Method for preparing tool and mold hard coating with binary evaporation source
A technology of hard coating and mold, which is applied in the field of hard coating preparation of tools and molds. It can solve the problems of narrow range of reactive evaporation materials, low ionization rate of reactive substances, low relative ionization rate, etc., and achieve high hardness. , solve the effect of narrow selection range and dense film structure
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Embodiment 1
[0039] Clean the M3 high-speed steel hob with CR metal degreasing agent and absolute alcohol in the ultrasonic wave, and then dry it; place the cleaned and dried mold in the coating chamber and vacuumize it to 5×10 -3 Pa; then at 3.5×10 -1 Under the protection of Pa argon gas, the heating power is 9KW, and the heating time is 120min; finally, the plasma power is 4KW, 2.0×10 -1 Argon gas of Pa, under the condition of substrate negative bias voltage 500V, clean for 20min.
[0040] Put the cleaned M3 high speed steel hob in 1.5×10 -1 Under the protection of Pa argon gas, the following steps and conditions are used to coat films sequentially: Heating with 1.2KW electron beam, using Ti as the evaporation source, at 10KW power, substrate negative bias voltage 400V, plating for 8min; passing through 0.4×10 -1 Pa nitrogen, continue to work together with the Ti evaporation source at a power of 10KW, the substrate negative bias is 200V, and plate for 10min; continue to heat the Ti eva...
Embodiment 2
[0042] The tungsten carbide CNC indexable inserts are first cleaned with CR metal degreasing agent and anhydrous alcohol in ultrasonic wave, and then dried; the cleaned and dried tools and molds are placed in the coating chamber and vacuumed to 4×10 -3 Pa; then at 2.5×10 -1 Under the protection of Pa argon gas, the heating power is 9KW, and the heating time is 100min; finally, the plasma power is 4KW, 1.8×10 -1 Argon gas of Pa, under the condition of substrate negative bias voltage 300V, clean for 10min.
[0043] Put the cleaned cemented carbide CNC indexable insert in 1.2×10 -1 Under the protection of Pa argon gas, the following steps and conditions are used to coat films sequentially: heating with a 1.2KW electron beam, using Ti as an evaporation source, at a power of 10KW, and a substrate negative bias of 200V, plating for 8min; passing through 0.3×10 -1 Pa nitrogen, continue to work with the Ti evaporation source at a power of 10KW, the substrate negative bias voltage 13...
Embodiment 3
[0045] Clean the tungsten carbide PCB drill bit with CR metal degreasing agent and anhydrous alcohol in ultrasonic wave, and then dry it; place the cleaned and dried mold in the coating chamber and vacuumize it to 3×10 -3 Pa; then at 2.5×10 -1 Under the protection of Pa argon gas, the heating power is 7KW, heating for 40min; finally, the plasma power is 4KW, 1.8×10 -1 Argon gas of Pa, under the condition of substrate negative bias voltage 200V, clean for 5 minutes.
[0046] Put the cleaned hard alloy PCB drill bit in 1.5×10 -1 Under the protection of Pa argon gas, the following steps and conditions are used to coat films sequentially: Heating with 1.2KW electron beam, using Ti as the evaporation source, at 7.5KW power, substrate negative bias voltage 100V, plating for 5min; passing through 0.2×10 -1 Pa nitrogen, continue to work together with the Ti evaporation source at a power of 7.5KW, a negative substrate bias of 100V, and plate for 5 minutes; continue to heat the Ti eva...
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