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A barium calcium zirconate titanate film with a seed layer and its preparation method and application

A barium calcium zirconate titanate and seed layer technology, which is applied in the manufacture/assembly of piezoelectric/electrostrictive devices, piezoelectric/electrostrictive/magnetostrictive devices, electrical components, etc., can solve the problems of poor repeatability, Easy to crack, not suitable for preparation of thickness, etc., to achieve high flatness, good uniformity, and improve piezoelectricity and dielectric properties

Inactive Publication Date: 2019-03-01
LIAOCHENG UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

However, this method also has its own shortcomings that are difficult to overcome, such as poor repeatability, easy cracking, and not suitable for preparing films with a thickness greater than 1 μm.

Method used

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  • A barium calcium zirconate titanate film with a seed layer and its preparation method and application
  • A barium calcium zirconate titanate film with a seed layer and its preparation method and application
  • A barium calcium zirconate titanate film with a seed layer and its preparation method and application

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0040] On Pt / Ti / SiO 2 After preparing an 8nm seed crystal layer on the / Si substrate, a barium calcium zirconate titanate piezoelectric thin film was prepared.

[0041] a) Press Ba 0.92 Ca 0.08 Ti 0.95 Zr 0.05 o 3 The stoichiometric ratio of the elements in the medium Weigh the raw materials: barium acetate, calcium acetate, titanium isopropoxide and zirconium propoxide, dissolve the raw materials in acetic acid and ethylene glycol ether, and use acetylacetone as the complexing agent to prepare the precursor solution 1 and the precursor Body solution two, the concentration of the precursor solution one is 0.05M, the concentration of the precursor solution two is 0.2M, acetic acid accounts for 60% of the volume of the precursor solution, and ethylene glycol ether accounts for 30% of the volume of the precursor solution , Ba 0.92 Ca 0.08 Ti 0.95 Zr 0.05 o 3 The molar ratio with acetylacetone is 1:1; After standing for 24 hours, it is used to prepare barium calcium zirc...

Embodiment 2

[0047] After preparing a 20-nanometer seed layer on a single-crystal Si substrate, barium calcium zirconate titanate piezoelectric thin films were fabricated.

[0048] a) Press Ba 0.99 Ca 0.01 Ti 0.98 Zr 0.02 o 3 The stoichiometric ratio of the elements in the medium Weigh the raw materials: barium nitrate, calcium nitrate, tetrabutyl titanate and zirconium isopropoxide, dissolve the raw materials in acetic acid and ethylene glycol ether, and prepare the precursor solution with acetylacetone as the complexing agent. and precursor solution two, the concentration of the precursor solution one is 0.1M, the concentration of the precursor solution two is 0.3M, acetic acid accounts for 55% of the volume of the precursor solution, and ethylene glycol ether accounts for 50% of the volume of the precursor solution 40%, Ba 0.99 Ca 0.01 Ti 0.98 Zr 0.02 o 3 The molar ratio with acetylacetone is 1:1.5; after standing for 24 hours, it is used to prepare barium calcium zirconate tit...

Embodiment 3

[0056] In single crystal SrTiO 3 After preparing a 30nm seed crystal layer on the substrate, a barium calcium zirconate titanate piezoelectric thin film is prepared.

[0057] a) Press Ba 0.84 Ca 0.16 Ti 0.90 Zr 0.10 o 3 The stoichiometric ratio of the elements in the medium Weigh the raw materials: barium acetate, calcium acetate, titanium isopropoxide and zirconium propoxide, dissolve the raw materials in acetic acid and ethylene glycol methyl ether, use acetylacetone as the complexing agent to prepare the precursor solution one and Precursor solution two, the concentration of the precursor solution one is 0.15M, the concentration of the precursor solution two is 0.3M, acetic acid accounts for 60% of the volume of the precursor solution, and ethylene glycol methyl ether accounts for 60% of the volume of the precursor solution. 35%, Ba 0.84 Ca 0.16 Ti 0.90 Zr 0.10 o 3 The molar ratio with acetylacetone is 1:2; After standing for 24 hours, it is used to prepare barium...

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Abstract

The invention belongs to the field of functional materials and devices, and in particular relates to a barium calcium zirconate titanate film with a seed layer and a preparation method thereof. The barium calcium zirconate titanate film comprises a substrate layer, a seed layer and a film layer, the seed layer is between the substrate layer and the film layer, and the general chemical formula of the seed layer and the film layer is Ba (1‑x) Ca x Ti (1‑y) Zr y o 3 , where x=0.01~0.16, y=0.02~0.12. The preparation method uses a low-concentration precursor solution to prepare a seed layer, and then uses a high-concentration precursor solution to prepare a barium calcium zirconate titanate film, which solves the problem of cracking in the preparation process of the barium calcium zirconate titanate film, and improves the lead-free film. Excellent piezoelectricity and dielectric properties, low cost and controllability, the prepared barium calcium zirconate titanate film with seed layer has high flatness, good uniformity, no cracks, and high quality, making it suitable for use in microelectromechanical systems , Ferroelectric storage systems or multifunctional integrated devices have been practically applied.

Description

technical field [0001] The invention belongs to the field of functional materials and devices, and in particular relates to a barium calcium zirconate titanate thin film with a seed layer, a preparation method and application thereof. Background technique [0002] Piezoelectric ferroelectric materials are widely used in information detection, conversion, processing, display and storage, etc., and are important high-tech functional materials, but currently the dominant piezoelectric material is still lead with a lead content of up to 70%. The base piezoelectric material is lead zirconate titanate (PZT). Lead-based materials cause serious harm to the ecological environment and human health in the process of preparation, use and disposal. Therefore, the development of lead-free piezoelectric ferroelectric materials is one of the urgent tasks related to the sustainable development of electronic technology in my country. In the 1990s, with the development of micromachining techn...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): H01L41/187H01L41/43H10N30/853H10N30/097
CPCH10N30/8536H10N30/097
Inventor 李伟朱彦杨松李如月徐志军初瑞清沈圳仪鹏
Owner LIAOCHENG UNIV