Solar spectrum selective absorbing coating and preparation method thereof

A technology of absorbing coating and solar spectrum, applied in the field of solar heat utilization materials, can solve the problems of low oxidation resistance and low use temperature, and achieve the effect of low cost and simple preparation method

Active Publication Date: 2011-07-13
GRIMAT ENG INST CO LTD
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0010] The object of the present invention is to provide a solar spectrum selective absorption coating with a high service temperature and a preparation method thereof, so as to overcome the defects of low service temperature and non-oxidation resistance of the existing coating, so as to meet the high-temperature heat utilization of solar energy The needs of the development of the material field, and its manufacturing process is simple and easy to master

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  • Solar spectrum selective absorbing coating and preparation method thereof
  • Solar spectrum selective absorbing coating and preparation method thereof
  • Solar spectrum selective absorbing coating and preparation method thereof

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preparation example Construction

[0043] The preparation method of the solar spectrum selective absorption coating of the present invention comprises the following steps:

[0044] (1) Base material Before placing in the vacuum chamber, ultrasonically place the base material in acetone, detergent, deionized water, gasoline, and ethanol for 5 to 30 minutes, and dry; after placing in the vacuum chamber, bake at 100 to 150 degrees Celsius 10-30 minutes, the surface is bombarded with argon ions for 30-60 minutes before sputtering;

[0045] (2) Using a TiAl alloy target (or Ti and Al pure metal target), reactive sputtering in a mixed atmosphere of argon and nitrogen, depositing the first diffusion barrier layer on the above substrate to increase the bonding force of the film layer, by adjusting The ratio of nitrogen and argon in the barrier layer is used to obtain low infrared emissivity and better binding force;

[0046] (3) Using an Al target or a copper target, deposit a pure metal high infrared reflective layer...

Embodiment 1

[0055] Using Ti, Al and Cu three-metal targets, and silicon targets, by figure 1 It can be seen that the solar selective absorbing coating of the present invention is divided into 8 layers from the base 1 from bottom to top, which are successively the first diffusion barrier layer 2, the infrared high reflection layer 3, the second diffusion barrier layer 4, and the high nitride conductive particles. Volume ratio absorption layer 5 , low nitride conductive particle volume ratio absorption layer 6 , third diffusion barrier layer 7 , antireflection layer 8 and protection layer 9 .

[0056] Introduce argon gas and nitrogen gas with flow rates of 140SCCM and 20SCCM respectively, use Ti target and Al target for reactive sputtering, the sputtering power of Ti and Al target is 1200w and 800w respectively, to form the first diffusion barrier layer 2 composed of TiAlN, The thickness of this layer is 10 nm;

[0057] The Cu target was non-reactively sputtered in argon to form a Cu thin ...

Embodiment 2

[0066] Using two targets of TiAl alloy and metal Al, as well as a silicon target, by figure 1 It can be seen that the solar selective absorbing coating of the present invention is divided into 8 layers from the base 1 from bottom to top, which are successively the first diffusion barrier layer 2, the infrared high reflection layer 3, the second diffusion barrier layer 4, and the high nitride conductive particles. Volume ratio absorption layer 5 , low nitride conductive particle volume ratio absorption layer 6 , third diffusion barrier layer 7 , antireflection layer 8 and protection layer 9 .

[0067] A TiAl alloy target is reactively sputtered in a mixed gas of argon and nitrogen, the flow rates of argon and nitrogen are 150SCCM and 10SCCM respectively, and the sputtering power of the TiAl target is 1200w to form the first diffusion barrier layer 2 composed of TiAlN. The thickness is 10nm;

[0068]The Al target was non-reactively sputtered in argon to form an Al thin film, th...

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Abstract

The invention provides a solar spectrum selective absorbing coating and a preparation method thereof, wherein the preparation method comprises the following steps of: (1): selecting copper or stainless steel as substrate material; (2): selecting high-temperature oxidation resisting TiAlN as a diffusion impervious layer, using pure metal Cu or Al as a high infrared reflective layer, wherein an absorbing layer consists of two conductive particle-ceramic (AlN) composite layers with different volume percentages of metal nitride conductive particle (TiAlN), using AlN as an antireflection layer, and using SiO2 as a protective layer; (3): controlling components and contents of different film materials by controlling the gas flow and the sputtering power and the like; (4): before placing the substrate material into a vacuum chamber, carrying ultrasound treatment on the substrate material for 10-30 min, drying, after placing the substrate material into the vacuum chamber, roasting for 10-30 min at 100-120 DEG C, before sputtering, bombarding the surface by argon ions; and (5): obtaining a coating with a multi-layer structure, which has high absorption rate Alpha (0.95 +/- 0.02) in the solar spectral region (0.3-2.5 micrometers), and which has quite low emissivity Epsilon (0.04 +/- 0.01) in an infrared region (2.5-50 micrometers).

Description

technical field [0001] The invention belongs to the technical field of solar heat utilization materials, in particular to a medium-high temperature solar spectrum selective absorption coating mainly composed of metal nitrides and with a diffusion barrier layer prepared by magnetron reactive sputtering technology. The coating has good spectral selective absorption characteristics and good high-temperature structural stability. The coating can be used in heat collecting tubes for trough solar thermal power generation and non-vacuum flat plate heat collectors. Background technique [0002] Solar selective absorbing coatings are characterized by high absorptivity α in the solar spectral range (0.3-2.5 microns) and low emissivity ε in the infrared region (2.5-50 microns). It can convert low-energy-density solar energy into high-energy-density thermal energy, enrich solar energy, and improve solar-thermal conversion efficiency. It is an important content in the research work of s...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G02B1/10C23C14/06C23C14/35G02B1/11G02B1/14
CPCF24S70/225Y02E10/40
Inventor 郝雷杜淼刘晓鹏王树茂蒋利军吕芳李志念米菁
Owner GRIMAT ENG INST CO LTD
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