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Nanometer micro-electrode and making method

A fabrication method and nano-electrode technology, which are applied in TV, microstructure technology, microstructure devices, etc., can solve problems such as complex and expensive equipment, and achieve the effects of simple fabrication method, improved electrical performance, and reduced fabrication cost.

Inactive Publication Date: 2008-11-19
SHANGHAI INST OF MICROSYSTEM & INFORMATION TECH CHINESE ACAD OF SCI
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

However, in this method, the growth of carbon nanotubes on the electrode surface needs to be completed at a high temperature of 700°C-800°C, and complex and expensive equipment is required, and its application has certain limitations.

Method used

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  • Nanometer micro-electrode and making method

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Embodiment 1

[0023] Below in conjunction with accompanying drawing, adopt polyimide as insulating material, gold as nano-conductive material and metallic material, further illustrate the concrete feature of the present invention, it should be noted that insulating material, conductive material and metallic material are not limited to this embodiment Those skilled in the art can choose different materials according to the actual situation. For example, the insulating material can be parylene, etc., the conductive material can be platinum, silver, copper or carbon nanotubes, and the metal material can be silver.

[0024] The preparation method of nano microelectrode of the present invention mainly comprises the following steps:

[0025] First, if figure 1 As shown, on one surface of a cleaned and polished aluminum sheet, the first insulating layer with site windows for making nano-electrodes is formed by spin-coating photosensitive polymer or vapor deposition insulating material, combined wi...

Embodiment 2

[0034] The manufacture method of another nanometer microelectrode of the present invention mainly comprises steps:

[0035] First, a high-molecular organic film is irradiated with high-energy heavy ions to form columnar damage regions with diameters ranging from several nm to tens of nm, which are also called latent tracks of ions.

[0036] Next, put the polymeric organic film with the columnar damaged area in an etching solution to etch to form a micropore array with a diameter ranging from a dozen nm to several μm. This kind of film with a micropore array is called a nuclear pore membrane. . For example, using polycarbonate as a film material, after high-energy heavy ion radiation, it can be etched in a 2-10mol / l NaOH solution to form a nanopore template.

[0037] Next, metals, inorganic salts, or semiconductor materials are filled into the microwell arrays by physical and chemical methods (such as electron beam evaporation, thermal evaporation, sputtering, electrochemical ...

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Abstract

The invention relates to a nanometer microelectrode and a manufacturing method thereof. The method comprises the steps of forming a first insulation layer with site windows for manufacturing a nanometer electrode on one surface of an aluminum sheet; forming aluminum oxide nanometer holes at the site windows by using the electrochemical method; filling a conductive material into the aluminum oxide nanometer holes to form a nanometer electrode, and depositing a metal layer on the surface of the first insulation layer via a Lift-off method or pattern etching method to form a patterned metal layer including metal connection lines and metal welding sites of the nanometer electrode; forming a second insulation layer with soldering point windows on the patterned metal layer and placing the soldering point windows at metal soldering sites; and forming the nanometer microelectrode with a three-layer structure composed of insulating material, metal and insulating material by etching the aluminum sheet using chemical corrosion or electro-chemical corrosion. With the invention, the effective area of the nanometer microelectrode can be enlarged and manufacturing cost can be reduced.

Description

technical field [0001] The invention relates to a nanometer microelectrode and a manufacturing method thereof. Background technique [0002] At present, electrodes are widely used in the fields of electrophysiology, electrochemistry, environmental monitoring, and organ repair. In these application fields, the electrode acts as a bridge between the environment (usually a liquid phase environment) and the back-end processing circuit, and its performance directly affects the performance of the entire system. The development of the Micro-Electro-Mechanical System (MEMS) technology makes the electrodes develop towards miniaturization (micro-electrodes). Microelectrodes have many advantages, for example, (1) high spatial resolution; (2) less damage to the site; (3) high throughput of information; (4) using microelectrode arrays to interact with a large area of ​​the actual environment Wait. Due to the trend of miniaturization, the size of the electrode sites on the electrode is...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): B81B7/02B81C1/00G01N27/30
Inventor 李刚周洪波孙晓娜朱壮晖姚源赵建龙
Owner SHANGHAI INST OF MICROSYSTEM & INFORMATION TECH CHINESE ACAD OF SCI