Carbon-carbon composite guide cylinder of CZ silicon crystal growing furnace and preparation method thereof

A technology of carbon composite materials and guide tubes, which is applied in the direction of crystal growth, single crystal growth, chemical instruments and methods, etc., can solve the problems of affecting service life, increased consumption of guide tube materials, frequent replacement, etc., and achieve good heat preservation Excellent performance and thermal shock resistance, reduced consumption of raw materials, and remarkable effects of energy saving and material saving

Inactive Publication Date: 2010-06-02
HUNAN NANFANG BOYUN NOVEL MATERIAL
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

Due to the low strength of graphite products, poor high-temperature thermal shock performance, high thermal conductivity, and short service life, it is generally used for about 2 months, frequently replaced, and low in purity; The size of the guide tube also increases accordingly. Therefore, the material consumption of the graphite guide tube increases, the yield rate of the processing process is low, and it is easy to be damaged during transportation, handling, and use. Requirements for the performance and reliability of the draft tube
[0003] Chinese Patent Application No. 200610043187.9 discloses "Preparation method of thermal field carbon/carbon guide tube fo

Method used

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  • Carbon-carbon composite guide cylinder of CZ silicon crystal growing furnace and preparation method thereof
  • Carbon-carbon composite guide cylinder of CZ silicon crystal growing furnace and preparation method thereof

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Embodiment Construction

[0024] The present invention will be further described below in conjunction with embodiment.

[0025] Referring to Fig. 1, the embodiment of the carbon-carbon composite guide cylinder of the present invention is composed of a surface silicon carbide coating 1, a carbon-carbon composite material surface layer 2 and a carbon-carbon composite material central layer 3; the carbon-carbon composite material surface layer The apparent density is 1.5g / cm 3 ; The apparent density of the carbon-carbon composite center layer is 0.4g / cm 3 .

[0026] Taking the operation steps of making a carbon-carbon composite guide tube with an inner diameter of Φ260mm at one end, an inner diameter of the other end of Φ452mm, and a height of 370mm as an example, the preparation method of the carbon-carbon composite guide tube of the present invention will be further described in detail:

[0027] (1) Make a top diameter Φ260mm, a bottom diameter Φ452mm, and a frustum-shaped graphite mold with a height ...

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Abstract

The invention discloses a carbon-carbon composite guide cylinder of a CZ silicon crystal growing furnace and a preparation method thereof. The cylinder body of the carbon-carbon composite guide cylinder of the CZ silicon crystal growing furnace consists of a surface coating, a carbon-carbon composite layer and a carbon-carbon composite central layer. The preparation method of the carbon-carbon composite guide cylinder comprises the following steps: (1) designing and manufacturing a mold of the guide cylinder; (2) designing the shape and size of carbon fiber felt and cutting and blanking according to the size; (3) preparing a blank; (4) curing the blank; (5) performing CVD densification; (6) demolding the guide cylinder and polishing the surface of the guide cylinder; (7) performing secondary CDV densification; (8) machining the end parts of the guide cylinder and finishing the rest surface of the guide cylinder; (9) subjecting the finished guide cylinder to surface anti-oxidization, anti-erosion and anti-corrosion coating processing; and (10) subjecting the guide cylinder to drying and high-temperature purification processing. The guide cylinder product of the invention has the advantages of high service reliability, long service life and convenient replacing operation; and the preparation method can improve the rate of finished crystals and reduce the energy consumption of crystal pulling by about 10 percent.

Description

technical field [0001] The invention relates to a CZ silicon crystal growth furnace guide tube and a preparation method thereof, in particular to a CZ silicon crystal growth furnace carbon-carbon composite integral guide tube and a preparation method thereof. Background technique [0002] About 85% of monocrystalline silicon is produced by CZ Czochralski method. The size of silicon crystal rods is becoming larger and larger. In order to ensure the quality of silicon crystals, save energy, and reduce carbon dioxide emissions, the thermal field of silicon crystal growth furnaces generally uses guide tubes. The guide tube mainly acts as a guide for high-temperature gas. Therefore, it is required to have good heat resistance and certain mechanical properties; There is an appropriate temperature gradient along the axial direction between the rod and the silicon liquid in the crucible. At present, the guide tube of CZ silicon crystal growth furnace is mostly a combined guide tub...

Claims

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Application Information

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IPC IPC(8): C30B15/00C30B35/00
Inventor 蒋建纯陈志军肖志英曹卫
Owner HUNAN NANFANG BOYUN NOVEL MATERIAL
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