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Functionally-gradient diamond-like carbon film and preparing method and product of functionally-gradient diamond-like carbon film

A functional gradient, diamond technology, applied in metal material coating process, ion implantation plating, coating, etc., can solve the decorative needs such as affecting the surface quality of DLC film decorative layer, high process cost, ignoring high surface finish and color And other issues

Active Publication Date: 2016-11-16
ZHUHAI ROSSINI WATCH IND +1
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, due to the high cost of processes such as electron cyclotron microwave plasma deposition, magnetic filter vacuum cathodic arc deposition, plasma implantation deposition, and high-power pulsed magnetron sputtering plasma coating techniques, these new process technologies are far from commercialization. promotion degree
[0008] In addition, the current research on the deposition process of DLC films focuses on improving the film-substrate bonding force, the ideal match of hardness and toughness, etc., and mostly ignores the decorative requirements such as high surface finish and color, such as the middle layer or transition layer film in the production process. The large particles inevitably produced during the deposition process will inevitably affect the surface quality of the DLC thin film decorative layer

Method used

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  • Functionally-gradient diamond-like carbon film and preparing method and product of functionally-gradient diamond-like carbon film
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  • Functionally-gradient diamond-like carbon film and preparing method and product of functionally-gradient diamond-like carbon film

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Effect test

Embodiment 1

[0117] A method for preparing a functionally graded diamond-like carbon film in this embodiment, the flow chart is shown in figure 1 , including the following steps:

[0118] 1) Pretreatment of stainless steel workpieces: at room temperature, place polished stainless steel watch appearance workpieces in an ultrasonic cleaner filled with an environmentally friendly water-based metal cleaning solution for surface cleaning and degreasing (according to conventional methods); into ethanol solution and dried after dehydration.

[0119] 2) Ion cleaning and etching on the surface of the workpiece: (1) Place the polished stainless steel watch appearance workpiece in the reaction furnace and keep the vacuum degree in the reaction furnace at 5.0×10 -3 Pa; (2) Start the Ta-HCD electron gun and the heating device in the furnace and control the current to 70A after the Ta-HCD electron gun arcs, and the plasma arc of the Ta-HCD source directly irradiates the surface of the workpiece until t...

Embodiment 2

[0132] A method for preparing a functionally graded diamond-like carbon film in this embodiment comprises the following steps:

[0133] 1) Pretreatment of stainless steel workpieces: at room temperature, place polished stainless steel watch appearance parts in an ultrasonic cleaner filled with an environmentally friendly water-based metal cleaning solution for surface cleaning and degreasing; then put the cleaned workpieces into ethanol solution for dehydration After drying.

[0134] 2) Ion cleaning and etching on the surface of the workpiece: (1) Place the polished stainless steel watch appearance workpiece in the reaction furnace and keep the vacuum degree in the reaction furnace at 2.0×10 -3 Pa; (2) Start the Ta-HCD electron gun and the heating device in the furnace and control the current to 120A after the Ta-HCD electron gun arcs, and the plasma arc of the Ta-HCD source directly irradiates the surface of the workpiece until the temperature in the vacuum chamber reaches 20...

Embodiment 3

[0147] A method for preparing a functionally graded diamond-like carbon film in this embodiment comprises the following steps:

[0148] 1) Pretreatment of stainless steel workpieces: at room temperature, place polished stainless steel watch appearance parts in an ultrasonic cleaner filled with an environmentally friendly water-based metal cleaning solution for surface cleaning and degreasing; then put the cleaned workpieces into ethanol solution for dehydration After drying.

[0149] 2) Ion cleaning and etching on the surface of the workpiece: (1) Place the polished stainless steel watch appearance workpiece in the reaction furnace and keep the vacuum degree in the reaction furnace at 2.0×10 -3 Pa; (2) Start the Ta-HCD electron gun and the heating device in the furnace and control the current to 150A after the Ta-HCD electron gun arcs, and the Ta-HCD source plasma arc directly irradiates the surface of the workpiece until the temperature in the vacuum chamber reaches 120 ° C; ...

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Abstract

The invention relates to a functionally-gradient diamond-like carbon film and a preparing method and product of the functionally-gradient diamond-like carbon film. The preparing method of the functionally-gradient diamond-like carbon film includes the steps that firstly, hollow cathode electron beam auxiliary pulsed bias voltage multi-arc ion plating is used for depositing a metal substrate layer on the surface of a workpiece; secondly, hollow cathode electron beam auxiliary pulsed bias voltage multi-arc ion plating is used for depositing a metal nitride transitional layer on the surface of the metal substrate layer; thirdly, pulsed bias voltage ion beam auxiliary magnetron sputtering is used for depositing a metal carbon-nitride gradient layer on the surface of the metal nitride transitional layer; and fourthly, pulsed bias voltage ion beam auxiliary magnetron sputtering is used for depositing a diamond-like carbon decoration layer on the surface of the metal carbon-nitride gradient layer. The diamond-like carbon film prepared through the preparing method has the beneficial effects of being high in glossiness, high in interface bonding strength and high in surface hardness, and in addition, wear resistance, corrosion resistance and scratching preventing performance are good.

Description

technical field [0001] The invention relates to the technical field of thin film materials, in particular to a functionally graded diamond-like carbon thin film and a preparation method and product thereof. Background technique [0002] Diamond-like carbon (Diamond-like Carbon, DLC) film is a new type of film material similar to diamond film, it has high hardness, good thermal conductivity, extremely low friction coefficient, excellent electrical insulation performance, high Its chemical stability and infrared light transmission properties have been widely used in various fields such as machinery, electronics, optics and medicine. The surface of the diamond-like carbon film coating is composed of a large number of amorphous carbon cluster bundles, and its surface is uniform and dense, which is an excellent surface anti-wear modification film. Compared with the general diamond film layer, the deposition temperature of the diamond-like film is lower, the deposition area is la...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C23C14/32C23C14/35C23C14/46C23C14/16C23C14/02C23C14/06
CPCC23C14/0021C23C14/022C23C14/0605C23C14/0641C23C14/0664C23C14/16C23C14/325C23C14/35C23C14/46
Inventor 赵可沦王永宁彭继华刘海华宋鹏涛
Owner ZHUHAI ROSSINI WATCH IND
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