Ultraviolet imprint lithography fabricating method of micro-hole array cancer cell detecting chip

A detection chip and manufacturing method technology, applied in microstructure technology, microstructure device, microlithography exposure equipment, etc., can solve the problem of low detection accuracy, poor controllability, low efficiency, etc. problem, to achieve the effect of low processing cost, low price and high detection accuracy

Inactive Publication Date: 2016-11-16
CHONGQING INST OF GREEN & INTELLIGENT TECH CHINESE ACADEMY OF SCI
View PDF7 Cites 1 Cited by
  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0004] Aiming at the deficiencies in the above-mentioned background technology, the present invention provides a method for manufacturing a microvia array cancer cell detection chip by ultraviolet imprinting based on a polymer material, thereby solving the problem of the low efficiency of the existing method for manufacturing a microvia array cancer cell detection chip. Low, poor controllability, the prepared micro-via array cancer cell detection chip has low detection accuracy and high cost, providing an effective solution for the early detection of cancer cells

Method used

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
View more

Image

Smart Image Click on the blue labels to locate them in the text.
Viewing Examples
Smart Image
  • Ultraviolet imprint lithography fabricating method of micro-hole array cancer cell detecting chip
  • Ultraviolet imprint lithography fabricating method of micro-hole array cancer cell detecting chip

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0028] This embodiment provides a method for making a micro-via array cancer cell detection chip by ultraviolet imprinting. A modified transfer printing uv adhesive material is used as the photosensitive material layer, and the embossing substrate is aluminum foil to make a micro-via array cancer cell detection chip. The specific implementation steps are as follows:

[0029] (1) Fabrication of an imprint stamp, that is, fabrication of a transparent stamp 2 with a metal masking layer 1 . Coat a layer of 2um thick chrome layer on the quartz substrate with a magnetron sputtering coating machine, and then coat az1500 photoresist on the surface of the chrome layer with a thickness of 2um, pre-bake at 100°C for 10min on a hot plate, and then expose to 365nm ultraviolet light Under the machine, use a mask plate with a cylinder diameter of 6um, a square arrangement, and a column-to-space ratio of 1:20, using a contact exposure method with an exposure dose of 100mJ / cm 2 , developing f...

Embodiment 2

[0035] This embodiment provides a UV imprinting method for manufacturing a micro-via array cancer cell detection chip. The modified transfer printing uv adhesive material is used as the photosensitive material layer, and the embossing substrate is copper foil to make a micro-via array cancer cell detection chip. , the specific implementation steps are as follows:

[0036] (1) The production of imprint stamps, that is, the production of transparent stamps with metal masking layers. Use a vacuum evaporation coating machine to coat a layer of 500nm thick chromium layer on the pmma substrate treated with a release agent, and then coat SU8 photoresist on the surface of the chromium layer with a thickness of 10um, pre-bake on a hot plate at 95°C for 10min, and then Under a 365nm ultraviolet exposure machine, using a mask plate with a diameter of 15um circular holes, a hexagonal arrangement, and a hole-to-space ratio of 1:10, the contact exposure method is adopted, and the exposure d...

Embodiment 3

[0042] This embodiment provides a UV imprinting manufacturing method of micro-via array cancer cell detection chip, using modified transfer printing uv glue material as the photosensitive material layer, and the imprinting substrate is made of water-soluble uv glue material to make micro-via array cancer The specific implementation steps of the cell detection chip are as follows:

[0043] (1) The production of imprint stamps, that is, the production of transparent stamps with metal masking layers. A 100nm thick chromium layer is plated on the fluorinated resin material substrate using an electron beam evaporation coating machine, and then coated with SU8 photoresist on the surface of the chromium layer, the thickness of the glue is 20um, pre-baked at 95°C on a hot plate for 10min, and then heated at 365nm Under the ultraviolet exposure machine, using a mask plate with a diameter of 50um circular holes, a quadrilateral arrangement, and a hole-to-space ratio of 1:1, the contact ...

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to view more

PUM

PropertyMeasurementUnit
thicknessaaaaaaaaaa
transmittivityaaaaaaaaaa
thicknessaaaaaaaaaa
Login to view more

Abstract

The invention provides an ultraviolet embossing manufacturing method for a cancer cell detection chip of a micro-through-hole array, which belongs to the field of micro-nano processing. The method adopts the technology of ultraviolet imprinting to manufacture a micro-through-hole array on a polymer film material. The idea of ​​this method is to plate a metal masking layer on the protruding part of the transparent stamp as a light-shielding film, and to block the light during UV imprinting so that it cannot be cured, while the rest of the mold is cured into a hole wall structure, and the residual glue is cleaned after demolding The obtained through-hole film layer is the detection chip. The chip can filter out normal cells and block the larger cancer cells, and then further use the existing mature pathological analysis methods to identify cancer cells and their types. The method can manufacture cancer cell detection chips in batches and at low cost, and provides an effective means for early cancer detection.

Description

technical field [0001] The invention relates to a novel micro-nano processing method, in particular to a method for making a micro-through-hole array cancer cell detection chip by ultraviolet imprinting, which belongs to the category of micro-nano optics. Background technique [0002] Cancer is the most important disease that threatens human health. 40% of the global annual death toll is caused by cancer, and the average survival time of cancer patients from detection to death is only about two years. The most important factor for the high mortality rate of cancer is the untimely detection of cancer. The existing detection methods are basically aimed at the middle and advanced stages, and the treatment is very difficult. With the advancement of technology, the improvement of human living standards, and people's concern for their own health, the demand for early detection of cancer is becoming more and more urgent. [0003] At present, using a micro-through-hole array cancer...

Claims

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to view more

Application Information

Patent Timeline
no application Login to view more
Patent Type & Authority Applications(China)
IPC IPC(8): B81C1/00G03F7/00G03F7/20G03F7/30
CPCB81C1/00B81C1/00015G03F7/00G03F7/20G03F7/30
Inventor 张东张为国张之胜王赟姣高明友夏良平史浩飞杜春雷
Owner CHONGQING INST OF GREEN & INTELLIGENT TECH CHINESE ACADEMY OF SCI
Who we serve
  • R&D Engineer
  • R&D Manager
  • IP Professional
Why Eureka
  • Industry Leading Data Capabilities
  • Powerful AI technology
  • Patent DNA Extraction
Social media
Try Eureka
PatSnap group products

Browse by: Latest US Patents, China's latest patents, Technical Efficacy Thesaurus, Application Domain, Technology Topic.

© 2024 PatSnap. All rights reserved.Legal|Privacy policy|Modern Slavery Act Transparency Statement|Sitemap