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Array raster waveguide type wavelength division multiplexer

A wavelength division multiplexer and array grating technology, applied in the field of integrated optics, can solve the problems of high production cost, difficult design, process, and packaging, and achieve the effects of low cost, light weight and high integration.

Inactive Publication Date: 2014-10-15
宜兴新崛起光集成芯片科技有限公司
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AI Technical Summary

Problems solved by technology

Fiber Bragg gratings are usually produced by phase mask and holographic exposure methods. Although fiber Bragg gratings have low insertion loss, insensitivity to polarization, and good spectral response characteristics, their design, process, and packaging are more difficult and their production costs are higher.

Method used

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  • Array raster waveguide type wavelength division multiplexer
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  • Array raster waveguide type wavelength division multiplexer

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specific Embodiment approach

[0045] The present invention is made by adopting the semiconductor processing technology and process of silicon-based deposited silicon dioxide, such as Figure 3-9 As shown in the schematic diagram of the cross-sectional structure of the planar optical waveguide, it is composed of a silicon-based wafer (11), a liner (12), a waveguide optical core (13) and a cladding layer (16). The process steps are:

[0046] 1. adopt plasma vapor deposition method, on silicon-based wafer (11), deposit liner (12), as Figure 3-2 shown

[0047] 2. adopt plasma vapor deposition method, on liner (12), deposit waveguide optical core (13), as Figure 3-3 shown

[0048] 3. After high-temperature annealing, sputter a layer of chromium (14) on the waveguide optical core (13), such as Figure 3-4 shown

[0049] 4. Coat a layer of photoresist, and complete the photolithography of photoresist by photolithography machine under the mask to form a photoresist image, such as Figure 3-5 shown

[0050]...

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Abstract

The invention relates to the technical field of integrated optics, and provides an array raster waveguide type wavelength division multiplexer which is based on the planar optical waveguide technology. The semiconductor silicon-based silicon dioxide plane fabrication process is adopted. A front slab waveguide having the free focusing function, a rear slab waveguide having the free focusing function and a middle group of planar array waveguide form an integrated light path. The two-way reversible type single-path / multichannel intensive multichannel input and output ports and the wavelength division multiplexing / demultiplexing function can be realized. The photoelectric integration integrated module metal shell packaging form is adopted. A built-in automatic constant temperature control device is adopted. The temperature stability of the planar integrated array waveguide raster can be effectively improved. The optical device not only has advantages of compact structure, high integration degree, small size, light weight and stable and reliable performance, but also has advantages of mature and stable fabrication process, large batch production, high production efficiency and low cost, and is suitable for being used in a wavelength division multiplexing system of a backbone network, a metropolitan area network and an access network of optical communication.

Description

technical field [0001] The invention is an array grating waveguide type wavelength division multiplexer (WDM), which belongs to the technical field of integrated optics. Background technique [0002] The existing traditional wavelength division multiplexers mainly include optical dielectric film narrowband filters and fiber grating filters. [0003] The basic principle of the optical dielectric thin film narrowband filter is based on the traditional F-P cavity interference filter, which usually adopts a multi-cavity structure (3 to 5 cavities) to achieve flat-top spectral response characteristics and a better quality factor, but due to the , the number of layers of optical film is as many as hundreds of layers, which brings great difficulty to the design, manufacture and test of multi-cavity optical dielectric thin film narrow-band filter. The control and thermal expansion characteristics of the substrate material and the subsequent optical cutting and polishing are very de...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G02B6/293G02B6/122
Inventor 陈谷红
Owner 宜兴新崛起光集成芯片科技有限公司
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