to a thin-film device. [0003] There is, for example, description in Japanese Patent O.P.I. Publication Nos. 9-232589 and 7-206599 that an orientation film increases carrier mobility in an organic semiconductor layer. [0004] Further, there is proposed technique in WO 0079617 that mobility of an organic semiconductor channel is increased by orientation treatment of the semiconductor which employs mesomorphism produced on heating a semiconducting polymer to not less than the a tempera...

Claims

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Application Information

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Patent Type & Authority Applications(United States)
IPC IPC(8): H01L29/08H01L29/786H10K99/00
CPCH01L51/00H01L51/0002H01L51/0036H01L51/0545H01L51/0043H01L51/0541H01L51/0039H10K71/10H10K85/115H10K85/113H10K85/151H10K10/464H10K10/466H10K99/00
Inventor HIRAI, KATSURA
Owner KONICA MINOLTA INC