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Polishing solution for processing ultra-smooth bearing steel surface and application thereof

A polishing fluid, bearing steel technology, applied in the material field to achieve the effect of low defect count, high removal rate, and low surface roughness

Active Publication Date: 2015-01-21
TSINGHUA UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

However, the current technical means are difficult to achieve ultra-smooth bearing steel surface with nano-scale surface roughness

Method used

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  • Polishing solution for processing ultra-smooth bearing steel surface and application thereof
  • Polishing solution for processing ultra-smooth bearing steel surface and application thereof
  • Polishing solution for processing ultra-smooth bearing steel surface and application thereof

Examples

Experimental program
Comparison scheme
Effect test

experiment example 1

[0045] Polishing liquid formula: 4wt% colloidal silicon dioxide, 0.75wt% glycine, and water as the balance, using nitric acid and potassium hydroxide to adjust the pH value to 2.0-10.0;

[0046] Polishing step: During chemical mechanical polishing, such as figure 1 As shown, the polishing liquid is continuously added to the polishing pad at a certain flow rate, and the sample on the polishing head is in contact with the polishing pad under the applied pressure, and the polishing pad and the sample rotate in the same direction to continuously replenish the polishing liquid to the contact area. The surface material is planarized and removed under the synergistic action of the chemical reaction of the polishing fluid and mechanical grinding, thereby achieving local and global planarization. It is worth noting that the above usage method is based on the traditional polishing machine. For a special polishing machine system, the execution method can be adjusted reasonably according ...

experiment example 2

[0053] Polishing liquid formula: 4wt% colloidal silicon dioxide, 1.05wt% serine or 0.75wt% glycine or 0.9wt% oxalic acid, the balance is water, and the pH value is adjusted to 4.0 with nitric acid and potassium hydroxide;

[0054] Polishing steps: the same as in Experimental Example 1, and the test results are shown in Table 3.

[0055] Table 3 test results

[0056]

[0057] It can be seen that after adding the metal complexing agent, the removal rate of bearing steel material is significantly increased, but the surface quality is deteriorated. By comparison, it was found that after adding aminoacetic acid, the material removal rate of bearing steel increased greatly, and the surface roughness increased the least. Therefore, aminoacetic acid is preferred as the metal complexing agent.

experiment example 3

[0059] Polishing liquid formula: 4wt% colloidal silicon dioxide, 0-1wt% hydrogen peroxide, 0.75wt% glycine, the balance is water, and adjust the pH value to 4.0 with nitric acid and potassium hydroxide;

[0060] Polishing steps: the same as in Experimental Example 1, and the test results are shown in Table 4.

[0061] Table 4 test results

[0062]

[0063] It can be seen that as the mass fraction of hydrogen peroxide increases, the static corrosion rate of bearing steel gradually decreases, the material removal rate first increases sharply and then decreases gradually, and the surface quality gradually improves, indicating that hydrogen peroxide has an important influence on the polishing performance of bearing steel.

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Abstract

The invention discloses a polishing solution for processing an ultra-smooth bearing steel surface and application thereof. The polishing solution comprises 0.01-40 wt% of grinding particle, 0-10 wt% of oxidizer, 0.1-10 wt% of metal complexing agent, 0-5 wt% of metal corrosion inhibitor and the balance of water. The grinding particle is selected from at least one of monocrystal diamond, polycrystalline diamond, aluminum oxide, zirconium dioxide, titanium dioxide, cerium oxide, fumed silica and colloidal silicon dioxide; the oxidizer is selected from at least one of periodate, iodate, perchlorate, persulfate and hydrogen peroxide; the metal complexing agent is selected from at least one of ammonia, amino acid and organic acid; and the metal corrosion inhibitor is selected from at least one of nitrogen-containing heterocycle derivatives, sulfur-containing heterocycle derivatives and heterocycle derivatives simultaneously containing nitrogen and sulfur. The bearing steel obtained by using the polishing solution has the functional characteristics of low surface roughness and low number of defects, and thus, can be used in precise devices.

Description

technical field [0001] The invention belongs to the technical field of materials, and in particular, the invention relates to a polishing liquid for processing the surface of ultra-smooth bearing steel and its application. Background technique [0002] Because bearing steel (such as GCr15 bearing steel) has excellent mechanical properties and is easy to produce, it is widely used in the field of machinery manufacturing. The surface quality of bearing steels has a critical impact on the functional properties of engineered components, such as coefficient of friction and wear resistance. In recent years, the industry's demand for precision devices using bearing steel as a raw material has gradually increased. In order to achieve satisfactory device functional properties, bearing steels are required to have low surface roughness and a low number of defects. However, it is difficult to achieve ultra-smooth bearing steel surfaces with nanoscale surface roughness by current techn...

Claims

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Application Information

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IPC IPC(8): C09G1/02
CPCC23F3/04
Inventor 江亮雒建斌何永勇
Owner TSINGHUA UNIV
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