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Ultraviolet imprint lithography fabricating method of micro-hole array cancer cell detecting chip

A detection chip and manufacturing method technology, applied in microstructure technology, microstructure device, microlithography exposure equipment, etc., can solve the problem of low detection accuracy, poor controllability, low efficiency, etc. problem, to achieve the effect of low processing cost, low price and high detection accuracy

Inactive Publication Date: 2016-11-16
CHONGQING INST OF GREEN & INTELLIGENT TECH CHINESE ACADEMY OF SCI
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0004] Aiming at the deficiencies in the above-mentioned background technology, the present invention provides a method for manufacturing a microvia array cancer cell detection chip by ultraviolet imprinting based on a polymer material, thereby solving the problem of the low efficiency of the existing method for manufacturing a microvia array cancer cell detection chip. Low, poor controllability, the prepared micro-via array cancer cell detection chip has low detection accuracy and high cost, providing an effective solution for the early detection of cancer cells

Method used

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  • Ultraviolet imprint lithography fabricating method of micro-hole array cancer cell detecting chip
  • Ultraviolet imprint lithography fabricating method of micro-hole array cancer cell detecting chip

Examples

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Embodiment 1

[0028] This embodiment provides a method for making a micro-via array cancer cell detection chip by ultraviolet imprinting. A modified transfer printing uv adhesive material is used as the photosensitive material layer, and the embossing substrate is aluminum foil to make a micro-via array cancer cell detection chip. The specific implementation steps are as follows:

[0029] (1) Fabrication of an imprint stamp, that is, fabrication of a transparent stamp 2 with a metal masking layer 1 . Coat a layer of 2um thick chrome layer on the quartz substrate with a magnetron sputtering coating machine, and then coat az1500 photoresist on the surface of the chrome layer with a thickness of 2um, pre-bake at 100°C for 10min on a hot plate, and then expose to 365nm ultraviolet light Under the machine, use a mask plate with a cylinder diameter of 6um, a square arrangement, and a column-to-space ratio of 1:20, using a contact exposure method with an exposure dose of 100mJ / cm 2 , developing f...

Embodiment 2

[0035] This embodiment provides a UV imprinting method for manufacturing a micro-via array cancer cell detection chip. The modified transfer printing uv adhesive material is used as the photosensitive material layer, and the embossing substrate is copper foil to make a micro-via array cancer cell detection chip. , the specific implementation steps are as follows:

[0036] (1) The production of imprint stamps, that is, the production of transparent stamps with metal masking layers. Use a vacuum evaporation coating machine to coat a layer of 500nm thick chromium layer on the pmma substrate treated with a release agent, and then coat SU8 photoresist on the surface of the chromium layer with a thickness of 10um, pre-bake on a hot plate at 95°C for 10min, and then Under a 365nm ultraviolet exposure machine, using a mask plate with a diameter of 15um circular holes, a hexagonal arrangement, and a hole-to-space ratio of 1:10, the contact exposure method is adopted, and the exposure d...

Embodiment 3

[0042] This embodiment provides a UV imprinting manufacturing method of micro-via array cancer cell detection chip, using modified transfer printing uv glue material as the photosensitive material layer, and the imprinting substrate is made of water-soluble uv glue material to make micro-via array cancer The specific implementation steps of the cell detection chip are as follows:

[0043] (1) The production of imprint stamps, that is, the production of transparent stamps with metal masking layers. A 100nm thick chromium layer is plated on the fluorinated resin material substrate using an electron beam evaporation coating machine, and then coated with SU8 photoresist on the surface of the chromium layer, the thickness of the glue is 20um, pre-baked at 95°C on a hot plate for 10min, and then heated at 365nm Under the ultraviolet exposure machine, using a mask plate with a diameter of 50um circular holes, a quadrilateral arrangement, and a hole-to-space ratio of 1:1, the contact ...

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Abstract

The invention provides an ultraviolet imprint lithography fabricating method of micro-hole array cancer cell detecting chips and belongs to the micro-nano processing. The method adopts the technology of ultraviolet imprint lithography and fabricates micro-hole arrays on a polymer film material. The idea of the method lies in that a metal concealing layer is plated on a protruding part of a transparent moulage as a light shielding film; light shielding processing is performed in the case of ultraviolet imprint lithography so that the protruding part of the transparent moulage is not cured when other parts of the transparent moulage are cured into a hole wall structure; and a detecting chip is obtained after demolding and adhesive residue cleaning. With application of the chip, normal cells can be filtered out while cancerous cells in larger size can be blocked; and further, mature pathological analysis means in the prior art can be further utilized to discriminate cancer cells and types of cancer cells. Cancer detecting chips can be fabricated in batches with low cost by means of the method, providing an effective way to detection of early cancer.

Description

technical field [0001] The invention relates to a novel micro-nano processing method, in particular to a method for making a micro-through-hole array cancer cell detection chip by ultraviolet imprinting, which belongs to the category of micro-nano optics. Background technique [0002] Cancer is the most important disease that threatens human health. 40% of the global annual death toll is caused by cancer, and the average survival time of cancer patients from detection to death is only about two years. The most important factor for the high mortality rate of cancer is the untimely detection of cancer. The existing detection methods are basically aimed at the middle and advanced stages, and the treatment is very difficult. With the advancement of technology, the improvement of human living standards, and people's concern for their own health, the demand for early detection of cancer is becoming more and more urgent. [0003] At present, using a micro-through-hole array cancer...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): B81C1/00G03F7/00G03F7/20G03F7/30
CPCB81C1/00B81C1/00015G03F7/00G03F7/20G03F7/30
Inventor 张东张为国张之胜王赟姣高明友夏良平史浩飞杜春雷
Owner CHONGQING INST OF GREEN & INTELLIGENT TECH CHINESE ACADEMY OF SCI
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